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    • 118. 发明申请
    • SURFACE EMITTING LASER ARRAY
    • 表面发射激光阵列
    • US20100220763A1
    • 2010-09-02
    • US12599991
    • 2009-02-24
    • Mitsuhiro Ikuta
    • Mitsuhiro Ikuta
    • H01S5/18
    • H01S5/42B82Y20/00H01S5/041H01S5/105H01S5/2027H01S5/2063H01S5/2081H01S5/34326H01S5/34333H01S2301/176
    • Provided is a surface emitting laser array using a photonic crystal, which allows an active layer to be shared without disconnecting the active layer between the individual surface emitting lasers adjacent to each other, and enables high-density arraying easily. The surface emitting laser array includes: at least two surface emitting lasers formed on a substrate, each having a laminated structure of multiple semiconductor layers including a semiconductor multilayer mirror, an active layer, and a photonic crystal having a refractive index profile in an in-plane direction, the photonic crystal and the semiconductor multilayer mirror in the laminated structure forming a waveguide for guiding light in a resonance mode; and a region without the photonic crystal provided between adjacent surface emitting lasers in the surface emitting laser array, in which the surface emitting lasers have the same semiconductor multilayer mirror and the same active layer.
    • 提供了使用光子晶体的表面发射激光器阵列,其允许共享活性层而不断开彼此相邻的各个表面发射激光器之间的有源层,并且能够容易地进行高密度排列。 表面发射激光器阵列包括:形成在衬底上的至少两个表面发射激光器,每个具有包括半导体多层反射镜,有源层和具有折射率分布的光子晶体的多个半导体层的层叠结构, 平面方向,层叠结构中的光子晶体和半导体多层反射镜,形成用于引导谐振模式的光的波导; 以及在表面发射激光器阵列中的相邻表面发射激光器之间提供没有光子晶体的区域,其中表面发射激光器具有相同的半导体多层反射镜和相同的有源层。