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    • 122. 发明授权
    • Method for making magnetic write head
    • 磁头写入方法
    • US07380330B2
    • 2008-06-03
    • US11186174
    • 2005-07-21
    • Daniel Wayne BedellAron PentekKatalin PentekYi Zheng
    • Daniel Wayne BedellAron PentekKatalin PentekYi Zheng
    • G11B5/127
    • G11B5/3163Y10T29/49032Y10T29/49041Y10T29/49043Y10T29/49046Y10T29/49052
    • After defining the P2 pole of a magnetic read head, alumina is deposited over it and planarized by CMP, with the portion of the alumina overlaying the ABS region of the P2 pole subsequently being masked by a photoresist layer and with the portions of the alumina overlaying the flare area, back gap region, and center tap regions of the P2 pole not being masked. A reactive ion mill is performed to expose the flare area, back gap region, and center tap regions of the P2 pole by removing the alumina over these portions, so that subsequent steps such as forming a layer of coiled conductors, forming a return pole, and forming stud connections along with removing the respective seed layers can be executed with the ABS region protected by the alumina and with the flare area, back gap region, and center tap region exposed.
    • 在定义磁读头的P2极之后,将氧化铝沉积在其上并通过CMP平坦化,其中覆盖P2极的ABS区域的氧化铝的部分随后被光致抗蚀剂层掩蔽,并且氧化铝的部分覆盖 P2极的光斑区域,背隙区域和中心抽头区域不被掩蔽。 通过在这些部分上除去氧化铝,进行反应离子磨,以暴露P2极的火炬区域,后隙区域和中心抽头区域,从而形成后续步骤,例如形成线圈导体层,形成返回极, 并且可以利用由氧化铝保护的ABS区域和暴露的火炬区域,后隙区域和中心抽头区域来执行形成螺柱连接以及移除相应的种子层。
    • 126. 发明申请
    • PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH NOTCHED TRAILING SHIELD AND METHOD FOR MAKING
    • 具有记录轨迹的平面磁记录头和制造方法
    • US20070247746A1
    • 2007-10-25
    • US11735894
    • 2007-04-16
    • John I. KimAron Pentek
    • John I. KimAron Pentek
    • G11B5/187
    • G11B5/1278G11B5/11G11B5/3116G11B5/3146G11B5/3163Y10T29/49039Y10T29/49043Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • A perpendicular magnetic recording write head has a write pole, a trapezoidal-shaped trailing shield notch, and a gap between the write pole and notch, with the gap being formed of a nonmagnetic mask film, such as alumina, a nonmagnetic metal protective film and a nonmagnetic gap layer. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap. A reactive ion beam etching (RIBE) process removes the filler material at the side edges of the write pole and thus widens the opening at the side edges. The nonmagnetic metal film protects the underlying mask film and write pole during the widening of the opening. The gap layer and trailing shield notch are deposited into a widened opening above the write pole, so the sides of the notch diverge to cause the generally trapezoidal shape.
    • 垂直磁记录写头具有写极,梯形后屏蔽切口和写极与凹口之间的间隙,间隙由非磁性掩模膜形成,例如氧化铝,非磁性金属保护膜和 非磁隙层。 写极具有后缘,其具有基本上限定轨道宽度的宽度,并且面向凹口的前边缘,但是与间隙隔开。 写极具有非磁性填充材料,例如氧化铝,除了在其后缘处与间隙接触的位置之外围绕它。 反应离子束蚀刻(RIBE)工艺去除了写极的侧边缘处的填充材料,从而加宽了侧边缘处的开口。 非磁性金属膜在开口扩大期间保护下面的掩模膜和写极。 间隙层和后屏蔽切口沉积在写极上方的加宽开口中,因此凹口的侧面发散以引起大致梯形的形状。