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    • 121. 发明授权
    • Method of polishing semiconductor wafers and apparatus therefor
    • 研磨半导体晶片的方法及其设备
    • US5584746A
    • 1996-12-17
    • US283152
    • 1994-08-03
    • Kouichi TanakaHiromasa HashimotoFumio Suzuki
    • Kouichi TanakaHiromasa HashimotoFumio Suzuki
    • B24B37/30B24B1/00B24B29/00
    • B24B37/30
    • A method of polishing semiconductor wafers and apparatus therefore are described. According to the present invention, a semiconductor wafer mounted on the lower side of a wafer mounting plate may be polished on a polishing pad by the front referenced polishing technique due to a flexibility of the wafer mounting plate to make the same to conform in detail with the backside contour of the wafer under polishing pressure and a selected flexibility differential between a wafer holding region and the outer moving region of the wafer mounting plate. An apparatus includes the wafer mounting plate that also works as a vacuum chuck plate is constructed out of a flexible thin disc of hard plastics, a central round region is used for a wafer holding region facing the backside of the wafer and the outside annular region is more flexible to work as a moving region, a pan-shaped rubber sheet is secured to a ring projection, the wafer mounting disc is adhered to the inner periphery of the rubber sheet at and along the periphery thereof to generate a sealed space, passes for vacuum communication and for a compressed air supply are formed through a rotary shaft, and vacuum chuck holes are communicated with the vacuum pass and the compressed air pass is in communication with a sealed space in the wafer holder.
    • 因此,对半导体晶片及其装置进行研磨的方法进行了说明。 根据本发明,安装在晶片安装板的下侧的半导体晶片可以通过前置抛光技术在抛光垫上抛光,这是由于晶片安装板的灵活性使其与 抛光压力下的晶片的背面轮廓和晶片保持区域与晶片安装板的外部移动区域之间的选定的柔性差异。 一种装置,包括晶片安装板,其作为真空吸盘板,由硬塑料的柔性薄盘构成,中心圆形区域用于面向晶片背面的晶片保持区域,外部环形区域为 更灵活地作为移动区域工作,将盘形橡胶片固定到环形突起,晶片安装盘在其周围并沿其周边粘附到橡胶片的内周,以产生密封空间,通过 通过旋转轴形成真空连通和压缩空气供给,并且真空吸盘孔与真空通道连通,压缩空气通道与晶片保持器中的密封空间连通。
    • 122. 发明授权
    • Polishing member and wafer polishing apparatus
    • 抛光件和晶圆抛光装置
    • US5564965A
    • 1996-10-15
    • US355212
    • 1994-12-09
    • Kouichi TanakaHiromasa HashimotoFumio Suzuki
    • Kouichi TanakaHiromasa HashimotoFumio Suzuki
    • B24B37/22B24D13/14B24B5/00
    • B24B37/22
    • A polishing apparatus is provided which can effect surface-based polishing of a wafer without causing the wafer to produce an undulation or peripheral protrusion. A sheetlike polishing member 5 constructed by superposing a foam sheet 2 containing minute closed cells in a web of chloroprene rubber and a velour type non-woven fabric (polishing cloth 3) is attached fast to the surface of a polishing table 1. The polishing member is capable of polishing a given wafer while maintaining the uniformity of thickness of the wafer or an oxide film formed on the surface of the wafer because, during the application of pressure by a pressing member 14, the polishing pressure is uniformly distributed throughout the entire rear surface of the wafer and the polishing member is bent in conformity with the global rises and falls in the wafer surface.
    • 提供一种抛光装置,其可以实现晶片的基于表面的抛光,而不会导致晶片产生起伏或周边突起。 通过将包含微小闭孔的发泡片2叠加在氯丁橡胶和丝绒型无纺布(抛光布3)的网中而构成的片状抛光构件5快速地附着在抛光台1的表面上。抛光构件 能够在保持晶片的厚度均匀性或形成在晶片表面上的氧化物膜的同时抛光给定晶片,因为在通过按压部件14施加压力期间,抛光压力均匀地分布在整个后部 晶片的表面和抛光构件与晶片表面的全局上升和下降一致地弯曲。
    • 123. 发明授权
    • Signal processing method and signal processing device
    • 信号处理方法及信号处理装置
    • US5550597A
    • 1996-08-27
    • US494731
    • 1995-06-26
    • Ryukichi WadaFumio SuzukiYoshisuke Ohtsuru
    • Ryukichi WadaFumio SuzukiYoshisuke Ohtsuru
    • H04N9/64H04N11/04
    • H04N9/646H04N11/04
    • When an input component image signal is inputted in a signal processing step, a high-frequency signal emphasis processing like HPF is performed with respect to a luminance signal and a processing like LPF with replenishment of the low-midrange frequency signal is performed in an LPF step and a color signal step with respect to color difference signals. Then, the luminance signal and color difference signals are outputted by prescribed clock pulses. The clock pulse of the color difference signals may be set lower than the clock pulse of the luminance signal according to the condition of the image. Processed as above, a new component image signal (a luminance signal Y and any combination of color difference signals U and V, V and W, W and U) is generated from a conventional component image signal (Y and U, V, W) without loss in image information or image quality. Furthermore, the amount of data of the signal to be generated per unit of time is reduced as compared with the conventional component coding system of 4:1:1 or 4:2:0 (MPEG). Thus, a signal processing method and device which enables signal transmission with lower transmission rate can be achieved.
    • 当在信号处理步骤中输入输入分量图像信号时,相对于亮度信号执行像HPF这样的高频信号强调处理,并且在LPF中进行处理,在LPF中执行补充低中频信号 步进和色差信号步进。 然后,通过规定的时钟脉冲输出亮度信号和色差信号。 可以根据图像的条件将色差信号的时钟脉冲设置为低于亮度信号的时钟脉冲。 如上所述,从传统的分量图像信号(Y和U,V,W)产生新的分量图像信号(亮度信号Y和色差信号U和V,V和W,W和U的任何组合) 不损失图像信息或图像质量。 此外,与传统的4:1:1或4:2:0(MPEG)组件编码系统相比,每单位时间产生的信号的数据量会减少。 因此,可以实现能够实现具有较低传输速率的信号传输的信号处理方法和装置。
    • 124. 发明授权
    • Imidazonaphthyridine derivatives
    • 咪唑并萘啶衍生物
    • US5536730A
    • 1996-07-16
    • US526323
    • 1995-09-11
    • Fumio SuzukiTakeshi KurodaShigeto KitamuraKenji Ohmori
    • Fumio SuzukiTakeshi KurodaShigeto KitamuraKenji Ohmori
    • A61K31/435A61K31/4375A61P11/08A61P29/00A61P37/08C07D471/14A61K31/41
    • C07D471/14
    • Disclosed are imidazonaphthyridine derivatives represented by formula (I) ##STR1## wherein: R.sup.1 represents lower alkyl or substituted or unsubstituted aryl; andX-Y-Z represents ##STR2## wherein R.sup.2 represents hydrogen, lower alkyl, alkenyl, aralkenyl, or --C(R.sup.5)H--(CH.sub.2).sub.n --R.sup.4 (wherein R.sup.4 represents substituted or unsubstituted aryl, substituted or unsubstituted pyridyl, substituted or unsubstituted furyl, hydroxy-substituted lower alkyl, lower alkanoyloxy, morpholino, lower alkanoyl, carboxy, lower alkoxycarbonyl, cycloalkyl, hydroxy, lower alkoxy, halogen or NR.sup.6 R.sup.7 wherein R.sup.6 and R.sup.7 independently represents hydrogen, or lower alkyl; R.sup.5 represents hydrogen, lower alkyl, or phenyl; and n represents an integer of 0 to 3); and R.sup.3 represents hydrogen, mercapto, hydroxy, lower alkyl, or aryl and pharmaceutically acceptable salts thereof.The compounds show a potent anti-inflammatory, anti-allergic and broncho-dilative activity.
    • 公开了由式(I)表示的咪唑并吡啶衍生物其中:R1表示低级烷基或取代或未取代的芳基; 并且XYZ表示其中R2表示氢,低级烷基,烯基,芳烯基或-C(R5)H-(CH2)n-R4(其中R4表示取代或未取代的芳基,取代或未取代的吡啶基,取代或未取代的呋喃基 ,羟基取代的低级烷基,低级烷酰氧基,吗啉代,低级烷酰基,羧基,低级烷氧基羰基,环烷基,羟基,低级烷氧基,卤素或NR6R7,其中R6和R7独立代表氢或低级烷基; R5代表氢,低级烷基或 苯基; n表示0〜3的整数); 并且R 3表示氢,巯基,羟基,低级烷基或芳基及其药学上可接受的盐。 这些化合物显示有效的抗炎,抗过敏和支气管扩张活性。
    • 126. 发明授权
    • High-aperture-ratio inner-focus telephoto lens
    • 高孔径比内置长焦镜头
    • US5490014A
    • 1996-02-06
    • US167210
    • 1993-12-16
    • Fumio Suzuki
    • Fumio Suzuki
    • G02B13/02G02B15/173
    • G02B15/173
    • A high-aperture-ratio inner-focus telephoto lens comprises a first lens group of positive refracting power, a second lens group of negative refracting power and a third lens group of positive refracting power arranged in the named order from the object side, in which the first lens group and the second lens group form a substantially afocal system, focusing is effected by moving the second lens group along the optical axis, and the first lens group has a front group of positive refracting power and a rear group of weak positive refracting power arranged in the named order from the object side.
    • 高开口率内焦距长焦透镜包括正折射率的第一透镜组,负折射率的第二透镜组和从物体侧按顺序排列的正折射率的第三透镜组,其中 第一透镜组和第二透镜组形成基本上无焦点的系统,通过沿着光轴移动第二透镜组来实现聚焦,并且第一透镜组具有正折射率的正面组和弱正折射的后组 功率以物体方式按命名顺序排列。