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12. 发明授权

US4673261A Motion control apparatus for precise repeatable positioning 失效
标题翻译：用于精确重复定位的运动控制装置
公开(公告)号：US4673261A
公开(公告)日：1987-06-16
申请号：US734899
申请日：1985-05-16
申请人： Gary D. Hunt , Helmut Gilles
发明人： Gary D. Hunt , Helmut Gilles
IPC分类号： B23Q1/36 , G02B21/26 , B23Q3/08
CPC分类号： B23Q1/36 , G02B21/26
摘要： A chuck assembly is adapted to be mounted on the positioning assembly of a microscopic test device for effecting precise repeatable vertical movement of the object under test with negligible incidental movement of any other type. A triangular member fixed with respect to the positioning assembly is received in a circular recess in the upper surface of a housing. An annular projection on the bottom of the triangular member is disposed in an annular cavity in the housing, with a sealing gasket therebetween. The bottom of the cavity is coupled to an associated source of compressed air. A thin flat flexible metal disc overlies the triangular member and is fixed thereto centrally thereof, the periphery of the disc being fixedly clamped between the housing and a retaining ring. A top plate is secured to the housing. The housing, retaining ring and top plate form a unit which is vertically movable with respect to the fixed triangular member, being biased upwardly by compression springs between the housing and retaining ring and being driven downwardly by introduction of compressed air to the groove. The flexible disc limits any incidental non-vertical movement to less than 1 micron.
摘要翻译：卡盘组件适于安装在微观测试装置的定位组件上，用于以可忽略的任何其他类型的偶然运动来实现被测物体的精确可重复的垂直运动。相对于定位组件固定的三角形构件被容纳在壳体的上表面中的圆形凹部中。在三角形构件的底部上的环形突起设置在壳体中的环形空腔中，其间具有密封垫圈。空腔的底部联接到相关联的压缩空气源。薄扁平的柔性金属盘覆盖在三角形构件上并在其中央固定，盘的周边被固定地夹在壳体和保持环之间。顶板固定在外壳上。壳体，保持环和顶板形成可相对于固定三角形构件垂直移动的单元，由壳体和保持环之间的压缩弹簧向上偏压，并通过将压缩空气引入槽而向下驱动。弹性盘将任何偶然的非垂直运动限制在小于1微米。

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