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    • 14. 发明授权
    • Method of manufacturing thin film diode
    • 制造薄膜二极管的方法
    • US6040201A
    • 2000-03-21
    • US931972
    • 1997-09-15
    • Yuichi AkibaMasafumi Ide
    • Yuichi AkibaMasafumi Ide
    • G02F1/1365H01L21/329H01L21/77H01L21/84H01L27/12H01L21/00
    • H01L45/00G02F1/1365H01L27/1214H01L29/6609
    • A method of manufacturing a thin film diode incorporated in a liquid crystal display, comprising a lower electrode connected with a signal electrode, an anodic oxidation film formed on the surface of the lower electrode, and an upper electrode formed so as to overlie the lower electrode via the anodic oxidation film and connected with a pixel electrode. The thin film diode is fabricated by forming a lower electrode material film made of a tantalum nitride film on a substrate, forming the lower electrode and the signal electrode by means of etching the lower electrode material film, forming the anodic oxidation film made of a tantalum oxide film on the surface of the lower electrode by means of the anodic oxidation treatment applied thereto, forming an upper electrode material film composed of a transparent and electrically conductive film on the entire surface of the substrate after an annealing applied in a vacuum, and forming the upper electrode and the pixel electrode by means of etching the upper electrode material film using a photoresist as an etching mask, after applying another annealing in a vacuum.
    • 一种制造结合在液晶显示器中的薄膜二极管的方法,包括与信号电极连接的下电极,形成在下电极表面上的阳极氧化膜和形成为覆盖在下电极上的上电极 通过阳极氧化膜并与像素电极连接。 通过在基板上形成由氮化钽膜制成的下电极材料膜,通过蚀刻下电极材料膜形成下电极和信号电极来制造薄膜二极管,形成由钽制成的阳极氧化膜 通过施加阳极氧化处理在下电极的表面上形成氧化膜,在真空中进行退火后,在基板的整个表面上形成由透明导电膜构成的上电极材料膜,以及形成 通过在真空中进行另一退火之后,使用光致抗蚀剂作为蚀刻掩模,通过蚀刻上电极材料膜,上电极和像素电极。
    • 15. 发明授权
    • Method of manufacturing thin film diode
    • 制造薄膜二极管的方法
    • US5866301A
    • 1999-02-02
    • US827715
    • 1997-04-08
    • Masafumi IdeSatoshi NakayamaTakashi Toida
    • Masafumi IdeSatoshi NakayamaTakashi Toida
    • G02F1/1365H01L21/02G02F1/1343
    • H01L28/40G02F1/1365
    • A method of manufacturing a thin film diode incorporated in a liquid crystal display, comprising a lower electrode connected with a signal electrode, an anodic oxidation film formed on the surface of the lower electrode, and an upper electrode formed so as to overlie the lower electrode via the anodic oxidation film and connected with a pixel electrode. The thin film diode is fabricated by forming a lower electrode material film on a substrate, forming the lower electrode and the signal electrode by means of etching the lower electrode material film, forming the anodic oxidation film on the surface of the lower electrode by means of the anodic oxidation treatment applied thereto, forming an upper electrode material film composed of a transparent and electrically conductive film on the entire surface of the substrate after a heat treatment applied in a vacuum, and forming the upper electrode and the pixel electrode by means of etching the upper electrode material film using a photoresist as an etching mask, after applying another heat treatment in a vacuum.
    • 一种制造结合在液晶显示器中的薄膜二极管的方法,包括与信号电极连接的下电极,形成在下电极表面上的阳极氧化膜和形成为覆盖在下电极上的上电极 通过阳极氧化膜并与像素电极连接。 薄膜二极管是通过在基板上形成下部电极材料膜而形成的,通过蚀刻下部电极材料膜形成下部电极和信号电极,在下部电极的表面上形成阳极氧化膜,借助于 对其进行阳极氧化处理,在真空中进行热处理之后,在基板的整个表面上形成由透明导电膜构成的上部电极材料膜,并通过蚀刻形成上部电极和像素电极 使用光致抗蚀剂作为蚀刻掩模的上部电极材料膜在真空中进行另外的热处理之后。
    • 19. 发明授权
    • Liquid crystal optical modulator and the process for producing the same
    • 液晶光学调制器及其制造方法
    • US07889307B2
    • 2011-02-15
    • US11723787
    • 2007-03-22
    • Masafumi Ide
    • Masafumi Ide
    • G02F1/1339
    • G02F1/1339
    • A space between substrates in a liquid crystal optical modulator can be sealed with a metal by using a simple configuration. In a seal structure between the substrates constituting a liquid crystal cell in a liquid crystal optical modulator, metal members are provided on the opposing surfaces of the two substrates, and the base metal surfaces of the metal members are brought into direct contract and joined. As a result, a low-melting metal such as a solder that has been conventionally introduced into the joint section becomes unnecessary, and a metal seal providing for strong bonding can be formed with a simple configuration. The liquid crystal optical modulator has a first substrate having a first electrode pattern including a pixel electrode, a second substrate having a second electrode pattern including a counter electrode, and a metal seal disposed so as to be sandwiched between the first substrate and the second substrate. The metal seal is formed between a first metal member composed of a metal material and formed on the first substrate and a second metal member composed of a metal material and formed on the second substrate by directly joining the metal surfaces of the two metal members.
    • 液晶光调制器中的基板之间的空间可以通过简单的结构用金属密封。 在构成液晶光学调制器中的液晶单元的基板之间的密封结构中,金属构件设置在两个基板的相对表面上,金属构件的基体金属表面被直接接合和接合。 结果,不需要通常引入接头部分的诸如焊料的低熔点金属,并且可以以简单的构造形成提供强粘结的金属密封。 液晶光调制器具有第一基板,具有包括像素电极的第一电极图案,具有包括反电极的第二电极图案的第二基板和设置成夹在第一基板和第二基板之间的金属密封件 。 金属密封件形成在由金属材料构成并形成在第一基板上的第一金属构件和由金属材料构成的第二金属构件之间,并且通过直接连接两个金属构件的金属表面而形成在第二基板上。