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    • 105. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US08629433B2
    • 2014-01-14
    • US13012844
    • 2011-01-25
    • Shunpei YamazakiHideto Ohnuma
    • Shunpei YamazakiHideto Ohnuma
    • H01L29/12H01L29/00H01L27/01H01L27/12H01L31/0392
    • H01L27/1266H01L21/3081H01L21/76254H01L27/1214H01L29/66772
    • An object is to provide a method for manufacturing, with high yield, a semiconductor device having a crystalline semiconductor layer even if a substrate with low upper temperature limit. A groove is formed in a part of a semiconductor substrate to form a semiconductor substrate that has a projecting portion, and a bonding layer is formed to cover the projecting portion. In addition, before the bonding layer is formed, a portion of the semiconductor substrate to be the projecting portion is irradiated with accelerated ions to form a brittle layer. After the bonding layer and the supporting substrate are bonded together, heat treatment for separation of the semiconductor substrate is performed to provide a semiconductor layer over the supporting substrate. The semiconductor layer is selectively etched, and a semiconductor element is formed and a semiconductor device is manufactured.
    • 本发明的目的是提供一种制造具有晶体半导体层的半导体器件的高产率的方法,即使是具有低的上限极限的衬底。 在半导体衬底的一部分中形成沟槽以形成具有突出部分的半导体衬底,并且形成接合层以覆盖突出部分。 此外,在形成接合层之前,用加速离子照射作为突出部分的半导体衬底的一部分以形成脆性层。 在接合层和支撑基板接合在一起之后,进行用于分离半导体衬底的热处理,以在支撑衬底上提供半导体层。 选择性地蚀刻半导体层,形成半导体元件并制造半导体器件。