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101. 发明申请

US20120205753A1 MICRO-ELECTROMECHANICAL SYSTEM DEVICES AND METHODS OF MAKING MICRO-ELECTROMECHANICAL SYSTEM DEVICES 有权
标题翻译：微机电系统装置及微电子系统装置的制作方法
公开(公告)号：US20120205753A1
公开(公告)日：2012-08-16
申请号：US13027209
申请日：2011-02-14
申请人： Scott G. ADAMS , Andrew J. Minnick , Charles W. Blackmer , Kenneth D. Brennan , Mollie K. Devoe
发明人： Scott G. ADAMS , Andrew J. Minnick , Charles W. Blackmer , Kenneth D. Brennan , Mollie K. Devoe
IPC分类号： H01L29/84 , H01L21/306
CPC分类号： B81B3/0008 , B81B2201/0235 , B81B2207/07 , G01P15/0802 , H01H59/0009 , H01L29/747 , H01L29/87
摘要： A micro-electromechanical system (MEMS) device includes a substrate, a first beam, a second beam, and a third beam. The first beam includes first and second portions separated by an isolation joint. The first and second portions each comprise a semiconductor and a first dielectric layer. An electrically conductive trace is mechanically coupled to the first beam and electrically coupled to the second portion's semiconductor but not the first portion's semiconductor. The second beam includes a second dielectric layer. The profile of each of the first, second, and third beams has been formed by a dry etch. A cavity separates a surface of the substrate from the first, second, and third beams. The cavity has been formed by a dry etch. A side wall of each of the first, second, and third beams has substantially no dielectric layer disposed thereon, and the dielectric layer has been removed by a vapor-phase etch.
摘要翻译：微机电系统（MEMS）装置包括基板，第一光束，第二光束和第三光束。第一梁包括由隔离接头隔开的第一和第二部分。第一和第二部分各自包括半导体和第一介电层。导电迹线机械耦合到第一光束并且电耦合到第二部分的半导体，但不耦合到第一部分的半导体。第二光束包括第二电介质层。通过干式蚀刻形成第一，第二和第三光束中的每一个的轮廓。空腔将基板的表面与第一，第二和第三梁分离。通过干蚀刻形成空腔。第一，第二和第三光束中的每一个的侧壁基本上没有设置在其上的电介质层，并且通过气相蚀刻去除介电层。

102. 发明申请

US20120141800A1 METHOD FOR COATING MICROMECHANICAL COMPONENTS OF A MICROMECHANICAL SYSTEM, IN PARTICULAR A WATCH AND RELATED MICROMECHANICAL COATED COMPONENT 审中-公开
标题翻译：用于涂覆微观系统的微观组分的方法，特别是手表和相关的微电子涂层组分
公开(公告)号：US20120141800A1
公开(公告)日：2012-06-07
申请号：US13377320
申请日：2010-06-03
申请人： Detlef Steinmüller , Doris Steinmüller , Herwig Drexel , Slimane Ghodbane , David Richard , Pierre Cusin
发明人： Detlef Steinmüller , Doris Steinmüller , Herwig Drexel , Slimane Ghodbane , David Richard , Pierre Cusin
IPC分类号： B32B9/00 , H01B1/04 , C23C14/48 , B05D5/12 , C23C16/27
CPC分类号： C23C16/277 , B81B3/0008 , B81B2201/035 , B81C2201/112 , C23C16/27 , C23C16/56 , G04D3/0074 , Y10T428/30
摘要： Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate component to be coated; providing said component with a diamond coating; wherein said diamond coating conductivity is increased in order to reduce dust attraction by the coated component when used in said micromechanical system. Corresponding micromechanical components and systems are also provided.
摘要翻译：用于涂覆微机械系统的微机械部件的方法，特别是手表机芯，包括：提供待涂覆的基底部件; 向所述部件提供金刚石涂层; 其中所述金刚石涂层的导电性增加，以便在所述微机械系统中使用时减少所涂覆的部件的吸尘。还提供了相应的微机械部件和系统。

103. 发明授权

US08022599B2 Actuator 失效
标题翻译：执行器
公开(公告)号：US08022599B2
公开(公告)日：2011-09-20
申请号：US12369828
申请日：2009-02-12
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/04
CPC分类号： B81B3/0008 , B81B2201/032 , H01G5/16 , H01G5/18 , H01H2057/006 , H01L41/094
摘要： An actuator includes: a substrate; a fixed electrode provided on a major surface of the substrate; a first dielectric film provided on the fixed electrode, and made of crystalline material; a movable beam opposed to the major surface, and held above the substrate with a gap thereto; a movable electrode; and a second dielectric film. The movable electrode is provided on a surface of the movable beam facing the fixed electrode, and has an alternate voltage applied between the fixed electrode and the movable electrode. The second dielectric film is provided on a surface of the movable beam facing the fixed electrode, and is made of crystalline material.
摘要翻译：致动器包括：基板; 设置在所述基板的主表面上的固定电极; 设置在固定电极上并由结晶材料制成的第一电介质膜; 与主表面相对的可移动光束，并且与基板间隔开间隔地保持; 可动电极; 和第二电介质膜。可动电极设置在与固定电极相对的可动光束的表面上，并且在固定电极和可动电极之间施加交替电压。第二电介质膜设置在面向固定电极的可动光束的表面上，并且由结晶材料制成。

104. 发明申请

US20110221454A1 Anti-Capture Method and Apparatus for Micromachined Devices 有权
标题翻译：用于微加工设备的防捕获方法和装置
公开(公告)号：US20110221454A1
公开(公告)日：2011-09-15
申请号：US13113548
申请日：2011-05-23
申请人： David C. Hollocher , Howard R. Samuels
发明人： David C. Hollocher , Howard R. Samuels
IPC分类号： G01R27/26
CPC分类号： G01P15/125 , B81B3/0008 , B81B2201/0235 , G01C19/56 , G01P15/131 , G01P2015/0814
摘要： A MEMS device has a movable beam, a differential capacitor with a movable electrode that moves in response to the displacement of the movable beam and that is disposed between two stationary electrodes, and a voltage circuit for applying a first voltage to the first stationary electrode, second voltage to the second stationary electrode, and a third voltage to the moveable electrode. The MEMS device also has a monitor operably coupled with the movable beam to monitor the displacement of the movable beam. In some embodiments, the monitor may monitor the distance between the movable electrode and at least one of the stationary electrodes. The MEMS device further has a voltage reducing circuit operatively coupled with the monitor, the movable electrode, and the stationary electrodes. The voltage reducing circuit reduces the differential between the third voltage and the voltages on the stationary electrodes when the monitor detects that the displacement of the movable beam is greater than or equal to a threshold value.
摘要翻译： MEMS器件具有可移动光束，具有可移动电极的差分电容器，其响应于可移动光束的位移而移动并且设置在两个固定电极之间;以及电压电路，用于向第一固定电极施加第一电压，到第二固定电极的第二电压，以及到可动电极的第三电压。 MEMS器件还具有可操作地与可移动光束耦合的监视器，以监测可移动光束的位移。在一些实施例中，监视器可以监视可移动电极与至少一个固定电极之间的距离。 MEMS器件还具有与监视器，可移动电极和固定电极可操作地耦合的电压降低电路。当监视器检测到可移动光束的位移大于或等于阈值时，电压降低电路减小了第三电压和固定电极上的电压之间的差。

105. 发明申请

US20110063712A1 DISPLAY DEVICE WITH AT LEAST ONE MOVABLE STOP ELEMENT 有权
标题翻译：具有至少一个可动止动元件的显示装置
公开(公告)号：US20110063712A1
公开(公告)日：2011-03-17
申请号：US12562093
申请日：2009-09-17
申请人： Manish Kothari , Sauri Gudlavalleti , Stephen Zee
发明人： Manish Kothari , Sauri Gudlavalleti , Stephen Zee
IPC分类号： G02B26/00
CPC分类号： B81B3/0008 , B81B2201/042 , B81C2201/112 , B81C2201/115 , G02B26/001 , G02B26/0841
摘要： In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.
摘要翻译：在某些实施例中，提供了一种包括衬底和在衬底上的多个支撑体的装置。该装置还可以包括具有可移动部分和固定部分的机械层。固定部分可以设置在支撑件上方。在某些实施例中，所述装置还包括位于所述基板上并且机械地联接到所述可移动部分的反射表面。某些实施例的装置还包括至少一个可动止动元件，该可移动止动元件从可移动部分移动并机械联接到可动部分。在某些实施例中，止动元件的至少一部分可以定位在固定部分上方。

106. 发明授权

US07855826B2 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices 有权
标题翻译：用于减少或消除干涉式调制器装置中的静摩擦和图像保持的方法和装置
公开(公告)号：US07855826B2
公开(公告)日：2010-12-21
申请号：US12190407
申请日：2008-08-12
申请人： Wilhelmus A. de Groot , Sauri Gudlavaleti , Yeh-Jiun Tung
发明人： Wilhelmus A. de Groot , Sauri Gudlavaleti , Yeh-Jiun Tung
IPC分类号： G02B26/00 , G09G3/20
CPC分类号： G02B26/001 , B81B3/0008 , B81B2201/042
摘要： Method and apparatus to reduce or eliminate stiction and image retention in interferometric display devices are disclosed. In some embodiments, a display element comprises a plurality of interferometric modulator devices configured in a matrix, each interferometric modulator device having a movable reflective layer and a plurality of supporting posts, the plurality of posts defining a post spacing distance in at least one direction that is greater for one or more interferometric modulator devices disposed adjacent to an edge of the display element than one or more interferometric modulator devices disposed nonadjacent to an edge of the display element.
摘要翻译：公开了减少或消除干涉式显示装置中的静摩擦和图像保持的方法和装置。在一些实施例中，显示元件包括以矩阵形式配置的多个干涉式调制器装置，每个干涉式调制器装置具有可移动反射层和多个支撑柱，所述多个柱在至少一个方向上限定柱间隔距离，对于与显示元件的边缘相邻布置的一个或多个干涉式调制器装置，与设置在与显示元件的边缘不相邻的一个或多个干涉式调制器装置更大。

107. 发明申请

US20100039696A1 METHOD AND APPARATUS TO REDUCE OR ELIMINATE STICTION AND IMAGE RETENTION IN INTERFEROMETRIC MODULATOR DEVICES 有权
标题翻译：用于减少或消除干涉式调制器装置中的图像和图像保持的方法和装置
公开(公告)号：US20100039696A1
公开(公告)日：2010-02-18
申请号：US12190407
申请日：2008-08-12
申请人： Wilhelmus A. de Groot , Sauri Gudlavaleti , Yeh-Jiun Tung
发明人： Wilhelmus A. de Groot , Sauri Gudlavaleti , Yeh-Jiun Tung
IPC分类号： G02F1/21 , G09G3/20
CPC分类号： G02B26/001 , B81B3/0008 , B81B2201/042
摘要： Method and apparatus to reduce or eliminate stiction and image retention in interferometric display devices are disclosed. In some embodiments, a display element comprises a plurality of interferometric modulator devices configured in a matrix, each interferometric modulator device having a movable reflective layer and a plurality of supporting posts, the plurality of posts defining a post spacing distance in at least one direction that is greater for one or more interferometric modulator devices disposed adjacent to an edge of the display element than one or more interferometric modulator devices disposed nonadjacent to an edge of the display element.
摘要翻译：公开了减少或消除干涉式显示装置中的静摩擦和图像保持的方法和装置。在一些实施例中，显示元件包括以矩阵形式配置的多个干涉式调制器装置，每个干涉式调制器装置具有可移动反射层和多个支撑柱，所述多个柱在至少一个方向上限定柱间隔距离，对于与显示元件的边缘相邻布置的一个或多个干涉式调制器装置，与设置在与显示元件的边缘不相邻的一个或多个干涉式调制器装置更大。

108. 发明申请

US20090206702A1 ACTUATOR 失效
标题翻译：执行机构
公开(公告)号：US20090206702A1
公开(公告)日：2009-08-20
申请号：US12369828
申请日：2009-02-12
申请人： Takashi KAWAKUBO , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi KAWAKUBO , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/04
CPC分类号： B81B3/0008 , B81B2201/032 , H01G5/16 , H01G5/18 , H01H2057/006 , H01L41/094
摘要： An actuator includes: a substrate; a fixed electrode provided on a major surface of the substrate; a first dielectric film provided on the fixed electrode, and made of crystalline material; a movable beam opposed to the major surface, and held above the substrate with a gap thereto; a movable electrode; and a second dielectric film. The movable electrode is provided on a surface of the movable beam facing the fixed electrode, and has an alternate voltage applied between the fixed electrode and the movable electrode. The second dielectric film is provided on a surface of the movable beam facing the fixed electrode, and is made of crystalline material.
摘要翻译：致动器包括：基板; 设置在所述基板的主表面上的固定电极; 设置在固定电极上并由结晶材料制成的第一电介质膜; 与主表面相对的可移动光束，并且与基板间隔开间隔地保持; 可动电极; 和第二电介质膜。可动电极设置在与固定电极相对的可动光束的表面上，并且在固定电极和可动电极之间施加交替电压。第二电介质膜设置在面向固定电极的可动光束的表面上，并且由结晶材料制成。

109. 发明授权

US07527996B2 Non-planar surface structures and process for microelectromechanical systems 失效
标题翻译：微机电系统的非平面表面结构和工艺
公开(公告)号：US07527996B2
公开(公告)日：2009-05-05
申请号：US11406981
申请日：2006-04-19
申请人： Qi Luo , Sriram Akella , Lior Kogut
发明人： Qi Luo , Sriram Akella , Lior Kogut
IPC分类号： H01L21/00
CPC分类号： B81B3/0008 , G02B26/001
摘要： Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. Voids are formed in one or more of the various layers so as to form a non-planar surface on the movable and/or the stationary layers. The voids are formed to extend through less than the entire thickness of the layer where they are being formed. Other layers may be formed over the formed voids. Removal of the sacrificial layer from between the resulting non-planar movable and/or stationary layers results in a released MEMS device having reduced contact area between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.
摘要翻译：制造包括干涉式调制器的MEMS器件的方法包括在衬底上沉积包括固定层，可移动层和牺牲层的各种层。在各层中的一个或多个中形成空隙，以在可移动和/或固定层上形成非平面表面。空隙形成为延伸穿过小于形成它们的层的整个厚度。可以在所形成的空隙上形成其它层。从所得到的非平面可移动和/或固定层之间去除牺牲层导致当MEMS器件致动时，可释放的MEMS器件具有减小的可移动层和固定层之间的接触面积。减小的接触面积导致MEMS器件的致动期间较低的粘附力和降低的静摩擦力。这些方法可用于制造释放和未释放的干涉式调制器。

110. 发明授权

US07505195B2 Reflective spatial light modulator with high stiffness torsion spring hinge 有权
标题翻译：具有高刚度扭力弹簧铰链的反射空间光调制器
公开(公告)号：US07505195B2
公开(公告)日：2009-03-17
申请号：US11418941
申请日：2006-05-04
申请人： Dongmin Chen , Tore Nauta
发明人： Dongmin Chen , Tore Nauta
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , B81B3/0008 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/058 , H04N5/7458
摘要： A spatial light modulator for use in display applications. The spatial light modulator includes a support substrate and a flexible member coupled to the support substrate. The spatial light modulator also includes a mirror plate coupled to the flexible member and characterized by an activated position. The mirror plate is adapted to rotate in relation to the flexible member from the activated position to a second activated position in a time less than 6.0 μs.
摘要翻译：用于显示应用的空间光调制器。空间光调制器包括支撑基板和耦合到支撑基板的柔性部件。空间光调制器还包括耦合到柔性构件的镜面板，其特征在于激活位置。镜板适于相对于柔性构件在小于6.0微米的时间内从启动位置旋转到第二激活位置。

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