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    • 109. 发明授权
    • Semiconductor device and method for fabricating the same
    • 半导体装置及其制造方法
    • US06861704B2
    • 2005-03-01
    • US10663705
    • 2003-09-17
    • Hitoshi AsadaHiroaki Inoue
    • Hitoshi AsadaHiroaki Inoue
    • H01L21/28H01L21/336H01L21/8234H01L27/088H01L29/08H01L29/417H01L29/49H01L29/78H01L29/76H01L29/94H01L31/062H01L31/113H01L31/119
    • H01L29/0847H01L21/823418H01L21/823468H01L29/41775H01L29/4933H01L29/6656H01L29/66659H01L29/7833H01L29/7835
    • The semiconductor device comprises a gate electrode 26 formed on a semiconductor substrate 10, a source region 45a having a lightly doped source region 42a and a heavily doped source region 44a, a drain region 45b having a lightly doped drain region 42b and a heavily doped drain region 44b, a first silicide layer 40c formed on the source region, a second silicide layer 40d formed on the drain region, a first conductor plug 54 connected to the first silcide layer and a second conductor plug 54 connected to the second silicide layer. The heavily doped drain region is formed in the region of the lightly doped region except the peripheral region, and the second silicide layer is formed in the region of the heavily doped drain region except the peripheral region. Thus, the concentration of the electric fields on the drain region can be mitigated when voltages are applied to the drain region. Thus, even with the silicide layer formed on the source/drain region, sufficiently high withstand voltages of the high withstand voltage transistor can be ensured. Furthermore, the drain region alone has the above-described structure, whereby the increase of the source-drain electric resistance can be prevented while high withstand voltages can be ensured.
    • 半导体器件包括形成在半导体衬底10上的栅电极26,具有轻掺杂源极区域42a和重掺杂源极区域44a的源极区域45a,具有轻掺杂漏极区域42b的漏极区域45b和重掺杂漏极 区域44b,形成在源极区上的第一硅化物层40c,形成在漏极区上的第二硅化物层40d,连接到第一硅化物层的第一导体插塞54和连接到第二硅化物层的第二导体插塞54。 重掺杂漏极区域形成在除了外围区域之外的轻掺杂区域的区域中,并且第二硅化物层形成在除了周边区域之外的重掺杂漏极区域的区域中。 因此,当向漏极区域施加电压时,可以减轻漏极区域上的电场的浓度。 因此,即使在源极/漏极区域上形成硅化物层,也可以确保高耐压晶体管的足够高的耐受电压。 此外,单独的漏极区域具有上述结构,由此可以防止源极 - 漏极电阻的增加,同时可以确保高耐受电压。