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101. 发明授权

US07868416B2 Semiconductor device 有权
标题翻译：半导体器件
公开(公告)号：US07868416B2
公开(公告)日：2011-01-11
申请号：US12773038
申请日：2010-05-04
申请人： Hiroyasu Tanaka , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Yoshiaki Fukuzumi , Masaru Kito , Yasuyuki Matsuoka
发明人： Hiroyasu Tanaka , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Yoshiaki Fukuzumi , Masaru Kito , Yasuyuki Matsuoka
IPC分类号： H01L29/93 , H01L21/76
CPC分类号： H01L29/792 , H01L21/28282 , H01L27/11578 , H01L27/11582 , H01L29/0649 , H01L29/7923 , H01L29/7926
摘要： A semiconductor device has a substrate, a source region formed on the surface portion of the substrate, a first insulating layer formed on the substrate, a gate electrode formed on the first insulating layer, a second insulating layer formed on the gate electrode, a body section connected with the source region, penetrating through the first insulating layer, the gate electrode and the second insulating layer, and containing a void, a gate insulating film surrounding the body section, and formed between the body section and the gate electrode, and a drain region connected with the body section.
摘要翻译：半导体器件具有衬底，形成在衬底的表面部分上的源极区域，形成在衬底上的第一绝缘层，形成在第一绝缘层上的栅电极，形成在栅电极上的第二绝缘层，主体与源极区域连接，穿过第一绝缘层，栅电极和第二绝缘层，并且包含空隙，围绕主体部分的栅极绝缘膜，并且形成在主体部分和栅电极之间，并且漏极区域与主体部分连接。

102. 发明授权

US07859066B2 Nonvolatile semiconductor memory device and method of manufacturing the same 有权
标题翻译：非易失性半导体存储器件及其制造方法
公开(公告)号：US07859066B2
公开(公告)日：2010-12-28
申请号：US12140734
申请日：2008-06-17
申请人： Masaru Kito , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Yoshiaki Fukuzumi , Yasuyuki Matsuoka
发明人： Masaru Kito , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Yoshiaki Fukuzumi , Yasuyuki Matsuoka
IPC分类号： H01L21/8247
CPC分类号： H01L27/105 , H01L21/02161 , H01L21/02164 , H01L21/0217 , H01L21/31645 , H01L27/11568 , H01L27/11578 , H01L27/11582 , H01L29/66833 , H01L29/792 , H01L29/7926
摘要： A nonvolatile semiconductor memory device has a plurality of memory strings each including a plurality of electrically rewritable memory cells serially connected. The memory string includes a columnar semiconductor portion extending in the vertical direction from a substrate, a first charge storage layer formed adjacent to the columnar semiconductor portion and configured to accumulate charge, a first block insulator formed adjacent to the first charge storage layer, and a first conductor formed adjacent to the first block insulator.
摘要翻译：非易失性半导体存储器件具有多个存储串，每个存储串包括串联连接的多个电可重写存储器单元。存储器串包括从基板沿垂直方向延伸的柱状半导体部分，与柱状半导体部分相邻形成并构成为积蓄电荷的第一电荷存储层，与第一电荷存储层相邻形成的第一块绝缘体，第一导体与第一块绝缘体相邻形成。

103. 发明授权

US07732891B2 Semiconductor device 有权
标题翻译：半导体器件
公开(公告)号：US07732891B2
公开(公告)日：2010-06-08
申请号：US12132181
申请日：2008-06-03
申请人： Hiroyasu Tanaka , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Yoshiaki Fukuzumi , Masaru Kito , Yasuyuki Matsuoka
发明人： Hiroyasu Tanaka , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Yoshiaki Fukuzumi , Masaru Kito , Yasuyuki Matsuoka
IPC分类号： H01L29/93 , H01L21/76
CPC分类号： H01L29/792 , H01L21/28282 , H01L27/11578 , H01L27/11582 , H01L29/0649 , H01L29/7923 , H01L29/7926
摘要： A semiconductor device has a substrate, a source region formed on the surface portion of the substrate, a first insulating layer formed on the substrate, a gate electrode formed on the first insulating layer, a second insulating layer formed on the gate electrode, a body section connected with the source region, penetrating through the first insulating layer, the gate electrode and the second insulating layer, and containing a void, a gate insulating film surrounding the body section, and formed between the body section and the gate electrode, and a drain region connected with the body section.
摘要翻译：半导体器件具有衬底，形成在衬底的表面部分上的源极区域，形成在衬底上的第一绝缘层，形成在第一绝缘层上的栅电极，形成在栅电极上的第二绝缘层，主体与源极区域连接，穿过第一绝缘层，栅电极和第二绝缘层，并且包含空隙，围绕主体部分的栅极绝缘膜，并且形成在主体部分和栅电极之间，并且漏极区域与主体部分连接。

104. 发明申请

US20120135595A1 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：非挥发性半导体存储器件及其制造方法
公开(公告)号：US20120135595A1
公开(公告)日：2012-05-31
申请号：US13365600
申请日：2012-02-03
申请人： Masaru Kito , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Yoshiaki Fukuzumi , Hideaki Aochi , Yasuyuki Matsuoka
发明人： Masaru Kito , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Yoshiaki Fukuzumi , Hideaki Aochi , Yasuyuki Matsuoka
IPC分类号： H01L21/336
CPC分类号： H01L29/7881 , H01L27/115 , H01L27/11556
摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a first columnar semiconductor layer extending in a direction perpendicular to a substrate; a charge accumulation layer formed on the first columnar semiconductor layer via a first air gap and accumulating charges; a block insulation layer contacting the charge accumulation layer; and a plurality of first conductive layers contacting the block insulation layer.
摘要翻译：非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。每个存储器串包括：在垂直于衬底的方向上延伸的第一柱状半导体层; 电荷累积层，经由第一气隙形成在第一柱状半导体层上，并积累电荷; 与电荷累积层接触的块绝缘层; 以及与块绝缘层接触的多个第一导电层。

105. 发明授权

US07847334B2 Non-volatile semiconductor storage device and method of manufacturing the same 有权
标题翻译：非易失性半导体存储装置及其制造方法
公开(公告)号：US07847334B2
公开(公告)日：2010-12-07
申请号：US12403919
申请日：2009-03-13
申请人： Ryota Katsumata , Masaru Kito , Hiroyasu Tanaka , Masaru Kidoh , Yoshiaki Fukuzumi , Hideaki Aochi , Yasuyuki Matsuoka
发明人： Ryota Katsumata , Masaru Kito , Hiroyasu Tanaka , Masaru Kidoh , Yoshiaki Fukuzumi , Hideaki Aochi , Yasuyuki Matsuoka
IPC分类号： H01L29/788
CPC分类号： H01L21/764 , H01L27/11551 , H01L27/11556 , H01L27/11575 , H01L27/11578
摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings comprises: a first columnar semiconductor layer extending in a vertical direction to a substrate; a charge accumulation layer formed around the first columnar semiconductor layer via a first insulation layer; and a first conductive layer formed around the charge accumulation layer via a second insulation layer. Each of the first conductive layers is formed to expand in a two-dimensional manner, and air gaps are formed between the first conductive layers located there above and there below.
摘要翻译：非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。每个存储器串包括：沿垂直方向延伸到衬底的第一柱状半导体层; 电荷累积层，经由第一绝缘层形成在第一柱状半导体层周围; 以及经由第二绝缘层形成在电荷累积层周围的第一导电层。每个第一导电层被形成为以二维方式膨胀，并且在位于其上方和下方的第一导电层之间形成气隙。

106. 发明授权

US07821058B2 Nonvolatile semiconductor memory and method for manufacturing the same 有权
标题翻译：非易失性半导体存储器及其制造方法
公开(公告)号：US07821058B2
公开(公告)日：2010-10-26
申请号：US11970992
申请日：2008-01-08
申请人： Masaru Kidoh , Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Hideaki Aochi , Hiroyasu Tanaka , Yasuyuki Matsuoka , Yoshio Ozawa , Mitsuru Sato
发明人： Masaru Kidoh , Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Hideaki Aochi , Hiroyasu Tanaka , Yasuyuki Matsuoka , Yoshio Ozawa , Mitsuru Sato
IPC分类号： H01L27/115 , H01L21/8247 , H01L29/792
CPC分类号： H01L29/792 , G11C16/0483 , H01L27/0688 , H01L27/11568 , H01L27/11578 , H01L27/11582 , H01L29/66833 , H01L29/7926
摘要： According to an aspect of the present invention, there is provided a nonvolatile semiconductor memory including: a columnar semiconductor; a charge storage insulating film including: a first insulating film formed around the columnar semiconductor, a charge storage film formed around the first insulating film, and a second insulating film formed around the charge storage film; an electrode extending two-dimensionally to surround the charge storage insulating film, the electrode having a groove; and a metal silicide formed on a sidewall of the groove.
摘要翻译：根据本发明的一个方面，提供了一种非易失性半导体存储器，包括：柱状半导体; 电荷存储绝缘膜，包括：围绕所述柱状半导体形成的第一绝缘膜，围绕所述第一绝缘膜形成的电荷存储膜，以及形成在所述电荷存储膜周围的第二绝缘膜; 电极，其二维地延伸以包围电荷存储绝缘膜，所述电极具有凹槽; 以及形成在所述槽的侧壁上的金属硅化物。

107. 发明授权

US07558141B2 Memory system, semiconductor memory device and method of driving same 有权
标题翻译：存储器系统，半导体存储器件及其驱动方法
公开(公告)号：US07558141B2
公开(公告)日：2009-07-07
申请号：US11955900
申请日：2007-12-13
申请人： Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Masaru Kito , Hideaki Aochi , Yoshiaki Fukuzumi , Yasuyuki Matsuoka
发明人： Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Masaru Kito , Hideaki Aochi , Yoshiaki Fukuzumi , Yasuyuki Matsuoka
IPC分类号： G11C7/14
CPC分类号： H01L27/115 , G11C7/18 , G11C8/08 , H01L27/11526 , H01L27/11529
摘要： A semiconductor memory device has a semiconductor substrate, first select transistors formed on the surface of said semiconductor substrate, first dummy transistors formed above said first select transistors, a plurality of memory cell transistors formed above said first dummy transistors so as to extend in a direction perpendicular to the surface of said semiconductor substrate, each of said memory cell transistor including an insulating layer having a charge-accumulating function, second dummy transistors formed above said memory cell transistors, and second select transistors formed above said second dummy transistors; wherein a first potential is provided to the gate electrodes of said first select transistors and the gate electrodes of said first dummy transistors and a second potential is provided to the gate electrodes of said second select transistors and the gate electrodes of said second dummy transistors at the time of write operation to write data to said memory cell transistors.
摘要翻译：半导体存储器件具有半导体衬底，形成在所述半导体衬底的表面上的第一选择晶体管，形成在所述第一选择晶体管上方的第一虚拟晶体管，形成在所述第一虚拟晶体管上方的多个存储单元晶体管，垂直于所述半导体衬底的表面，每个所述存储单元晶体管包括具有电荷累积功能的绝缘层，形成在所述存储单元晶体管上方的第二虚拟晶体管以及形成在所述第二虚设晶体管上方的第二选择晶体管; 其中第一电位被提供给所述第一选择晶体管的栅电极和所述第一虚拟晶体管的栅电极，并且第二电位被提供给所述第二选择晶体管的栅电极和所述第二虚晶体管的栅电极写入操作的时间将数据写入到所述存储单元晶体管。

108. 发明申请

US20090146190A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR MEMORY DEVICE 有权
标题翻译：用于制造半导体存储器件的半导体存储器件和方法
公开(公告)号：US20090146190A1
公开(公告)日：2009-06-11
申请号：US12325711
申请日：2008-12-01
申请人： Yoshiaki FUKUZUMI , Ryota Katsumata , Masaru Kidoh , Masaru Kito , Hiroyasu Tanaka , Hideaki Aochi , Yasuyuki Matsuoka
发明人： Yoshiaki FUKUZUMI , Ryota Katsumata , Masaru Kidoh , Masaru Kito , Hiroyasu Tanaka , Hideaki Aochi , Yasuyuki Matsuoka
IPC分类号： H01L27/115 , H01L21/8247
CPC分类号： H01L27/11578 , H01L27/11575 , H01L27/11582
摘要： According to an aspect of the present invention, there is provided a nonvolatile semiconductor memory device, comprising a plurality of memory strings, each of the memory strings being constituted with a plurality of electrically erasable memory cells being serially connected each other, the memory strings comprising: a columnar semiconductor layer perpendicularly extending toward a substrate; a plurality of conductive layers being formed in parallel to the substrate and including a first space between a sidewall of the columnar semiconductor layers; and characteristic change layer being formed on the sidewall of the columnar semiconductor layer faced to the first space or a sidewall of the conductive layer faced to the first space and changing characteristics accompanying with applied voltage; wherein the plurality of the conductive layers have a function of a relative movement to a prescribed direction for the columnar semiconductor layer.
摘要翻译：根据本发明的一个方面，提供了一种非易失性半导体存储器件，包括多个存储器串，每个存储器串由多个电可擦除存储器单元组成，所述多个电可擦除存储器单元串联连接，所述存储器串包括：向衬底垂直延伸的柱状半导体层; 多个导电层平行于衬底形成并且包括柱状半导体层的侧壁之间的第一空间; 并且特征变化层形成在面向面向第一空间的导电层的第一空间或侧壁的柱状半导体层的侧壁上，并且伴随施加电压的变化特性; 其中所述多个所述导电层具有对于所述柱状半导体层相对于规定方向的相对移动的功能。

109. 发明授权

US08293601B2 Method of manufacturing a non-volatile semiconductor storage device 有权
标题翻译：制造非易失性半导体存储装置的方法
公开(公告)号：US08293601B2
公开(公告)日：2012-10-23
申请号：US13010466
申请日：2011-01-20
申请人： Masaru Kito , Ryota Katsumata , Yoshiaki Fukuzumi , Masaru Kidoh , Hiroyasu Tanaka , Hideaki Aochi , Yasuyuki Matsuoka
发明人： Masaru Kito , Ryota Katsumata , Yoshiaki Fukuzumi , Masaru Kidoh , Hiroyasu Tanaka , Hideaki Aochi , Yasuyuki Matsuoka
IPC分类号： H01L21/336
CPC分类号： H01L27/11578 , H01L21/8221 , H01L27/0688 , H01L27/11573 , H01L27/11582 , H01L29/66833 , H01L29/7923 , H01L29/7926
摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a memory columnar semiconductor extending in a direction perpendicular to a substrate; a tunnel insulation layer contacting the memory columnar semiconductor; a charge accumulation layer contacting the tunnel insulation layer and accumulating charges; a block insulation layer contacting the charge accumulation layer; and a plurality of memory conductive layers contacting the block insulation layer. The lower portion of the charge accumulation layer is covered by the tunnel insulation layer and the block insulation layer.
摘要翻译：非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。每个存储器串包括：在垂直于衬底的方向上延伸的存储器柱状半导体; 与记录柱状半导体接触的隧道绝缘层; 与隧道绝缘层接触并积累电荷的电荷累积层; 与电荷累积层接触的块绝缘层; 以及与块绝缘层接触的多个存储器导电层。电荷累积层的下部被隧道绝缘层和块绝缘层覆盖。

110. 发明授权

US08148789B2 Non-volatile semiconductor storage device and method of manufacturing the same 有权
标题翻译：非易失性半导体存储装置及其制造方法
公开(公告)号：US08148789B2
公开(公告)日：2012-04-03
申请号：US12260589
申请日：2008-10-29
申请人： Masaru Kito , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Yoshiaki Fukuzumi , Hideaki Aochi , Yasuyuki Matsuoka
发明人： Masaru Kito , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Yoshiaki Fukuzumi , Hideaki Aochi , Yasuyuki Matsuoka
IPC分类号： H01L21/02
CPC分类号： H01L29/7881 , H01L27/115 , H01L27/11556
摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a first columnar semiconductor layer extending in a direction perpendicular to a substrate; a charge accumulation layer formed on the first columnar semiconductor layer via a first air gap and accumulating charges; a block insulation layer contacting the charge accumulation layer; and a plurality of first conductive layers contacting the block insulation layer.
摘要翻译：非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。每个存储器串包括：在垂直于衬底的方向上延伸的第一柱状半导体层; 电荷累积层，经由第一气隙形成在第一柱状半导体层上，并积累电荷; 与电荷累积层接触的块绝缘层; 以及与块绝缘层接触的多个第一导电层。

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