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11. 发明授权

US08666165B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US08666165B2
公开(公告)日：2014-03-04
申请号：US12249014
申请日：2008-10-10
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： G06K9/00
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

12. 发明授权

US07849304B2 System and method for on-line diagnostics 有权
标题翻译：用于在线诊断的系统和方法
公开(公告)号：US07849304B2
公开(公告)日：2010-12-07
申请号：US11812496
申请日：2007-06-19
申请人： Juntaro Arima , Takashi Iizumi , Masaaki Inaba
发明人： Juntaro Arima , Takashi Iizumi , Masaaki Inaba
IPC分类号： H04L29/06 , H04L9/00 , G05B19/18 , G05B23/02 , G09G5/00 , H04J1/16
CPC分类号： H04L67/125 , G05B9/02 , G05B19/4184 , G05B23/0267 , G05B2219/31457 , G05B2219/33284 , G05B2219/36542 , H04L9/0825 , H04L41/28 , H04L43/0817 , H04L63/0435 , H04L2209/34 , H04L2209/60 , Y02P90/04 , Y02P90/14 , Y02P90/86
摘要： An on-line diagnostic system and method enable equipment information stored in each piece of industrial equipment to be safely disclosed to maintenance personnel to the extent permitted by the user of the industrial equipment. The on-line diagnostics systems comprises industrial equipment and a maintenance apparatus for the maintenance of the industrial equipment, which are connected via the Internet. Equipment information indicating the state of the industrial equipment is encrypted using a specific common key, and the encrypted equipment information is transmitted to the maintenance apparatus in response to a request therefrom. The fact that the common key has been transmitted from the industrial equipment to the maintenance apparatus is outputted. After receiving the encrypted equipment information and the common key that have been transmitted, the encrypted equipment formation is decrypted using the common key, and the decrypted equipment information is outputted.
摘要翻译：一种在线诊断系统和方法使得存储在每个工业设备中的设备信息在工业设备的用户允许的范围内被安全地披露给维护人员。在线诊断系统包括通过因特网连接的工业设备和用于维护工业设备的维护设备。指示工业设备的状态的设备信息使用特定的公用密钥进行加密，并且根据其请求将加密的设备信息发送给维护设备。输出公用密钥从工业设备传送到维护设备的事实。在接收到已经发送的加密设备信息和公用密钥之后，使用公共密钥解密加密的设备形成，并且输出解密的设备信息。

13. 发明授权

US07439505B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US07439505B2
公开(公告)日：2008-10-21
申请号：US11292002
申请日：2005-12-02
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

14. 发明申请

US20080133032A1 SYSTEM AND METHOD FOR ON-LINE DIAGNOSTICS 审中-公开
标题翻译：用于在线诊断的系统和方法
公开(公告)号：US20080133032A1
公开(公告)日：2008-06-05
申请号：US11965389
申请日：2007-12-27
申请人： Juntaro Arima , Takashi Iizumi , Masaaki Inaba
发明人： Juntaro Arima , Takashi Iizumi , Masaaki Inaba
IPC分类号： G05B15/02
CPC分类号： H04L67/125 , G05B9/02 , G05B19/4184 , G05B23/0267 , G05B2219/31457 , G05B2219/33284 , G05B2219/36542 , H04L9/0825 , H04L41/28 , H04L43/0817 , H04L63/0435 , H04L2209/34 , H04L2209/60 , Y02P90/04 , Y02P90/14 , Y02P90/86
摘要： An on-line diagnostics system and method enable equipment information stored in each piece of industrial equipment to be safely disclosed to maintenance personnel to the extent permitted by the user of the industrial equipment. The on-line diagnostic system comprises industrial equipment and a maintenance apparatus for the maintenance of the industrial equipment, which are connected via the Internet. Equipment information indicating the state of the industrial equipment is encrypted using a specific common key, and the encrypted equipment information is transmitted to the maintenance apparatus in response to a request therefrom. The fact that the common key has been transmitted from the industrial equipment to the maintenance apparatus is outputted. After receiving the encrypted equipment information and the common key that have been transmitted, the encrypted equipment information is decrypted using the common key, and the decrypted equipment information is outputted.
摘要翻译：在线诊断系统和方法使得存储在每个工业设备中的设备信息在工业设备的用户允许的范围内被安全地披露给维护人员。在线诊断系统包括通过互联网连接的工业设备和用于维护工业设备的维护设备。指示工业设备的状态的设备信息使用特定的公用密钥进行加密，并且根据其请求将加密的设备信息发送给维护设备。输出公用密钥从工业设备传送到维护设备的事实。在接收到已经发送的加密设备信息和公用密钥之后，使用公用密钥解密加密的设备信息，并输出解密的设备信息。

15. 发明授权

US07177715B2 Remote maintenance method for generating maintenance charge information, industrial device, and semiconductor device 有权
标题翻译：用于生成维护费用信息的远程维护方法，工业设备和半导体器件
公开(公告)号：US07177715B2
公开(公告)日：2007-02-13
申请号：US10943964
申请日：2004-09-20
申请人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
发明人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
IPC分类号： G06F19/00 , G06F11/30
CPC分类号： G06Q10/06 , G05B19/4184 , G05B23/0267 , G05B23/0283 , G05B2219/24001 , G05B2219/32234 , G06Q30/0283 , G06Q30/04 , Y02P90/14 , Y02P90/18 , Y02P90/86
摘要： The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.
摘要翻译：本发明提供了一种远程维护方法，远程维护系统和工业设备，用于根据远程维护操作的内容和维护的请求目的地以及根据本发明的属性启用访问限制来实现全面的服务和计费服务人员根据设备状态访问限制，并根据输出模式输出限制。安装在工厂120的工业设备123和安装在维护中心110中的操作设备113经由网络100连接。操作装置113向工业装置123发送指示关于维护的命令的指令信息，工业装置123根据接收到的命令信息执行处理，根据执行的处理的内容生成表示与维护有关的费用的费用信息，将所生成的电荷信息的全部或一部分输出到工业设备123的输出装置。

16. 发明授权

US07002151B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US07002151B2
公开(公告)日：2006-02-21
申请号：US10933342
申请日：2004-09-03
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

17. 发明申请

US20050033465A1 Remote maintenance method, industrial device, and semiconductor device 有权
公开(公告)号：US20050033465A1
公开(公告)日：2005-02-10
申请号：US10943891
申请日：2004-09-20
申请人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
发明人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
IPC分类号： G05B23/02 , G06Q30/04 , G06Q30/06 , G06Q50/00 , G06Q50/10 , H01L21/02 , G06F19/00
CPC分类号： G06Q10/06 , G05B19/4184 , G05B23/0267 , G05B23/0283 , G05B2219/24001 , G05B2219/32234 , G06Q30/0283 , G06Q30/04 , Y02P90/14 , Y02P90/18 , Y02P90/86
摘要： The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.

18. 发明授权

US06792325B2 Remote maintenance method, industrial device, and semiconductor device 失效
标题翻译：远程维护方法，工业设备和半导体器件
公开(公告)号：US06792325B2
公开(公告)日：2004-09-14
申请号：US10196427
申请日：2002-07-17
申请人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
发明人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
IPC分类号： G06F1900
CPC分类号： G06Q10/06 , G05B19/4184 , G05B23/0267 , G05B23/0283 , G05B2219/24001 , G05B2219/32234 , G06Q30/0283 , G06Q30/04 , Y02P90/14 , Y02P90/18 , Y02P90/86
摘要： The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.
摘要翻译：本发明提供了一种远程维护方法，远程维护系统和工业设备，用于根据远程维护操作的内容和维护的请求目的地以及根据本发明的属性启用访问限制来实现全面的服务和计费服务人员根据设备状态访问限制，并根据输出模式输出限制。安装在工厂120的工业设备123和安装在维护中心110中的操作设备113经由网络100连接。操作设备113向工业设备123发送指示关于维护的命令的命令信息，并且工业设备123执行根据接收到的命令信息的处理，根据所执行的处理的内容生成表示与维护有关的费用的费用信息，并将生成的收费信息的全部或一部分输出到工业装置123的输出装置。

19. 发明授权

US07551976B2 Industrial device receiving remote maintenance operation and outputting charge information 有权
标题翻译：工业设备接收远程维护操作并输出费用信息
公开(公告)号：US07551976B2
公开(公告)日：2009-06-23
申请号：US11648684
申请日：2007-01-03
申请人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
发明人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
IPC分类号： G06F19/00 , G21C17/00
CPC分类号： G06Q10/06 , G05B19/4184 , G05B23/0267 , G05B23/0283 , G05B2219/24001 , G05B2219/32234 , G06Q30/0283 , G06Q30/04 , Y02P90/14 , Y02P90/18 , Y02P90/86
摘要： The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.
摘要翻译：本发明提供了一种远程维护方法，远程维护系统和工业设备，用于根据远程维护操作的内容和维护的请求目的地以及根据本发明的属性启用访问限制来实现全面的服务和计费服务人员根据设备状态访问限制，并根据输出模式输出限制。安装在工厂120的工业设备123和安装在维护中心110中的操作设备113经由网络100连接。操作设备113向工业设备123发送指示关于维护的命令的命令信息，并且工业设备123执行根据接收到的命令信息的处理，根据所执行的处理的内容生成表示与维护有关的费用的费用信息，并将生成的收费信息的全部或一部分输出到工业装置123的输出装置。

20. 发明申请

US20090041333A1 SCANNING ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20090041333A1
公开(公告)日：2009-02-12
申请号：US12249014
申请日：2008-10-10
申请人： Satoru YAMAGUCHI , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru YAMAGUCHI , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： G06K9/00 , G01N23/00
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

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