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131. 发明授权

US5858314A Thermally enhanced compact reformer 失效
公开(公告)号：US5858314A
公开(公告)日：1999-01-12
申请号：US631432
申请日：1996-04-12
申请人： Michael S. Hsu , Ethan D. Hoag
发明人： Michael S. Hsu , Ethan D. Hoag
IPC分类号： H01M8/06 , B01D53/32 , B01D53/86 , B01J12/00 , B01J15/00 , B01J19/00 , B01J19/24 , B01J35/04 , C01B3/38 , H01M8/04 , H01M8/12 , H01M8/24
CPC分类号： H01M8/243 , B01D53/864 , B01D53/8653 , B01J12/005 , B01J12/007 , B01J15/005 , B01J19/249 , B01J35/04 , C01B3/382 , C01B3/384 , C01B3/386 , H01M8/0612 , H01M8/0625 , H01M8/0631 , H01M8/0662 , H01M8/2425 , B01J2208/00309 , B01J2208/022 , B01J2219/2453 , B01J2219/2458 , B01J2219/2465 , B01J2219/2467 , B01J2219/2477 , B01J2219/2479 , B01J2219/2482 , B01J2219/2485 , B01J2219/2487 , B01J2219/2493 , B01J2219/2498 , C01B2203/0233 , C01B2203/0238 , C01B2203/0244 , C01B2203/0261 , C01B2203/0283 , C01B2203/066 , C01B2203/0811 , C01B2203/0833 , C01B2203/0838 , C01B2203/0844 , C01B2203/0866 , C01B2203/1035 , C01B2203/1041 , C01B2203/1205 , C01B2203/1241 , C01B2203/1276 , C01B2203/142 , C01B2203/80 , C01B2203/82 , H01M2008/1293 , H01M2300/0077 , H01M8/04022 , H01M8/0618 , Y02P20/129 , Y02P20/52
摘要： A natural gas reformer comprising a stack of thermally conducting plates interspersed with catalyst plates and provided with internal or external manifolds for reactants. The catalyst plate is in intimate thermal contact with the conducting plates so that its temperature closely tracks the temperature of the thermally conducting plate, which can be designed to attain a near isothermal state in-plane to the plate. One or more catalysts may be used, distributed along the flow direction, in-plane to the thermally conducting plate, in a variety of optional embodiments. The reformer may be operated as a steam reformer or as a partial oxidation reformer. When operated as a steam reformer, thermal energy for the (endothermic) steam reforming reaction is provided externally by radiation and/or conduction to the thermally conducting plates. This produces carbon monoxide, hydrogen, steam and carbon dioxide. When operated as a partial oxidation reformer, a fraction of the natural gas is oxidized assisted by the presence of a combustion catalyst and reforming catalyst. This produces carbon monoxide, hydrogen, steam and carbon dioxide. Because of the intimate thermal contact between the catalyst plate and the conducting plates, no excessive temperature can develop within the stack assembly. Details of the plate design may be varied to accommodate a variety of manifolding embodiments providing one or more inlets and exit ports for introducing, pre-heating and exhaust the reactants.

132. 发明授权

US5851507A Integrated thermal process for the continuous synthesis of nanoscale powders 失效
标题翻译：用于连续合成纳米级粉末的综合热处理
公开(公告)号：US5851507A
公开(公告)日：1998-12-22
申请号：US706819
申请日：1996-09-03
申请人： Shahid Pirzada , Tapesh Yadav
发明人： Shahid Pirzada , Tapesh Yadav
IPC分类号： B01J12/00 , B01J12/02 , B01J19/24 , B22F9/12 , C01B13/14 , C01B19/00 , C01B21/06 , C01B31/36 , C01B35/04 , C01F5/06 , C01F11/06 , C01F17/00 , C01G23/00 , C01G41/02 , C01G53/00 , C04B2/10 , B22F9/00 , C01B21/072 , C01B21/30
CPC分类号： B82Y30/00 , B01J12/005 , B01J12/02 , B01J19/088 , B01J19/24 , B22F9/12 , B82Y25/00 , B82Y5/00 , C01B13/145 , C01B19/007 , C01B21/062 , C01B31/36 , C01B35/04 , C01F11/06 , C01F17/0043 , C01F5/06 , C01G23/006 , C01G41/02 , C01G53/006 , C04B2/10 , B01J2219/00094 , B01J2219/00135 , B01J2219/00155 , B01J2219/00177 , B01J2219/0018 , B01J2219/0894 , B22F2999/00 , C01P2002/01 , C01P2002/34 , C01P2002/72 , C01P2004/03 , C01P2004/04 , C01P2004/38 , C01P2004/51 , C01P2004/61 , C01P2004/64 , C01P2006/10 , C01P2006/12 , C01P2006/40 , C01P2006/60 , Y02P20/129
摘要： A continuous process that produces nanoscale powders from different types of precursor material by evaporating the material and quenching the vaporized phase in a converging-diverging expansion nozzle. The precursor material suspended in a carrier gas is continuously vaporized in a thermal reaction chamber under conditions that favor nucleation of the resulting vapor. Immediately after the initial nucleation stages, the vapor stream is rapidly and uniformly quenched at rates of at least 1,000 K/sec, preferably above 1,000,000 K/sec, to block the continued growth of the nucleated particles and produce a nanosize powder suspension of narrow particle-size distribution. The nanopowder is then harvested by filtration from the quenched vapor stream and the carrier medium is purified, compressed and recycled for mixing with new precursor material in the feed stream.
摘要翻译：一种连续的方法，其通过蒸发材料并在会聚扩散喷嘴中淬灭蒸发相来从不同类型的前体材料产生纳米级粉末。悬浮在载气中的前体材料在有利于所得蒸气成核的条件下在热反应室中连续蒸发。在初始成核阶段之后，立即以至少1000K /秒，优选高于1,000,000K /秒的速率快速且均匀地淬火蒸汽流，以阻止有核颗粒的持续生长并产生窄粒子的纳米尺寸粉末悬浮液尺寸分布。然后通过从骤冷的蒸汽流中过滤收集纳米粉末，并将载体介质纯化，压缩并再循环以与进料流中的新的前体材料混合。

133. 发明授权

US5693212A Solid multi-component membranes, electrochemical reactor components, electrochemical reactors and use of membranes, reactor components, and reactor for oxidation reactions 失效
标题翻译：固体多组分膜，电化学反应器组件，电化学反应器和膜的使用，反应器组分和用于氧化反应的反应器
公开(公告)号：US5693212A
公开(公告)日：1997-12-02
申请号：US698536
申请日：1996-08-15
申请人： Terry J. Mazanec , Thomas L. Cable , John G. Frye, Jr. , Wayne R. Kliewer
发明人： Terry J. Mazanec , Thomas L. Cable , John G. Frye, Jr. , Wayne R. Kliewer
IPC分类号： B01D53/32 , B01D71/02 , B01J4/04 , B01J8/00 , B01J12/00 , B01J19/00 , B01J19/24 , C01B3/36 , C01B3/38 , C01B13/02 , C01C3/02 , C01G45/00 , C01G49/00 , C01G51/00 , C25B3/02 , C25B5/00 , H01M8/12 , C25B1/02
CPC分类号： H01M8/1246 , B01D53/326 , B01D67/0041 , B01D67/0072 , B01D69/12 , B01D69/145 , B01D71/02 , B01D71/022 , B01D71/024 , B01J12/007 , B01J19/2475 , B01J8/009 , C01B13/0255 , C01B13/0288 , C01B3/36 , C01B3/386 , C01C3/0216 , C01C3/0225 , C01C3/0233 , C01G45/125 , C01G45/1264 , C01G49/0018 , C01G49/0036 , C01G49/0054 , C01G49/009 , C01G51/006 , C01G51/40 , C01G51/68 , C25B3/02 , C25B5/00 , H01M8/12 , H01M8/1231 , H01M8/124 , B01D2323/10 , B01D2323/12 , B01D2325/26 , B01J2208/00044 , B01J2208/00106 , B01J2208/00309 , B01J2208/00336 , B01J2208/00345 , B01J2208/00548 , B01J2208/00628 , B01J2219/00058 , B01J2219/00117 , B01J2219/00123 , B01J2219/00126 , B01J2219/00164 , B01J2219/00186 , C01B2203/0261 , C01B2203/1035 , C01B2203/1241 , C01B2203/1258 , C01B2210/0003 , C01B2210/0012 , C01B2210/0071 , C01B2210/0075 , C01P2002/34 , C01P2002/52 , C01P2002/54 , C01P2004/03 , C01P2004/80 , C01P2006/12 , C01P2006/40 , Y02E60/525 , Y02P70/56
摘要： Solid membranes comprising an intimate, gas-impervious, multi-phase mixture of an electronically-conductive material and an oxygen ion-conductive material and/or a mixed metal oxide of a perovskite structure are described. Electrochemical reactor components, such as reactor cells, and electrochemical reactors are also described for transporting oxygen from any oxygen-containing gas to any gas or mixture of gases that consume oxygen. The reactor cells generally comprise first and second zones separated by an element having a first surface capable of reducing oxygen to oxygen ions, a second surface capable of reacting oxygen ions with an oxygen-consuming gas, an electron-conductive path between the first and second surfaces and an oxygen ion-conductive path between the first and second surfaces. The element may further comprise (1) a porous substrate, (2) an electron-conductive metal, metal oxide or mixture thereof and/or (3) a catalyst. The reactor cell may further comprise a catalyst in the zone which comprises a passageway from an entrance end to an exit end of the element. Processes described which may be conducted with the disclosed reactor cells and reactors include, for example, the partial oxidation of methane to produce unsaturated compounds or synthesis gas, the partial oxidation of ethane, substitution of aromatic compounds, extraction of oxygen from oxygen-containing gases, including oxidized gases, ammoxidation of methane, etc. The extraction of oxygen from oxidized gases may be used for flue or exhaust gas cleanup.
摘要翻译：描述了包含电子导电材料和氧离子传导材料和/或钙钛矿结构的混合金属氧化物的紧密，不透气的多相混合物的固体膜。还描述了电化学反应器组分，例如反应器电池和电化学反应器，用于将氧气从任何含氧气体输送到消耗氧气的任何气体或气体混合物。反应器电池通常包括由具有能够将氧还原成氧离子的第一表面的元件隔开的第一和第二区，能够使氧离子与耗氧气体反应的第二表面，第一和第二之间的电子传导路径表面和在第一和第二表面之间的氧离子传导路径。元件还可以包括（1）多孔基底，（2）电子传导金属，金属氧化物或其混合物和/或（3）催化剂。反应器电池还可以包括在该区域中的催化剂，其包括从元件的入口端到出口端的通道。可以使用所公开的反应器电池和反应器进行的方法包括例如甲烷的部分氧化以产生不饱和化合物或合成气，乙烷的部分氧化，芳族化合物的取代，从含氧气体中提取氧包括氧化气体，甲烷的氨氧化等。氧化气体中的氧气可用于烟气或废气净化。

134. 发明授权

US5607648A Rotary kilns 失效
标题翻译：旋转窑
公开(公告)号：US5607648A
公开(公告)日：1997-03-04
申请号：US367303
申请日：1995-01-20
申请人： Robert Carter , John T. Semeraz
发明人： Robert Carter , John T. Semeraz
IPC分类号： C01G23/00 , B01J12/00 , B01J12/02 , B01J19/28 , C01G43/025 , C22B60/02 , F27B7/00 , F27D25/00 , G21C3/62 , B01J4/00
CPC分类号： F27D25/001 , B01J12/02 , B01J19/28 , C01G43/025 , C22B60/0213 , F27B7/00 , B01J2219/00159 , B01J2219/182
摘要： A rotary kiln, particularly for producing uranium dioxide from uranium hexafluoride, has an inlet arrangement and a heated rotatable barrel. Uranium hexafluoride and steam react together in the inlet arrangement to form uranyl fluoride which is fed into the barrel by the aid of a rotating scroll feed device. In the barrel, the uranyl fluoride reacts with a counterflow stream of steam and hydrogen to produce the uranium dioxide. A porous metal or ceramic filter closely surrounds the scroll feed device to remove particles from kiln-produced gases. The filter is maintained in a clean condition by the scraping action of a number of helical blades forming part of the scroll feed device. The uranium dioxide powder produced by the kiln may be processed to form nuclear fuel pellets.
摘要翻译： PCT No.PCT / GB94 / 00953 Sec。 371 1995年1月20日第 102（e）1995年1月20日PCT PCT 1994年5月4日PCT公布。出版物WO94 / 26405 日期1994年11月24日一种特别用于从六氟化铀生产二氧化铀的回转窑具有入口装置和加热的可旋转筒。六氟化铀和蒸汽在入口装置中一起反应以形成铀酰氟，其通过旋转的滚动进料装置进料到料筒中。在桶中，铀氟化物与蒸汽和氢气的逆流反应产生二氧化铀。多孔金属或陶瓷过滤器紧密地围绕涡旋进料装置以从窑产生的气体中除去颗粒。通过形成涡卷进给装置的一部分的多个螺旋叶片的刮擦作用将过滤器保持在干净的状态。由窑生产的二氧化铀粉末可以加工形成核燃料颗粒。

135. 发明授权

US5592521A Process and device for recombining and/or igniting hydrogen contained in an H.sub.2 -air-steam mixture, preferably for nuclear power stations 失效
标题翻译：用于重组和/或点燃包含在H 2空气 - 蒸汽混合物中的氢，优选用于核电站的方法和装置
公开(公告)号：US5592521A
公开(公告)日：1997-01-07
申请号：US484520
申请日：1995-06-07
申请人： Axel Hill
发明人： Axel Hill
IPC分类号： B01J12/00 , B01J19/24 , G21C9/00 , G21C9/04 , G21C9/06 , G21C19/317 , G21F9/02
CPC分类号： G21C19/317 , B01J12/007 , B01J19/243 , G21C9/06 , B01J2219/00146 , B01J2219/00159 , Y02E30/40
摘要： A first partial flow of an H.sub.2 -air-steam mixture is passed through a first channel and recombined by contact with a first channel wall having a catalytic coating. In addition to the first partial flow, a second partial flow of the mixture is passed through a second channel having a second channel wall and is ignited by being fed past preferably metallic ignition elements being heated to the H.sub.2 ignition temperature upon reaching or exceeding an ignition limit. Under these circumstances, heat liberated during the catalytic reaction in the first channel is at least partially transmitted to the second channel for the purpose of preheating it. The novel process functions both at the lower and at the upper ignition limit and recombines even at unignitable H.sub.2 concentrations. A device with which the process can be carried out is also described.
摘要翻译： H 2空气 - 蒸汽混合物的第一部分流动通过第一通道并通过与具有催化涂层的第一通道壁的接触而重新组合。除了第一部分流动之外，混合物的第二部分流动通过具有第二通道壁的第二通道，并且通过被馈送通过优选的金属点火元件而被点燃，在达到或超过点火时被加热到H 2着火温度限制。在这种情况下，在第一通道中催化反应期间释放的热量至少部分地传递到第二通道以便预热。该新方法在较低和较高的点火极限下都起作用，甚至在不可靠的H 2浓度下也会结合。还描述了可以执行该过程的装置。

136. 发明授权

US5534328A Integrated chemical processing apparatus and processes for the preparation thereof 失效
标题翻译：综合化学处理装置及其制备方法
公开(公告)号：US5534328A
公开(公告)日：1996-07-09
申请号：US161379
申请日：1993-12-02
申请人： James W. Ashmead , Charles T. Blaisdell , Melvin H. Johnson , Jack K. Nyquist , Joseph A. Perrotto , James F. Ryley, Jr.
发明人： James W. Ashmead , Charles T. Blaisdell , Melvin H. Johnson , Jack K. Nyquist , Joseph A. Perrotto , James F. Ryley, Jr.
IPC分类号： B01F5/06 , B01F13/00 , B01J12/00 , B01J14/00 , B01J19/00 , B01J19/12 , B01J35/04 , B01L3/00 , F28D9/00 , G01N30/60 , G01N30/88 , B32B3/00
CPC分类号： F28D9/00 , B01F13/0059 , B01F5/0604 , B01J12/007 , B01J14/005 , B01J19/0093 , B01J19/123 , B01J35/04 , B01L3/502707 , B01J2219/00835 , B01L2200/025 , B01L2200/0689 , B01L2300/0816 , B01L2300/0867 , B01L2300/0874 , B01L2300/0883 , B01L2300/0887 , B01L2300/14 , B01L2300/1827 , B01L2300/1838 , B01L2300/1883 , B01L2400/0487 , F28F2210/02 , F28F2210/10 , F28F2260/02 , G01N2030/8881 , G01N30/6095 , Y10S366/03 , Y10T428/24562 , Y10T428/24612 , Y10T428/24661 , Y10T428/24744
摘要： An integral structure is provided for chemical processing and manufacture, in which a plurality of laminae are joined together and having inlet and outlet ports connected by a three dimensionally tortuous channel. Chemicals are introduced through the inlet ports and processed along the channel, with desirable product withdrawn through the outlet ports. The laminae are of materials selected to be compatible with the chemical process, from the group consisting of elements of groups III, IV or V of the Periodic Table, ceramics, glasses, polymers, composites and metals. Processes of manufacture of the apparatus and processes utilizing the apparatus are also disclosed herein.
摘要翻译：提供了用于化学处理和制造的整体结构，其中多个层连接在一起并具有通过三维曲折通道连接的入口和出口。通过进口端口引入化学品并沿着通道加工，通过出口端口抽出期望的产品。该层是选自与化学过程相容的材料，由周期表第III，IV或V族元素组成的组，陶瓷，玻璃，聚合物，复合材料和金属。本文还公开了利用该装置的装置和方法的制造方法。

137. 发明授权

US5473082A Device for carrying out catalyzed reactions 失效
标题翻译：用于进行催化反应的装置
公开(公告)号：US5473082A
公开(公告)日：1995-12-05
申请号：US92504
申请日：1993-07-15
申请人： Ronald Shelden , Jean-Paul Stringaro
发明人： Ronald Shelden , Jean-Paul Stringaro
IPC分类号： B01D3/00 , B01J12/00 , B01J19/24 , B01J19/32 , B01J35/04 , C07C41/06 , C07C51/215 , C07D249/16
CPC分类号： C07C41/06 , B01D3/009 , B01J12/007 , B01J19/2425 , B01J19/32 , B01J35/04 , C07C51/215 , B01J2219/00094 , B01J2219/185 , B01J2219/1943 , B01J2219/32206 , B01J2219/3221 , B01J2219/32213 , B01J2219/32255 , B01J2219/32279 , B01J2219/32408 , B01J2219/32466 , Y02P20/127
摘要： The catalytic process for producing maleic anhydride employs a catalytic device formed of pairs of vertically extending vapor permeable walls which define flow channels between the pairs of walls. In addition, each pair of walls defines an interspace which contains a catalyst. A mixture of air and n-butane is passed through the flow channels while a heat exchange medium, such as a molten salt, is passed in heat exchange relation to the catalytic device while effecting an exothermic catalytic reaction of the mixture within the catalytic device. The resulting gaseous maleic anhydride is produced as a product.
摘要翻译：用于生产马来酸酐的催化方法采用由成对的垂直延伸的蒸气可渗透壁形成的催化装置，其限定了两对壁之间的流动通道。另外，每对壁都限定了含有催化剂的间隙。空气和正丁烷的混合物通过流动通道，同时使热交换介质（例如熔融盐）与催化装置以热交换的方式通过，同时进行催化装置内的混合物的放热催化反应。产生的气态马来酸酐作为产物生产。

138. 发明授权

US5466651A Catalytic method 失效
标题翻译：催化方法
公开(公告)号：US5466651A
公开(公告)日：1995-11-14
申请号：US245429
申请日：1994-05-18
申请人： William C. Pfefferle
发明人： William C. Pfefferle
IPC分类号： F01N3/20 , B01D53/86 , B01D53/94 , B01J12/00 , B01J19/00 , B01J21/04 , B01J21/06 , B01J23/40 , B01J23/44 , B01J23/56 , B01J23/63 , B01J35/04 , B01J37/02 , B01J37/34 , F01N3/28 , F01N13/02 , B01J23/10 , B01J23/34
CPC分类号： B01D53/9454 , B01J12/007 , B01J19/0093 , B01J35/04 , B01J37/0225 , B01J37/347 , F01N13/0097 , F01N3/2026 , F01N3/2803 , F01N3/2807 , F01N3/2825 , F01N3/2835 , B01J2219/00783 , B01J2219/00822 , B01J2219/00824 , B01J2219/00835 , B01J2219/00873 , F01N2330/06 , F01N2330/10 , F01N2330/12 , F01N2330/14 , Y02T10/22 , Y02T10/26
摘要： A catalytic article for use in catalytic chemical conversions, which comprises; a metal monolith catalyst support and a catalytically active surfacey layer bonded to the support by sputtering, said catalytically active layer comprising an admixture of a precious metal and a base metal oxide.
摘要翻译：用于催化化学转化的催化制品，其包括：金属整料催化剂载体和通过溅射结合到载体的催化活性表面层，所述催化活性层包含贵金属和贱金属氧化物的混合物。

139. 发明授权

US5453125A ECR plasma source for gas abatement 失效
标题翻译： ECR等离子体源减少气体
公开(公告)号：US5453125A
公开(公告)日：1995-09-26
申请号：US331916
申请日：1994-10-31
申请人： Ole D. Krogh
发明人： Ole D. Krogh
IPC分类号： B01J12/00 , B01J19/08 , B01J19/12 , H01J37/32 , C23C16/00
CPC分类号： B01J12/002 , B01J19/087 , B01J19/126 , H01J37/32192 , H01J37/3222 , H01J37/32238 , H01J37/32678 , B01J2219/0852 , B01J2219/0894
摘要： An apparatus is described as a source of a plasma with a variety of applications. Of particular interest is gas abatement whereby the toxic or environmentally harmful effluent from a process chamber is converted to harmless and stable products by passing through this plasma source. The plasma is produced in a gas by cooperation between a magnetic field of the proper strength and microwave energy of the proper frequency. The microwave field enters a chamber through a window of microwave transparent material to encounter a magnetic field formed by a permanent magnet placed on the opposite side of the chamber and designed such that the direction of propagation of the microwave field is parallel with the magnetic field lines in the center of the chamber. For the purpose of gas abatement the plasma source is located downstream from a processing chamber. The gas molecules in the effluent of the processing chamber are dissociated by electron impact collisions in the plasma, and suitable reaction partners for the molecular fragments are added either just before or just after passage through the plasma source. Plasma abatement is the ideal technology for treatment of industrial emissions of the very stable perfluorinated compounds used in the semiconductor industry for thin film etching and cleaning of chamber for chemical vapor deposition: CF.sub.4, C.sub.2 F.sub.6, and NF.sub.3. These compounds have been found to have extremely high global warming potential.
摘要翻译：将装置描述为具有各种应用的等离子体的源。特别令人感兴趣的是气体消除，其中来自处理室的有毒或环境有害的流出物通过通过该等离子体源被转化为无害和稳定的产物。等离子体通过适当强度的磁场和适当频率的微波能量之间的协作而在气体中产生。微波场通过微波透明材料的窗口进入腔室，以遇到由放置在腔室的相对侧上的永磁体形成的磁场，并被设计成使得微波场的传播方向与磁场线平行在房间的中心。为了消除气体，等离子体源位于处理室的下游。处理室流出物中的气体分子被等离子体中的电子碰撞碰撞解离，分子片段的合适的反应伴侣在通过等离子体源之前或之后被加入。等离子体消除是用于半导体工业中用于化学气相沉积的室的薄膜蚀刻和清洁的非常稳定的全氟化合物的工业排放的理想技术：CF4，C2F6和NF3。已发现这些化合物具有极高的全球变暖潜能。

140. 发明授权

US5451259A ECR plasma source for remote processing 失效
标题翻译： ECR等离子源进行远程处理
公开(公告)号：US5451259A
公开(公告)日：1995-09-19
申请号：US198524
申请日：1994-02-17
申请人： Ole D. Krogh
发明人： Ole D. Krogh
IPC分类号： B01J12/00 , B01J19/08 , B01J19/12 , H01J37/32 , C23C16/30 , C23C16/50 , H01L21/00 , H05H1/00
CPC分类号： H01J37/3222 , B01J12/002 , B01J19/087 , B01J19/126 , H01J37/32192 , H01J37/32238 , H01J37/32678 , B01J2219/0852 , B01J2219/0894
摘要： An apparatus is described as a source of a plasma for remote, or downstream, processing with a variety of applications. The plasma is produced in a gas by cooperation between a magnetic field of the proper strength and microwave energy of the proper frequency. The microwave field enters a chamber through a window of microwave transparent material to encounter a magnetic field formed by a permanent magnet placed on the opposite side of the chamber and designed such that the direction of propagation of the microwave field is parallel with the magnetic field lines in the center of the chamber. A gas or gas mixture is introduced to the chamber and the plasma effluent is guided by gas pressure gradients to a workpiece located downstream from the source chamber. With the proper choice of gases, pressure, and power the workpiece or substrate can be effected by deposition of a thin film, etching of the substrate surface, or otherwise modifying the surface or body of the workpiece. The areas of technology intended to benefit from this invention include, but are not limited to semiconductors, superconductors, optical thin films, plasma sterilization, as well as other industrial methods involving surface treatment and modifications.
摘要翻译：将装置描述为用于远程或下游处理的各种应用的等离子体的源。等离子体通过适当强度的磁场和适当频率的微波能量之间的协作而在气体中产生。微波场通过微波透明材料的窗口进入腔室，以遇到由放置在腔室的相对侧上的永磁体形成的磁场，并被设计成使得微波场的传播方向与磁场线平行在房间的中心。将气体或气体混合物引入室中，并且等离子体流出物由气体压力梯度引导到位于源室下游的工件。通过适当选择气体，压力和动力，可以通过沉积薄膜，蚀刻基材表面或以其它方式改变工件的表面或主体来实现工件或基底。旨在受益于本发明的技术领域包括但不限于半导体，超导体，光学薄膜，等离子体灭菌以及涉及表面处理和修改的其它工业方法。

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