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    • 17. 发明授权
    • Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM)
    • 使用扫描局部蒸发方法(SLEM)的多层图案化电子和光子器件的单通道生长
    • US07326303B2
    • 2008-02-05
    • US11327756
    • 2006-01-09
    • Fotios PapadimitrakopoulosThomas Samuel Phely-BobinDaniel Harrison Grantham, deceasedFaquir C Jain
    • Fotios PapadimitrakopoulosThomas Samuel Phely-BobinDaniel Harrison Grantham, deceasedFaquir C Jain
    • C23C14/26C23C14/12
    • C23C14/042C23C14/246C23C14/26C23C14/568H01L51/56
    • This invention describes an apparatus, Scanning Localized Evaporation Methodology (SLEM) for the close proximity deposition of thin films with high feature definition, high deposition rates, and significantly improved material economy. An array of fixed thin film heating elements, each capable of being individually energized, is mounted on a transport mechanism inside a vacuum chamber. The evaporable material is deposited on a heating element. The SLEM system loads the surface of heating elements, made of foils, with evaporable material. The loaded thin film heating element is transported to the substrate site for re-evaporation. The re-evaporation onto a substrate, which is maintained at the desired temperature, takes place through a mask. The mask, having patterned openings dictated by the structural requirements of the fabrication, may be heated to prevent clogging of the openings. The translation of the substrate past the evaporation site permits replication of the pattern over its entire surface. A multiplicity of fixed thin film heating element arrays is provided that can operate simultaneously or in sequence. Multi-layered structures of evaporable materials with high in-plane spatial pattern resolution can be deposited using this apparatus. In one version of the invention, the transport of the evaporant-loaded thin film heating elements is accomplished by the use of cylindrical rotors on whose circumference the heating elements are mounted.
    • 本发明描述了一种用于紧密沉积具有高特征定义,高沉积速率和显着提高的材料经济性的薄膜的扫描定位蒸发方法(SLEM)的装置。 一组固定的薄膜加热元件,每个固定的薄膜加热元件均能分别通电,安装在真空室内的输送机构上。 蒸发材料沉积在加热元件上。 SLEM系统用可蒸发材料加载由箔制成的加热元件的表面。 负载的薄膜加热元件被输送到基底部位以进行再蒸发。 通过掩模将保持在所需温度下的基底上的再蒸发发生。 可以加热具有由制造的结构要求所规定的图案化开口的掩模,以防止开口堵塞。 衬底经过蒸发位置的平移允许在其整个表面上复制图案。 提供了可以同时或依次操作的多个固定薄膜加热元件阵列。 可以使用该装置沉积具有高面内空间图案分辨率的蒸发材料的多层结构。 在本发明的一个实施例中,通过使用圆周转子来实现蒸发负载的薄膜加热元件的输送,圆柱形转子的圆周上装有加热元件。