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11. 发明授权

US07649677B2 Multi-ridged subwavelength aperture for optical transmission and thermally assisted magnetic recording 有权
标题翻译：用于光学传输和热辅助磁记录的多脊亚波长孔径
公开(公告)号：US07649677B2
公开(公告)日：2010-01-19
申请号：US11398170
申请日：2006-04-04
申请人： Xuhui Jin , Chie Ching Poon , Timothy Carl Strand , Henry Hung Yang
发明人： Xuhui Jin , Chie Ching Poon , Timothy Carl Strand , Henry Hung Yang
IPC分类号： G02F2/00 , G11B19/02 , G02B6/10 , G02B6/12
CPC分类号： G11B5/314 , G11B5/02 , G11B2005/0005 , G11B2005/0021
摘要： A subwavelength aperture includes a plurality of ridges that project from an aperture sidewall into the aperture opening. The ridges may be closely spaced such that the hot spots associated with the ridges are likewise closely spaced and create an elongated hot spot. The subwavelength aperture of the present invention may be adapted for use in a magnetic head of a hard disk drive for improved thermally assisted recording (TAR) of magnetic data bits. Such a magnetic head may include an optical resonant cavity that is fabricated within the magnetic head structure.
摘要翻译：亚波长孔径包括从孔侧壁突出到孔口中的多个脊。脊可以紧密地间隔开，使得与脊相关联的热点同样紧密地间隔开并产生细长的热点。本发明的亚波长孔径可以适用于硬盘驱动器的磁头，用于改善磁数据位的热辅助记录（TAR）。这样的磁头可以包括在磁头结构内制造的光学谐振腔。

12. 发明申请

US20090310256A1 METHOD FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS, MASTER MOLD MADE BY THE METHOD, AND DISK IMPRINTED BY THE MASTER MOLD 有权
标题翻译：用于制造具有高比特率比例的主模具用于纳米图案磁记录盘的方法，通过该方法制造的主模具和主模具所示的盘
公开(公告)号：US20090310256A1
公开(公告)日：2009-12-17
申请号：US12141060
申请日：2008-06-17
申请人： Thomas R. Albrecht , Barry Cushing Stipe , Henry Hung Yang
发明人： Thomas R. Albrecht , Barry Cushing Stipe , Henry Hung Yang
IPC分类号： G11B5/82 , B44C1/22 , B28B1/00
CPC分类号： G11B5/855
摘要： A method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks results in a master mold having topographic pillars arranged in a pattern of annular bands of concentric rings. The ratio of circumferential density of the pillars to the radial density of the concentric rings in a band is greater than 1. The method uses sidewall lithography to first form a pattern of generally radially-directed pairs of parallel lines on the master mold substrate, with the lines being grouped into annular zones or bands. The sidewall lithography process can be repeated, resulting in a doubling of the number of lines each time the process is repeated. Conventional lithography is used to form concentric rings over the radially-directed pairs of parallel lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands. The master mold may be used to nanoimprint the disks, resulting in disks having a BAR greater than 1, wherein BAR is the ratio of data track spacing in the radial direction to the data island spacing in the circumferential direction.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母模的方法导致具有布置成同心环的环形带图案的形状柱的母模。柱的圆周密度与带中同心环的径向密度的比率大于1.该方法使用侧壁光刻法首先在母模基底上形成大致径向定向的平行线对的图案，其中，线路被分组成环形区域或带。可以重复侧壁光刻处理，导致每次重复该过程的行数加倍。常规光刻用于在径向对平行线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。主模可以用于纳米压印盘，导致具有大于1的BAR的盘，其中BAR是径向方向上的数据轨道间隔与圆周方向上的数据岛间隔的比率。

13. 发明授权

US08474128B2 Planarization methods for patterned media disks 失效
标题翻译：图案化媒体盘的平面化方法
公开(公告)号：US08474128B2
公开(公告)日：2013-07-02
申请号：US13082189
申请日：2011-04-07
申请人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
发明人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
摘要翻译：提供了一种用于在具有第一近似平面的基板中形成多个磁性材料区域的方法。该方法包括以下步骤：在基板的第一表面中制造突起，在第一表面上沉积磁性材料，使得凸起的顶部被磁性材料覆盖，并将填充材料沉积在如此制造的基板上。然后可以例如通过化学机械抛光将填料材料平坦化。在替代实施例中，磁性材料沉积在基底上，并且其部分被去除，留下材料岛。然后沉积填料，其可以被平坦化。

14. 发明授权

US07941911B2 Planarization methods for patterned media disks 有权
标题翻译：图案化媒体盘的平面化方法
公开(公告)号：US07941911B2
公开(公告)日：2011-05-17
申请号：US11641237
申请日：2006-12-18
申请人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
发明人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
摘要翻译：提供了一种用于在具有第一近似平面的基板中形成多个磁性材料区域的方法。该方法包括以下步骤：在衬底的第一表面中制造突起，在第一表面上沉积磁性材料，使得突起的顶部被磁性材料覆盖，并将填充材料沉积在如此制造的衬底上。然后可以例如通过化学机械抛光将填料材料平坦化。在替代实施例中，磁性材料沉积在基底上，并且其部分被去除，留下材料岛。然后沉积填料，其可以被平坦化。

15. 发明授权

US07648641B2 Method and apparatus for creating a topographically patterned substrate 失效
标题翻译：用于产生地形图案化衬底的方法和装置
公开(公告)号：US07648641B2
公开(公告)日：2010-01-19
申请号：US11155099
申请日：2005-06-17
申请人： Thomas Robert Albrecht , Henry Hung Yang
发明人： Thomas Robert Albrecht , Henry Hung Yang
IPC分类号： B44C1/22
CPC分类号： C23F1/02 , B82Y10/00 , C23F1/26 , G11B5/012 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , H01L21/0337 , H01L21/3086 , Y10T428/26 , Y10T428/31504 , Y10T428/31678 , Y10T428/31721 , Y10T428/31935
摘要： A method of the present invention is presented for deep etching of features on a surface. In one embodiment, the method includes providing a substrate having a surface selected to undergo a feature etching process and coating the substrate surface with a protective layer and an imprintable layer. The coated substrate is then subjected to a feature imprinting and etching process. Subsequent to the feature etching process, exposed portions of the protective layer are removed, exposing a well-defined, topographically patterned substrate. In addition, an apparatus for undergoing a feature etching process is disclosed. The apparatus comprises a substrate, an imprintable layer selected to undergo an imprinting process, and a protective layer positioned between the substrate and the imprintable layer. The protective layer may be selected to provide additional protection to selected portions of the substrate and to prevent non-planar byproducts of the feature etching process from transferring to the selected portions.
摘要翻译：本发明的方法用于深刻蚀表面上的特征。在一个实施例中，该方法包括提供具有被选择用于经历特征蚀刻工艺的表面的衬底，并用保护层和可压印层涂覆衬底表面。然后将经涂覆的基底进行特征压印和蚀刻工艺。在特征蚀刻工艺之后，去除保护层的暴露部分，暴露出明确定义的，地形图案化的衬底。另外，公开了一种经历特征蚀刻工艺的装置。该装置包括基板，可压印层，其被选择进行压印处理，以及位于基板和可压印层之间的保护层。可以选择保护层以为衬底的选定部分提供额外的保护，并且防止特征蚀刻工艺的非平面副产物转移到所选择的部分。

16. 发明授权

US07466513B2 Airflow shroud for HDD tracking microactuator 有权
标题翻译：用于HDD跟踪微致动器的气流护罩
公开(公告)号：US07466513B2
公开(公告)日：2008-12-16
申请号：US10643265
申请日：2003-08-19
申请人： Toshiki Hirano , Henry Hung Yang
发明人： Toshiki Hirano , Henry Hung Yang
IPC分类号： G11B33/14 , G11B5/56 , G11B21/24
CPC分类号： G11B5/5552 , G11B5/40 , G11B5/6005 , G11B5/6082
摘要： An airflow shroud for either a moving-slider-type or a moving-head-type microactuator of a disk drive reduces off-track motion of a read/write element for either a moving-slider-type microactuator or a moving-head-type microactuator. One configuration of the airflow shroud includes a frame portion and an attachment portion. The frame portion has an opening suitable for exposing an air bearing surface of a slider for a disk drive and surrounds the slider and a moving-slider-type microactuator coupled to the slider. The attachment portion is adapted for attachment to a suspension of a disk drive. Another configuration includes a plate portion and a recessed portion. The plate portion is attachable to a slider having a moving-head-type microactuator. The recessed portion corresponds to the moving-head-type microactuator of the slider.
摘要翻译：用于磁盘驱动器的移动滑块型或移动头型微型致动器的气流罩减少用于移动滑块式微型致动器或移动头型微型致动器的读/写元件的偏离轨道运动微型制动器。气流罩的一个结构包括框架部分和附接部分。框架部分具有适于暴露用于盘驱动器的滑动器的空气轴承表面的开口，并且包围滑块和联接到滑块的移动滑块式微型致动器。附接部分适于附接到磁盘驱动器的悬架。另一种结构包括板部和凹部。板部分可附接到具有移动头型微致动器的滑块。凹部对应于滑块的移动头式微型致动器。

17. 发明授权

US07382583B2 Rotary piezoelectric microactuator and disk drive head-suspension assembly 有权
标题翻译：旋转压电微致动器和磁盘驱动头悬挂组件
公开(公告)号：US07382583B2
公开(公告)日：2008-06-03
申请号：US10928296
申请日：2004-08-26
申请人： Toshiki Hirano , Henry Hung Yang
发明人： Toshiki Hirano , Henry Hung Yang
IPC分类号： G11B5/56
CPC分类号： G11B5/5552 , G11B5/4826 , G11B5/596
摘要： The invention is a moving-slider rotary piezoelectric microactuator as the secondary actuator for a dual-stage actuator disk drive. The microactuator has a substrate attached to the disk drive suspension and a rotatable frame that supports the slider, so the head-suspension assembly includes the suspension, the microactuator and the slider with attached read/write head. The rotatable frame is attached to a fixed post on the substrate by relatively stiff torsional springs. A piezoelectric driver having a fixed end attached to the substrate provides bidirectional linear displacement of its movable end. The microactuator has a displacement amplification mechanism that includes a connecting rod and a linkage that translates the linear displacement of the driver to amplified orthogonal linear displacement of the rod. The connecting rod is attached to the rotatable frame at a radial distance to cause rotary movement of the frame, and thereby cross-track displacement of the read/write head on the slider.
摘要翻译：本发明是作为双级致动器盘驱动器的辅助致动器的移动滑块旋转压电微型致动器。微型致动器具有附接到磁盘驱动器悬架的基板和支撑滑块的可旋转框架，因此磁头悬挂组件包括具有附接的读/写头的悬架，微致动器和滑块。可旋转框架通过相对刚性的扭转弹簧附接到基板上的固定柱。具有附接到基板的固定端的压电驱动器提供其可移动端的双向线性位移。微型致动器具有位移放大机构，其包括连杆和将驱动器的线性位移转换成杆的放大的正交线性位移的连杆。连杆以径向距离连接到可旋转框架以引起框架的旋转运动，从而使读/写头在滑块上的位移。

18. 发明申请

US20080112079A1 PERPENDICULAR MAGNETIC RECORDING SYSTEM WITH PATTERNED MEDIUM AND MANUFACTURING PROCESS FOR THE MEDIUM 失效
标题翻译：具有中等尺寸的中等磁记录系统和中等制造工艺
公开(公告)号：US20080112079A1
公开(公告)日：2008-05-15
申请号：US11558846
申请日：2006-11-10
申请人： Eric Edward Fullerton , Olav Hellwig , Jeffrey S. Lille , James Terrence Olson , Petrus Antonius VanDerHeijden , Henry Hung Yang
发明人： Eric Edward Fullerton , Olav Hellwig , Jeffrey S. Lille , James Terrence Olson , Petrus Antonius VanDerHeijden , Henry Hung Yang
IPC分类号： G11B5/17
CPC分类号： G11B5/855 , G11B5/66 , G11B5/667 , G11B5/7325
摘要： A patterned perpendicular magnetic recording medium of the type that has spaced-apart pillars with magnetic material on their ends and with nonmagnetic trenches between the pillars is made with a method that allows use of a pre-etched substrate. The substrate has a generally planar surface at the trenches and comprises material that when heated will diffuse into the magnetic recording layer material and chemically react with one or more of the elements typically used in the recording layer. The pillars are formed of material that will not diffuse into the recording layer. After the recording layer is formed over the entire substrate so as to cover both the pillar ends and the trenches, the substrate is annealed. This results in the destruction or at least substantial reduction of any ferromagnetism in the recording layer material in the trenches so that the trenches are nonmagnetic. The annealing does not affect the recording layer on the ends of the pillars because the pillars are formed of material that will not diffuse into the recording layer.
摘要翻译：具有在其端部上具有磁性材料的间隔开的柱和在柱之间的非磁性沟槽的类型的垂直磁记录介质是通过允许使用预蚀刻的衬底的方法制成的。衬底在沟槽处具有大致平坦的表面，并且包括当加热时将扩散到磁记录层材料中并与通常用于记录层中的一种或多种元素发生化学反应的材料。支柱由不会扩散到记录层中的材料形成。在整个基板上形成记录层以覆盖柱端和沟槽两者之后，将基板退火。这导致在沟槽中的记录层材料中的任何铁磁体的破坏或至少显着减少，使得沟槽是非磁性的。退火不会影响支柱端部的记录层，因为支柱由不会扩散到记录层中的材料形成。

19. 发明授权

US07345851B2 Disk drive with rotary piezoelectric microactuator 有权
标题翻译：带旋转压电微致动器的磁盘驱动器
公开(公告)号：US07345851B2
公开(公告)日：2008-03-18
申请号：US10927926
申请日：2004-08-26
申请人： Toshiki Hirano , Henry Hung Yang
发明人： Toshiki Hirano , Henry Hung Yang
IPC分类号： G11B5/56
CPC分类号： G11B5/5552 , G11B5/4826 , G11B5/4873 , G11B5/596 , G11B7/123
摘要： A disk drive with a dual-stage actuator has a moving-slider rotary piezoelectric microactuator as the secondary actuator. The microactuator has a substrate attached to the disk drive suspension. A rotatable frame that supports the slider is attached to a fixed post on the substrate by relatively stiff torsional springs. A piezoelectric driver having a fixed end attached to the substrate provides bidirectional linear displacement of its movable end. The microactuator includes a displacement amplification mechanism. In one embodiment an arm or connecting rod is located between the driver's movable end and the frame. A linkage between the movable end of the driver and a first end of the connecting rod translates the linear displacement of the driver to amplified orthogonal linear displacement of the rod. The second end of the rod is attached to the rotatable frame at a radial distance to cause rotary movement of the frame, and thereby cross-track displacement of the read/write head on the slider.
摘要翻译：具有双级致动器的盘驱动器具有移动滑块旋转压电微致动器作为辅助致动器。微型致动器具有附接到磁盘驱动器悬架的基板。支撑滑块的可旋转框架通过相对刚性的扭转弹簧附接到基板上的固定柱。具有附接到基板的固定端的压电驱动器提供其可移动端的双向线性位移。微致动器包括位移放大机构。在一个实施例中，臂或连杆位于驾驶员的可移动端和框架之间。驱动器的可移动端与连杆的第一端之间的联动将驱动器的线性位移转换成杆的放大的正交线性位移。杆的第二端以径向距离附接到可旋转框架以引起框架的旋转运动，从而使读/写头在滑块上的位移。

20. 发明申请

US20130051206A1 METHOD AND SYSTEM FOR OPTICAL CALIBRATION 有权
标题翻译：光学校准的方法和系统
公开(公告)号：US20130051206A1
公开(公告)日：2013-02-28
申请号：US13223199
申请日：2011-08-31
申请人： Hamid Ghazvini , David Kuo , Minh Huong Le , Kim Yang Lee , HongYing Wang , Nobuo Kurataka , Yautzong Hsu , Henry Hung Yang
发明人： Hamid Ghazvini , David Kuo , Minh Huong Le , Kim Yang Lee , HongYing Wang , Nobuo Kurataka , Yautzong Hsu , Henry Hung Yang
IPC分类号： G11B20/18 , C23C14/34 , B29C59/02
CPC分类号： G06K5/00 , G11B5/746 , G11B5/82 , G11B5/84 , G11B5/855 , G11B20/182 , G11B27/36 , G11B2220/2516
摘要： A system and method of calibrating optical measuring equipment includes optically measuring discrete objects of a first known predictable pattern from a calibration apparatus, wherein the first known predictable pattern is a bit pattern. A recording surface optical reader is calibrated based on the optically measuring. Using the first known predictable pattern, contamination is filtered from the results of the optically measuring.
摘要翻译：校准光学测量设备的系统和方法包括从校准装置光学测量第一已知可预测图案的离散物体，其中第一已知可预测图案是位图案。基于光学测量校准记录表面光学读取器。使用第一已知的可预测模式，从光学测量的结果中滤去污染物。

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