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121. 发明授权

US06436821B1 Method for producing a micromechanical structure and a micromechanical structure 失效
公开(公告)号：US06436821B1
公开(公告)日：2002-08-20
申请号：US09992939
申请日：2001-11-05
申请人： Joachim Rudhard
发明人： Joachim Rudhard
IPC分类号： H01L2144
CPC分类号： B81B3/0008 , B81B3/0086 , B81B2201/0235 , B81C2201/112
摘要： A method for producing a micromechanical structure, and a micromechanical structure having a movable structure and a stationary structure made of silicon. In the method for producing the micromechanical structure, in one process step, a superficial metal-silicide layer is produced in the movable structure and/or the stationary structure.

122. 发明授权

US06307169B1 Micro-electromechanical switch 有权
标题翻译：微机电开关
公开(公告)号：US06307169B1
公开(公告)日：2001-10-23
申请号：US09495664
申请日：2000-02-01
申请人： Xi-Qing Sun , John Michael Parsey, Jr. , Jenn-Hwa Huang , Ji-Hai Xu
发明人： Xi-Qing Sun , John Michael Parsey, Jr. , Jenn-Hwa Huang , Ji-Hai Xu
IPC分类号： H01H5700
CPC分类号： B81B3/0008 , B81B2201/018 , B81B2203/0361 , H01H59/0009 , H01H2001/0089 , H01H2059/0054 , H01H2059/0072 , H01P1/12
摘要： A Micro-Electromechanical System (MEMS) switch (100) having a single, center hinge (120) which supports a membrane-type electrode (104) on a substrate (101). The single, center hinge (120) has a control electrode (104) coupled to the substrate (101) by an anchor (113), a hinge collar (121), a set of hinge arms (122, 123). The control electrode (104) has a shorting bar (106) coupled thereto and is electrically isolated from another control electrode (105), which is formed on the substrate (101). A travel stop (130) is positioned between the substrate and the control electrode (104). Another aspect of the present invention is a Single Pole, Double Throw (SPDT) switch (160) into which is incorporated the single, center hinge (170) and the travel stop (185, 186).
摘要翻译：具有在基板（101）上支撑膜型电极（104）的单个中心铰链（120）的微机电系统（MEMS）开关（100）。单个中心铰链（120）具有通过锚固件（113），铰链轴环（121），一组铰链臂（122,123）联接到基板（101）的控制电极（104）。控制电极（104）具有与其耦合的短路棒（106），并与形成在基板（101）上的另一个控制电极（105）电隔离。移动停止件（130）位于基板和控制电极（104）之间。本发明的另一方面是单杆双掷（SPDT）开关（160），其中并入有单个中心铰链（170）和行驶停止件（185,186）。

123. 发明申请

US20010028756A1 Optical switch array using rolling shutter optical switch elements 审中-公开
标题翻译：光开关阵列采用滚动快门光开关元件
公开(公告)号：US20010028756A1
公开(公告)日：2001-10-11
申请号：US09799901
申请日：2001-03-05
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： G02B006/35
CPC分类号： B81B3/0072 , B81B3/0008 , B81B2201/045 , G02B6/3518 , G02B6/3546 , G02B6/3564 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B26/02 , G02B26/0816
摘要： An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.
摘要翻译：一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。滚动快门可以采取两种状态之一。在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。此功能也用于保持镜子的平整度。开关器件可用作光开关阵列的一部分。

124. 发明授权

US06191518B1 Microactuator and method of manufacturing the same 失效
标题翻译：微致动器及其制造方法
公开(公告)号：US06191518B1
公开(公告)日：2001-02-20
申请号：US09075265
申请日：1998-05-11
申请人： Kenichiro Suzuki
发明人： Kenichiro Suzuki
IPC分类号： H02N100
CPC分类号： B81B3/0008 , B81B2201/034 , H02N1/008 , Y10T29/49002 , Y10T29/49007 , Y10T29/49009 , Y10T29/49021
摘要： A microactuator includes a stationary element, a movable element, and a first microstructure. The stationary element is fixed on a substrate and has a plurality of stationary element electrodes arranged at a predetermined pitch. The movable element has a plurality of movable element electrodes opposing to the stationary element electrodes. The movable element is moved by applying a voltage across the stationary element and the movable element. The first microstructure is formed on at least one of the opposing surfaces of the movable element and the stationary element to prevent the movable element from attaching to the stationary element.
摘要翻译：微致动器包括固定元件，可移动元件和第一微结构。固定元件固定在基板上，并且具有以预定间距排列的多个固定元件电极。可移动元件具有与固定元件电极相对的多个可移动元件电极。通过施加跨过固定元件和可移动元件的电压来移动可移动元件。第一微结构形成在可移动元件和固定元件的至少一个相对表面上，以防止可移动元件附接到固定元件。

125. 发明公开

US20240262678A1 MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DEVICE 审中-公开
公开(公告)号：US20240262678A1
公开(公告)日：2024-08-08
申请号：US18021582
申请日：2022-05-27
申请人： Beijing BOE Technology Development Co., Ltd. , BOE TECHNOLOGY GROUP CO., LTD.
发明人： Jingwen GUO , Jianxing LIU , Jianyun ZHAO , Biqi LI
IPC分类号： B81B3/00 , B81C1/00
CPC分类号： B81B3/0008 , B81C1/00984 , B81B2201/01 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/0323 , B81B2203/04 , B81B2207/99 , B81C2201/0109 , B81C2201/0132
摘要： The present disclosure provides an MEMS device, a method for manufacturing an MEMS device and an electronic device, and belongs to the field of Micro-Electro-Mechanical System technology. The MEMS device includes: a first dielectric substrate and a first component on the first dielectric substrate; the first component and the first dielectric substrate enclose a movable space; the first component has a first portion corresponding to the movable space; the first portion has at least one first opening, and at least one protruding structure is on a side of the first portion close to the first dielectric substrate; orthographic projections of the at least one protruding structure and the at least one first opening on the first dielectric substrate do not overlap with each other, and a thickness of each protruding structure is smaller than a height of the movable space.

126. 发明申请

US20180203033A1 PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOVING OBJECT 审中-公开
公开(公告)号：US20180203033A1
公开(公告)日：2018-07-19
申请号：US15919527
申请日：2018-03-13
申请人： Seiko Epson Corporation
发明人： Satoru TANAKA
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , B81B3/0008 , B81B2203/04 , G01P2015/0831
摘要： A physical quantity sensor according to the embodiment includes: a substrate; a movable body including a movable electrode portion; and a support which supports the movable body around a first shaft to be displaced, in which, when the movable body is divided into a first portion and a second portion with the first shaft as a boundary, the physical quantity sensor includes a first fixed electrode portion which is disposed on the substrate to oppose the first portion, and a second fixed electrode portion which is disposed on the substrate to oppose the second portion, and a guard portion which suppresses an electrostatic force generated between the movable body and the substrate is provided in an inter-electrode area between the first fixed electrode portion and the second fixed electrode portion, on the substrate.

127. 发明授权

US09966194B2 MEMS electrostatic actuator device for RF varactor applications 有权
公开(公告)号：US09966194B2
公开(公告)日：2018-05-08
申请号：US15385431
申请日：2016-12-20
申请人： Texas Instruments Incorporated
发明人： Arun Gupta , William C. McDonald , Adam Fruehling , Ivan Kmecko , Lance Barron , Divyanshu Agrawal , Arthur M. Turner , John C. Ehmke
IPC分类号： H01L27/20 , H01L29/84 , H01G5/16 , H01G5/40 , H01G5/011 , B81B7/00
CPC分类号： H01G5/16 , B81B3/0008 , B81B3/001 , B81B3/0013 , B81B7/0064 , B81B7/008 , B81B7/02 , B81B2201/016 , B81B2201/0221 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/0181 , B81B2203/053 , B81B2203/058 , B81B2203/06 , B81B2207/012 , B81B2207/096 , B81C1/00158 , H01G5/011 , H01G5/40
摘要： A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.

128. 发明授权

US09952251B2 Physical quantity sensor, electronic device, and moving object 有权
公开(公告)号：US09952251B2
公开(公告)日：2018-04-24
申请号：US14451816
申请日：2014-08-05
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08
CPC分类号： G01P15/125 , B81B3/0008 , B81B2203/04 , G01P2015/0831
摘要： A physical quantity sensor according to the embodiment includes: a substrate; a movable body including a movable electrode portion; and a support which supports the movable body around a first shaft to be displaced, in which, when the movable body is divided into a first portion and a second portion with the first shaft as a boundary, the physical quantity sensor includes a first fixed electrode portion which is disposed on the substrate to oppose the first portion, and a second fixed electrode portion which is disposed on the substrate to oppose the second portion, and a guard portion which suppresses an electrostatic force generated between the movable body and the substrate is provided in an inter-electrode area between the first fixed electrode portion and the second fixed electrode portion, on the substrate.

129. 发明授权

US09926192B2 Methods for stiction reduction in MEMS sensors 有权
公开(公告)号：US09926192B2
公开(公告)日：2018-03-27
申请号：US14827214
申请日：2015-08-14
申请人： Invensense, Inc.
发明人： Cerina Zhang , Nim Tea
IPC分类号： H01L21/44 , B81C1/00 , H01L21/768 , H01L23/48 , B81B3/00
CPC分类号： B81C1/00984 , B81B3/0008 , B81B2207/015 , B81C1/00976 , B81C2201/115 , H01L21/76838 , H01L23/48 , H01L2924/0002 , H01L2924/00
摘要： A method of the invention includes reducing stiction of a MEMS device by providing a conductive path for electric charge collected on a bump stop formed on a substrate. The bump stop is formed by depositing and patterning a dielectric material on the substrate, and the conductive path is provided by a conductive layer deposited on the bump stop. The conductive layer can also be roughened to reduce stiction.

130. 发明申请

US20170341927A1 Micromechanical Sensor and Method for Producing a Micromechanical Sensor 审中-公开
公开(公告)号：US20170341927A1
公开(公告)日：2017-11-30
申请号：US15582333
申请日：2017-04-28
申请人： Robert Bosch GmbH
发明人： Benny Pekka Herzogenrath , Johannes Classen
IPC分类号： B81B3/00 , G01C19/5712 , B81C1/00 , G01P15/125
CPC分类号： B81B3/0008 , B81B2201/0235 , B81B2201/0242 , B81B2201/025 , B81B2203/0181 , B81B2203/0338 , B81C1/00174 , B81C1/00476 , B81C2201/0132 , G01C19/56 , G01C19/5656 , G01C19/5712 , G01P1/003 , G01P15/0802 , G01P15/125 , G01P2015/0814 , G01P2015/0831 , G01P2015/0834 , G01P2015/0837
摘要： A micromechanical sensor that is produced surface-micromechanically includes at least one mass element formed in a third functional layer that is non-perforated at least in certain portions. The sensor has a gap underneath the mass element that is formed by removal of a second functional layer and at least one oxide layer. The removal of the at least one oxide layer takes place by introducing a gaseous etching medium into a defined number of etching channels arranged substantially parallel to one another. The etching channels are configured to be connected to a vertical access channel in the third functional layer.

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