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    • 111. 发明授权
    • Method of and apparatus for detecting an end point of plasma treatment
    • 用于检测等离子体处理终点的方法和装置
    • US4615761A
    • 1986-10-07
    • US712032
    • 1985-03-15
    • Keiji TadaTakashi FujiiGen MarumotoKazuhiro JyouoTakahiro Fujisawa
    • Keiji TadaTakashi FujiiGen MarumotoKazuhiro JyouoTakahiro Fujisawa
    • G01N21/62H01J37/32H01L21/306B44C1/22C03C15/00C23F1/02
    • H01J37/32935G01N21/62G01N2201/122
    • The present invention relates to a method of and apparatus for detecting the end point of plasma treatment. The method includes steps: selecting a plasma spectrum having a characteristic wavelength from the plasma spectrum occurring at the time of the plasma treatment reaction of a specimen; computing a secondary differential value of a function of the quantity of the plasma spectrum selected and the plasma treatment reaction time of the specimen; and detecting the end point of the plasma treatment reaction of the specimen by comparing the secondary differential value computed with preset reference values for judgment. The apparatus comprises a means of selecting plasma spectrum having a particular wavelength from the plasma spectrum occurring at the time of the plasma treatment reaction of the specimen, a means of converting the quantity of the plasma spectrum selected into an analog electric signal, a means of converting the analog electric signal into a value of digital data, a means of counting the plasma treatment reaction time of the specimen, a means of secondarily differentiating a function of the value of digital data and the plasma treatment reaction time, a means of making judgment by comparing the secondary differential value with preset reference values for judgment, and a means of giving an instruction for starting judgment to said means. Thus, accurate detection is achieved regardless of which curve is taken by the change in the reaction time of the quantity of plasma spectrum.
    • 本发明涉及一种用于检测等离子体处理终点的方法和装置。 该方法包括以下步骤:从样品的等离子体处理反应时发生的等离子体光谱中选择具有特征波长的等离子体光谱; 计算所选择的等离子体光谱的量和样品的等离子体处理反应时间的函数的二次微分值; 并通过比较用预先设定的基准值进行判断的二次微分值,来检测试样的等离子体处理反应的终点。 该装置包括从样品的等离子体处理反应时出现的等离子体光谱中选择具有特定波长的等离子体光谱的方法,将所选择的等离子体光谱的量转换为模拟电信号的装置, 将模拟电信号转换为数字数据的值,对样本的等离子体处理反应时间进行计数的方法,二次区分数字数据的值和等离子体处理反应时间的功能的手段,进行判断的手段 通过将二次微分值与用于判断的预设参考值进行比较,以及向所述装置发出开始判断的指令的装置。 因此,无论通过等离子体光谱量的反应时间的变化采取哪个曲线,都能实现准确的检测。
    • 118. 发明授权
    • Hard particle concentration detecting method
    • 硬粒子浓度检测方法
    • US08659287B2
    • 2014-02-25
    • US13256119
    • 2010-03-10
    • Hidemi UkaiTakashi Fujii
    • Hidemi UkaiTakashi Fujii
    • G01N27/74G01R33/12
    • G01N33/2858G01N15/0656G01N2015/0681
    • Magnetic and counterpart members are immersed in a liquid which may include hard particles. At least one of the members is moved while pressed to the other member. The magnetic member is worn by hard particles in the liquid to produce magnetic particles in the liquid. A concentration of the magnetic particles produced is measured and is converted into a concentration of hard particles in the liquid on the basis of a calibration line representing a correlation measured in advance between the concentrations of the magnetic particles and of the hard particles in the liquid. Thus, the concentration of the hard particles in the liquid is detected.
    • 磁性材料和对应物件浸入可能包括硬质颗粒的液体中。 至少有一个成员被按压到另一个成员时被移动。 磁性构件被液体中的硬颗粒磨损,从而在液体中产生磁性颗粒。 测量所产生的磁性颗粒的浓度,并且基于代表在磁性颗粒的浓度与液体中的硬质颗粒的浓度之间的相关性的校准线,将其转化为液体中的硬颗粒的浓度。 因此,检测液体中的硬质粒子的浓度。
    • 120. 发明授权
    • Ultrafine alloy particles, and process for producing the same
    • 超细合金颗粒及其制造方法
    • US08491696B2
    • 2013-07-23
    • US13163840
    • 2011-06-20
    • Keitaroh NakamuraTakashi Fujii
    • Keitaroh NakamuraTakashi Fujii
    • B22F9/04
    • B22F1/0018B22F9/12B22F2999/00B82Y30/00B22F2202/13
    • The Ultrafine alloy particles of an alloy includes a primary metal and one or more subsidiary metals solid-soluble in said primary metal, a content of the one or more subsidiary metals is in a range of 1 wt % to 25 wt % and the one or more subsidiary metals solid-solved in the primary metal inhibit coalescence or oxidation of the ultrafine alloy particles including the primary metal, or both. The process introduces powder materials including the primary metal and the one or more subsidiary metals for producing the ultrafine alloy particles into a thermal plasma flame under reduced pressure to form a vapor-phase mixture and introduces a cooling gas toward an end portion of the thermal plasma flame in a supply amount sufficient for quenching the vapor-phase mixture so as to generate the ultrafine alloy particles.
    • 合金的超微细合金颗粒包括主金属和一种或多种固溶在所述一次金属中的辅助金属,一种或多种辅助金属的含量在1wt%至25wt%的范围内, 固溶于一次金属中的更多辅助金属抑制包括一次金属在内的超细合金颗粒的聚结或氧化,或两者兼有。 该方法引入包括主金属和一种或多种辅助金属的粉末材料,用于在减压下将超细合金颗粒制成热等离子体火焰以形成气相混合物,并向冷等离子体的端部引入冷却气体 火焰的供给量足以使气相混合物骤冷以产生超细合金颗粒。