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    • 102. 发明授权
    • Impurity-activating thermal process method and thermal process apparatus
    • 杂质活化热处理方法和热处理装置
    • US08017528B2
    • 2011-09-13
    • US12352977
    • 2009-01-13
    • Kenji YonedaKazuma Takahashi
    • Kenji YonedaKazuma Takahashi
    • H01L21/00
    • H01L21/26513H01L21/2686H01L21/324H01L29/6659H01L29/7833
    • A thermal cycle includes: increasing a temperature from an initial temperature to a temperature T1 at an arbitrary rate R1 (° C./sec); holding the temperature at the temperature T1 for an arbitrary period t1 (sec); increasing the temperature from the temperature T1 to a temperature T2 at a rate R2 (° C./sec) of 1.0×107 (° C./sec) or less; and holding the temperature at the temperature T2 for a period t2 (sec) of 50 msec or less. The thermal cycle thereafter includes: decreasing the temperature from the temperature T2 to the temperature T1 at a rate R1′ (° C./sec) of 1.0×107 (° C./sec) or less; holding the temperature T1 for an arbitrary period t3 (sec); and decreasing the temperature from the temperature T1 to a final temperature at an arbitrary rate R2′ (° C./sec). Such a thermal cycle is successively repeated in a plurality of iterations.
    • 热循环包括:以任意速率R1(℃/秒)将温度从初始温度升高到温度T1; 将温度保持在温度T1任意时段t1(秒); 以1.0×107(℃/秒)以下的速率R2(℃/秒)将温度从温度T1升温至温度T2; 并将温度保持在温度T2,持续时间t2(秒)为50毫秒或更短。 此后的热循环包括:以1.0×10 7(℃/秒)以下的速率R1'(℃/秒)将温度从温度T2降低到温度T1; 保持温度T1任意时间t3(秒); 并以任意的速率R2'(℃/秒)将温度从温度T1降低到最终温度。 这样的热循环在多次迭代中连续重复。
    • 104. 发明授权
    • Living body growth and therapy promotion condition collection information processing device
    • 活体生长和治疗促进条件收集信息处理装置
    • US07836072B2
    • 2010-11-16
    • US10529162
    • 2003-09-26
    • Kenji Yoneda
    • Kenji Yoneda
    • G06F17/30G06F7/00
    • G06Q10/06G06Q30/0217Y10S707/915Y10S707/942
    • An information processing system P3 is communicably connected with multiple controlling systems P2 that promote the growth or health of living organisms by controlling at the least the light irradiated on such living organisms by a light irradiating means X1, and the environmental data produced by one controlling system P1 and concerning the beneficial environmental parameters including the light irradiated on the living organisms are transmitted to and administered by the information processing system P3 so that the environmental data from one of the controlling systems P2 is delivered from the information processing system P3 to any of the other controlling systems P2, and royalty data concerning royalties is produced in relationship to a controlling system identifier that uniquely identifies the one controlling system P1 when the information processing system P3 receives or delivers the environmental data.
    • 信息处理系统P3与多个控制系统P2可通信地连接,多个控制系统P2通过利用光照射装置X1至少控制照射在这种活生物体上的光以及由一个控制系统产生的环境数据来促进生物体的生长或健康 P1和涉及包括照射在生物体上的光的有益环境参数被传送到信息处理系统P3并由其管理,使得来自控制系统P2之一的环境数据从信息处理系统P3被传送到任何 与信息处理系统P3接收或传送环境数据时唯一地识别一个控制系统P1的控制系统标识符相关地产生关于特许权使用费的版税数据。
    • 107. 发明申请
    • ILLUMINATION DEVICE
    • 照明装置
    • US20090129121A1
    • 2009-05-21
    • US12064696
    • 2006-08-24
    • Kenji Yoneda
    • Kenji Yoneda
    • F21V7/04
    • G02B6/0021G01N21/8806G02B6/0031G02B6/0068
    • A lighting device is provided that surface-emits the light evenly with less number of luminous bodies by comprising a transparent body 2 for light diffusion in a shape of a body of rotation having a center bore 11 and provided with a luminous surface 2c and a light introducing surface 2b, and multiple luminous bodies 3 that introduce the light into the light introducing surface 2c of the transparent body 2 and make the luminous surface 2c of the transparent body 2 surface-emit the light, wherein the light introducing surface 2b is arranged on an inner peripheral section forming the center bore 11 of the transparent body 2, a reflecting layer 41 is arranged to reflect the light on a surface other than the light introducing surface 2b and the luminous surface 2c of the transparent body 2, and the light from the luminous bodies 3 is emitted toward an outer surrounding surface 2e of the transparent body 2.
    • 提供了一种照明装置,其通过包括用于光扩散的透明体2以具有中心孔11的旋转体的形状并且设置有发光表面2c和光 引入表面2b和将透明体2的光引入表面2c引入光并使透明体2的发光表面2c发光的多个发光体3发光,其中光引入表面2b布置在 形成透明体2的中心孔11的内周部分,反射层41被布置成将透光体2的光入射面2b和发光面2c以外的表面反射, 发光体3朝向透明体2的外周面2e射出。
    • 108. 发明申请
    • Semiconductor manufacturing apparatus
    • 半导体制造装置
    • US20080166822A1
    • 2008-07-10
    • US11905227
    • 2007-09-28
    • Masahiko NiwayamaKenji Yoneda
    • Masahiko NiwayamaKenji Yoneda
    • H01L21/425
    • H01J37/3171H01J37/026H01J37/304H01J2237/24535H01J2237/30472H01L21/28035
    • A semiconductor manufacturing apparatus includes: an ion source and a beam line for introducing an ion beam into a target film which is formed over a wafer with an insulating film interposed therebetween; a flood gun for supplying the target film with electrons for neutralizing charges contained in the ion beam; a rotating disk for subjecting the target film to mechanical scanning of the ion beam in two directions composed of r-θ directions; a rear Faraday cage for measuring the current density produced by the ion beam; a disk-rotational-speed controller and a disk-scanning-speed controller for changing the scanning speed of the target film; and a beam current/current density measuring instrument for controlling, according to the current density, the scanning speed of the target film.
    • 一种半导体制造装置,包括:离子源和用于将离子束引入到晶片之间的绝缘膜之间形成的靶膜的离子束; 用于向目标膜提供用于中和离子束中的电荷的电子的洪水枪; 旋转盘,用于使目标膜在由θ-θ方向组成的两个方向上对离子束进行机械扫描; 用于测量由离子束产生的电流密度的后法拉第笼; 盘转速控制器和用于改变目标膜的扫描速度的盘扫描速度控制器; 以及用于根据电流密度控制目标膜的扫描速度的束电流/电流密度测量仪器。