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111. 发明授权

US3995195A Eccentric termination fixture for an electrodeless light 失效
标题翻译：用于无电极灯的偏心终端夹具
公开(公告)号：US3995195A
公开(公告)日：1976-11-30
申请号：US632416
申请日：1975-11-17
申请人： Paul O. Haugsjaa , William McNeill , Robert J. Regan
发明人： Paul O. Haugsjaa , William McNeill , Robert J. Regan
IPC分类号： H01J65/04 , H01J61/56
CPC分类号： H01J65/044 , H01J65/046
摘要： In a light source in which an electrodeless lamp is excited by high frequency power coupled into a lamp termination fixture having an inner and outer conductor, the fixture has a dynamically variable characteristic impedance, thereby facilitating dynamic matching of the variable impedance of the lamp during the lamp-off to lamp-run conditions to the output impedance of the power source. This feature is possible because the position of the inner conductor with respect to the outer conductor is controlled as a function of the heat generated within the fixture. The inner conductor is made of a conductive material having a non-uniform coefficient of thermal expansion. When the fixture is cold, the lamp and the lamp-coupled end of the inner conductor are substantially concentric to the outer conductor thereby creating a high characteristic impedance to match the high starting lamp impedance to the source impedance. When the lamp is running, the inner conductor and lamp become eccentric to the outer conductor due to the heat generated in the fixture, thereby reducing the fixture characteristic impedance to match the lower lamp impedance to the output impedance of the source.
摘要翻译：在其中无电极灯被耦合到具有内导体和外导体的灯端接固定器的高频功率激发的光源中，该固定装置具有动态可变的特性阻抗，从而有助于灯的可变阻抗的动态匹配灯灭灯灯运行条件到电源的输出阻抗。该特征是可能的，因为内部导体相对于外部导体的位置被控制为在夹具内产生的热的函数。内导体由具有不均匀热膨胀系数的导电材料制成。当灯具冷却时，内部导体的灯和灯联接端基本上与外部导体同心，从而产生高的特性阻抗，以使高起动灯阻抗与源阻抗相匹配。当灯运行时，由于灯具中产生的热量，内部导体和灯变得偏心于外部导体，从而降低灯具特性阻抗，使灯泡的阻抗与源的输出阻抗相匹配。

112. 发明授权

US3879597A Plasma etching device and process 失效
标题翻译：等离子体蚀刻装置及工艺
公开(公告)号：US3879597A
公开(公告)日：1975-04-22
申请号：US49810074
申请日：1974-08-16
申请人： INT PLASMA CORP
发明人： BERSIN RICHARD L , SINGLETON MICHAEL J
IPC分类号： H01L21/302 , H01J37/32 , H01J65/04 , H01L21/3065 , H05H1/46 , B23K9/00
CPC分类号： H01J37/32009 , H01J65/044 , H05H1/46 , Y10S422/906
摘要： There is disclosed a device for plasma etching which includes a quartz cylinder surrounded by a coil of electrodes connected to a source of radio frequency energy, and having within it a concentric cylinder or perforated aluminum or other electrically conductive metal.
摘要翻译：公开了一种用于等离子体蚀刻的装置，其包括被连接到射频能量源的电极线圈围绕的石英圆柱体，并且在其内部具有同心圆筒或穿孔铝或其它导电金属。

113. 发明授权

US3814983A Apparatus and method for plasma generation and material treatment with electromagnetic radiation 失效
标题翻译：电磁辐射等离子体生成和材料处理的装置和方法
公开(公告)号：US3814983A
公开(公告)日：1974-06-04
申请号：US22403872
申请日：1972-02-07
申请人： WEISSFLOCH C , BOSISIO R , WERTHEIMER M
发明人： WEISSFLOCH C , WERTHEIMER M , BOSISIO R
IPC分类号： G21K5/10 , H01J37/32 , H01J65/04 , H05H1/24 , H05H1/46 , H01J7/46 , H01J19/80
CPC分类号： H01J37/32192 , G21K5/10 , H01J37/32211 , H01J65/044 , H05H1/46 , H05H2001/4622
摘要： Apparatus for generating plasmas using electromagnetic energy in the microwave frequency range, having a source of microwave energy, a slow wave structure, conveying means for conveying microwave energy from the source to the slow wave structure, a plasma container and means for maintaining conditions of pressure and gas flow in the container. There is also provided a novel transparent radiation shield for use with such an apparatus. In another embodiment, there is also provided a slow wave structure and microwave energization means so that a region adjacent the structure will contain a predominance of degenerate pi /2 mode or near degenerate pi /2 mode electric field energy. Methods are also disclosed for treating various types of material to alter their properties using the above-described apparatus.
摘要翻译：用于使用微波频率范围内的电磁能量产生等离子体的装置，具有微波能量源，慢波结构，用于将微波能量从源传送到慢波结构的输送装置，等离子体容器和用于保持压力条件的装置并且气体在容器中流动。还提供了一种用于这种装置的新颖的透明辐射屏蔽。在另一个实施例中，还提供了一种慢波结构和微波激励装置，使得邻近该结构的区域将包含退化的π/ 2模式或接近退化的π/ 2模式电场能量的优势。还公开了使用上述装置处理各种类型的材料以改变其性质的方法。

114. 发明授权

US3648100A Electrodeless pulsed illuminator 失效
标题翻译：无电极脉冲发光器
公开(公告)号：US3648100A
公开(公告)日：1972-03-07
申请号：US3648100D
申请日：1969-03-24
申请人： WESTINGHOUSE ELECTRIC CORP
发明人： GOLDIE HARRY , GOLDMAN MICHAEL A , KLEIN GERALD I
IPC分类号： H01J65/04 , H01J7/46 , H01J19/80
CPC分类号： H01J65/044
摘要： A gaseous pulsed illuminator utilizing a halogen gas. No electrodes are required to strike the discharge and accordingly highly reactive gases having short luminous decay times may be employed. The excitation power is a radiofrequency source coupled through a waveguide or other RF transmission line.
摘要翻译：利用卤素气体的气体脉冲照明器。不需要电极来进行放电，因此可以采用具有短的发光衰减时间的高反应性气体。激励功率是通过波导或其它RF传输线耦合的射频源。

115. 发明授权

US3641389A High-power microwave excited plasma discharge lamp 失效
标题翻译：高功率微波激发等离子放电灯
公开(公告)号：US3641389A
公开(公告)日：1972-02-08
申请号：US3641389D
申请日：1969-11-05
申请人： VARIAN ASSOCIATES
发明人： LEIDIGH WILLIAM J
IPC分类号： H01J65/04 , H01J7/46 , H01J19/80
CPC分类号： H01J65/044
摘要： A high-power microwave plasma discharge lamp is disclosed. The lamp includes a ceramic tube filled with gas and closed at one end by a window transparent to the optical radiation output of the lamp. The ceramic tube extends through a cavity resonator excited with microwave energy for exciting a plasma discharge within the lamp.
摘要翻译：公开了一种高功率微波等离子体放电灯。该灯包括填充有气体的陶瓷管，并且在一端由对于光的光辐射输出透明的窗口封闭。陶瓷管延伸通过用微波能量激发的腔谐振器，以激发灯内的等离子体放电。

116. 发明授权

US3493805A Ultraviolet resonance lamp 失效
标题翻译： ULTRAVIOLET共振灯
公开(公告)号：US3493805A
公开(公告)日：1970-02-03
申请号：US3493805D
申请日：1967-11-01
申请人： NASA
发明人： BASS ARNOLD M
IPC分类号： H01J65/04 , H01J5/16 , H01J61/40
CPC分类号： H01J65/044

117. 发明公开

US20230360902A1 PHOTOREACTOR AND SOURCE FOR GENERATING UV AND VUV 审中-公开
公开(公告)号：US20230360902A1
公开(公告)日：2023-11-09
申请号：US18028996
申请日：2021-10-20
申请人： United Kingdom Research and Innovation
发明人： Alex Robinson , Matthew Gear
IPC分类号： H01J65/04 , H01J61/10 , H01J61/06 , H01J61/02 , H01J61/16 , B01D53/00 , B01D53/50 , B01D53/56 , B01D53/60 , B01D53/44 , C02F1/32
CPC分类号： H01J65/044 , H01J61/10 , H01J61/06 , H01J61/025 , H01J61/16 , B01D53/007 , B01D53/50 , B01D53/56 , B01D53/60 , B01D53/44 , C02F1/325 , B01D2258/02 , B01D2259/804 , B01D2259/806 , B01D2257/302 , B01D2257/404 , B01D2257/708 , C02F2201/3221 , C02F2201/326 , C02F2101/30
摘要： There is provided a photoreactor for the remediation of gaseous emissions and/or contaminated water using ultraviolet (UV) or vacuum ultraviolet (VUV). There is also provided an emission source for generating UV and/or VUV, the source comprising: a microwave generator; a chamber arranged to receive microwaves generated by the microwave generator, the chamber comprising: a gas comprising species for forming excimers; a resonator arranged to receive the microwaves in the chamber and generate a plasma; a first electrode spaced apart from the resonator; and a voltage source configured to generate an electric field between the resonator and the first electrode, wherein, on application of the electric field, the electric field drives electrons and/or ions from the plasma to generate excimers and produce vacuum ultraviolet or ultraviolet emission. There are also provided methods of generating UV and/or VUV, and methods of remediating fluids.

118. 发明公开

US20230162968A1 PLASMA LIGHT ENGINE 审中-公开
公开(公告)号：US20230162968A1
公开(公告)日：2023-05-25
申请号：US17968444
申请日：2022-10-18
申请人： Roland Gesche , Sundarajan Mutialu , Joachim Scherer
发明人： Roland Gesche , Sundarajan Mutialu , Joachim Scherer
IPC分类号： H01J65/04 , H01J61/32
CPC分类号： H01J65/044 , H01J61/322 , H01J2893/0063
摘要： A plasma light with at least one non-rotating light bulb is disclosed. The light includes a conducting cavity structure with a radiation source input port and a light bulb. The geometry of the cavity is designed to generate electrical fields with time-dependent geometrical designed orientation within parts of the light bulb, while the direction of the radiation fields from the radiation source port caused by a microwave generator to the input port fields is stationary.

119. 发明授权

US10879059B2 Extended microwave powered lamp 有权
公开(公告)号：US10879059B2
公开(公告)日：2020-12-29
申请号：US14776121
申请日：2014-03-14
申请人： Consiglio Nazionale delle Ricerche
发明人： Carlo Ferrari , Iginio Longo
IPC分类号： H01J65/04 , H01J61/94
CPC分类号： H01J65/044 , H01J61/94
摘要： An elongated microwave powered lamp (1) having one or more bulbs with any length or shape or disposition according to a linear series, straight or curved, includes: at least one transparent elongated bulb (2) containing, in an inner space thereof, a material apt to be excited by microwave irradiation thereby emitting an electromagnetic radiation; a coaxial microwave antenna placed outside the bulb (2) and respectively connected to a microwave source (81) via corresponding antenna lead (91), said bulb (2) and said at least one microwave coaxial antenna being displaced in a close relationship to each other to allow the microwave excitation of said material, wherein the outer tubular conductor of the coaxial antenna (5) has spaced holes (6) formed therethrough and facing the bulb (2), at which microwaves are released toward the bulb.

120. 发明授权

US09502149B2 Ultraviolet systems and methods for irradiating a substrate 有权
标题翻译：紫外线系统和照射基材的方法
公开(公告)号：US09502149B2
公开(公告)日：2016-11-22
申请号：US14456062
申请日：2014-08-11
申请人： Nordson Corporation
发明人： James M. Borsuk , Gregory W. Harrell , James M. Khoury , Edward C. McGhee , James C. Smith , Hallie Smith-Petee
IPC分类号： G21K5/00 , G21K5/04 , G21K1/00 , H01J65/04 , H05B41/24
CPC分类号： G21K5/04 , G21K1/00 , H01J65/044 , H05B41/24 , H05B41/2806 , Y02B20/22
摘要： A UV system for irradiating a substrate includes a lamphead having an enclosure with an interior. A UV bulb is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system also includes a solid state RF source capable of generating the RF energy. The RF energy is transmitted to the UV bulb, which causes the UV bulb to ignite and emit the UV energy from the interior of the lamphead.
摘要翻译：用于照射衬底的UV系统包括具有带有内部的外壳的灯头。 UV灯泡位于内部，并能够通过RF能量激发时发出紫外线能量。 UV系统还包括能够产生RF能量的固态RF源。 RF能量被传输到UV灯泡，这导致UV灯泡点燃并从灯头的内部发射UV能量。

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