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    • 13. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US07045450B2
    • 2006-05-16
    • US10875052
    • 2004-06-22
    • Sang Ick LeeJong Han ShinHyung Soon Park
    • Sang Ick LeeJong Han ShinHyung Soon Park
    • H01L21/44
    • H01L21/76897H01L21/7684H01L27/10855H01L27/10873H01L27/10888
    • Disclosed is a method of manufacturing a semiconductor device. The method includes the steps of forming gates on a substrate, forming junction areas on a surface of the substrate, forming a first BPSG layer on a resultant structure of the substrate, performing a first CVD process for the first BPSG layer, forming a second BPSG layer on the first BPSG layer, forming a landing plug contact, depositing a polysilicon layer on a resultant structure of the substrate, and performing a second CMP process for the polysilicon layer, the second BPSG layer and the nitride hard mask. The CMP processes are carried by using acid slurry having a high polishing selectivity with respect to the nitride layer, so a step difference between the cell region and the peripheral region is removed, thereby simplifying the semiconductor manufacturing process and removing a dishing phenomenon.
    • 公开了半导体器件的制造方法。 该方法包括以下步骤:在衬底上形成栅极,在衬底的表面上形成接合区域,在衬底的所得结构上形成第一BPSG层,对第一BPSG层执行第一CVD工艺,形成第二BPSG 在第一BPSG层上形成着色插头接触,在所得衬底的所得结构上沉积多晶硅层,以及对多晶硅层,第二BPSG层和氮化物硬掩模执行第二CMP工艺。 通过使用相对于氮化物层具有高抛光选择性的酸性浆料来进行CMP处理,从而消除了单元区域和外围区域之间的阶跃差异,从而简化了半导体制造工艺并消除了凹陷现象。
    • 14. 发明授权
    • Artificial neural circuit using pulse coding
    • 人工神经电路采用脉冲编码
    • US5633989A
    • 1997-05-27
    • US298286
    • 1994-08-31
    • Jong-Han ShinJong-Geon Shin
    • Jong-Han ShinJong-Geon Shin
    • G06G7/60G06F15/18G06N3/06G06N3/063
    • G06N3/0635
    • Disclosed is an artificial neural circuit using a pulse coding such as a stochastic pulse coding or a noise feedback pulse coding, the circuit comprising a synapse circuit section for producing and absorbing a current signal proportional to a weight voltage signal upon an externally applied current signal being supplied; a neuron body circuit section for spacio-temporally integrating output signal of the synapse circuit section to produce an analog voltage signal; and an axon hillock circuit for converting the analog voltage signal into a pulse train using a predetermined reference signal. The synapse circuit section including a first input terminal for receiving a first reference voltage; a second input terminal for receiving a second reference voltage; a third input terminal for receiving a third reference voltage; a fourth terminal for receiving the weight voltage signal; a first transistor having drain and source connected to the first reference voltage and a junction point, respectively, and gate connected to the fourth input terminal; a second transistor having drain and source connected to the junction point and the second input terminal, respectively, and gate connected to the third input terminal; and a third transistor having drain and source connected respectively to the junction point and an output terminal of the synapse circuit section, and gate connected to an input terminal for receiving the externally applied current signal.
    • 公开了使用诸如随机脉冲编码或噪声反馈脉冲编码的脉冲编码的人造神经电路,该电路包括突触电路部分,用于在外部施加的电流信号时产生和吸收与重量电压信号成比例的电流信号 供应; 用于对突触电路部分的输出信号进行时空积分以产生模拟电压信号的神经元体电路部分; 以及用于使用预定参考信号将模拟电压信号转换成脉冲串的轴突小丘电路。 所述突触电路部分包括用于接收第一参考电压的第一输入端; 用于接收第二参考电压的第二输入端; 用于接收第三参考电压的第三输入端; 用于接收重量电压信号的第四端子; 第一晶体管,其漏极和源极分别连接到第一参考电压和接合点,栅极连接到第四输入端; 第二晶体管,其漏极和源极分别连接到所述连接点和所述第二输入端子,并且栅极连接到所述第三输入端子; 以及第三晶体管,其漏极和源极分别连接到所述连接点和所述突触电路部分的输出端子,并且栅极连接到用于接收外部施加的电流信号的输入端子。