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    • 111. 发明授权
    • Semiconductor memory array having sublithographic spacing between
adjacement trenches and method for making the same
    • 具有辅助沟槽之间的亚光刻间隔的半导体存储器阵列及其制造方法
    • US6034877A
    • 2000-03-07
    • US93902
    • 1998-06-08
    • Gary Bela BronnerJack Allan MandelmanDonald James Samuels
    • Gary Bela BronnerJack Allan MandelmanDonald James Samuels
    • H01L21/8242G11C11/24
    • H01L27/1087
    • Disclosed herein is an arrangement of memory cells in which the spacing between back-to-back trench capacitors is defined at less than 1 F spacing. A pure phase edge mask is used to define such trench patterns having less than 1 F spacing. The reduction in the trench-to-trench spacing results in increased separation between the trench and the near edge of the gate conductor. This increase in the trench to gate conductor spacing, in turn, permits the channel doping concentration to be decreased, with a corresponding increase in ON current to be realized. In alternative embodiments, a pure phase edge mask or a blocked phase edge mask can be used to define trench patterns in which the width of trenches is increased to form storage capacitors having higher capacitance. In such embodiments, the spacing between back-to-back trenches can be reduced, such that the total separation between the outer edges of adjacent trenches is maintained at about 3 F or less.
    • 本文公开了一种存储单元的布置,其中背对背沟槽电容器之间的间隔被限定在小于1F的间隔。 使用纯相边缘掩模来限定具有小于1F间距的这种沟槽图案。 沟槽间距的减小导致沟槽和栅极导体的近边缘之间的间隔增加。 沟槽与栅极导体间隔的增加又使得沟道掺杂浓度降低,同时实现ON电流的相应增加。 在替代实施例中,可以使用纯相边缘掩模或阻挡相边缘掩模来限定其中沟槽宽度增加以形成具有较高电容的存储电容器的沟槽图案。 在这样的实施例中,可以减小背对背沟槽之间的间隔,使得相邻沟槽的外边缘之间的总间隔保持在约3°F或更小。