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101. 发明授权

US07841067B2 Method for manufacturing a trailing shield structure for a perpendicular magnetic write head 有权
标题翻译：用于制造用于垂直磁写头的后屏蔽结构的方法
公开(公告)号：US07841067B2
公开(公告)日：2010-11-30
申请号：US11678856
申请日：2007-02-26
申请人： Jeffrey S. Lille
发明人： Jeffrey S. Lille
IPC分类号： G11B5/23 , G11B5/187
CPC分类号： G11B5/1278 , G11B5/112 , Y10T29/49032 , Y10T29/49039 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49067
摘要： A method for forming a head having a trailing shield that includes forming a gap layer above a pole, forming a mask above the gap layer, and forming a trailing shield above the gap layer and adjacent the mask, a throat height of the trailing shield being defined between the mask.
摘要翻译：一种用于形成具有后挡板的头部的方法，包括在杆上形成间隙层，在间隙层上方形成掩模，以及在间隙层上方并在掩模附近形成后护罩，后护罩的喉部高度为在面具之间定义。

102. 发明授权

US07813080B2 Enhanced planarization liftoff structure and method for making the same 有权
标题翻译：增强平面化提升结构及其制作方法
公开(公告)号：US07813080B2
公开(公告)日：2010-10-12
申请号：US11644159
申请日：2006-12-22
申请人： Jeffrey S. Lille , Amanda Baer , John Jaekoyun Yang
发明人： Jeffrey S. Lille , Amanda Baer , John Jaekoyun Yang
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , G11B5/3169 , G11B5/3173
摘要： Systems and methods for enhanced planarization liftoff structures. In accordance with a first method embodiment, a method for manufacturing a pole tip for magnetic recording comprises accessing a wafer comprising a plurality of pole tips and a plurality of pole tip masks corresponding to the plurality of pole tips. Non magnetic material is filled adjacent to the plurality of pole tips. Material adjacent to the plurality of pole tips is etched. Subsequent to the etching, the wafer is planarized to a level equal to or higher than a level of the trailing edges of the plurality of pole tips. The enhanced liftoff structure enables decreased planarization processing, resulting in a decreased process window. As a beneficial result, manufacturing throughput and quality are improved.
摘要翻译：用于增强平面化起飞结构的系统和方法。根据第一方法实施例，一种用于制造用于磁记录的极尖的方法包括访问包括多个极尖的晶片和与多个极尖相对应的多个极尖端掩模。非磁性材料与多个极尖相邻地填充。蚀刻与多个极尖相邻的材料。在蚀刻之后，晶片被平坦化到等于或高于多个极尖的后缘的水平的水平。增强的提升结构使平坦化处理减少，从而减少了处理窗口。作为有益的结果，提高了生产量和质量。

103. 发明授权

US07698807B2 Method of manufacturing a magnetic sensor by multiple depositions of varying geometry 有权
标题翻译：通过不同几何形状的多次沉积制造磁性传感器的方法
公开(公告)号：US07698807B2
公开(公告)日：2010-04-20
申请号：US11337020
申请日：2006-01-20
申请人： Jeffrey Robinson Childress , Robert E. Fontana, Jr. , Jeffrey S. Lille
发明人： Jeffrey Robinson Childress , Robert E. Fontana, Jr. , Jeffrey S. Lille
IPC分类号： G11B5/187
CPC分类号： G11B5/398 , B82Y25/00 , G01R33/093 , G11B5/3932 , H01L43/08 , H01L43/12 , Y10T29/49041 , Y10T29/49044 , Y10T29/49048
摘要： Formation of the magnetic sensor layers of a magnetic sensor are separated into at least two depositions to reduce the dimension of the sensor. The free layer portion of the sensor is deposited at a different process step than the pinned layer portion. The top of the free layer stack can be a tunnel barrier, the free layer, or part of the free layer. The free layer stack also may contain an in-stack bias layer. The longitudinal bias layer may be patterned in a separate processing step, which allows the stack containing the free layer to be effectively thinner and allow smaller track width dimensions.
摘要翻译：将磁传感器的磁传感器层的形成分成至少两个沉积物以减小传感器的尺寸。传感器的自由层部分以与被钉扎层部分不同的工艺步骤沉积。自由层堆叠的顶部可以是隧道势垒，自由层或自由层的一部分。自由层堆叠还可以包含堆叠内偏压层。纵向偏置层可以在单独的处理步骤中进行图案化，其允许包含自由层的堆叠被有效地更薄并且允许更小的轨道宽度尺寸。

104. 发明授权

US07639459B2 Three terminal magnetic sensor having an in-stack longitudinal biasing layer structure 失效
标题翻译：具有叠层纵向偏置层结构的三端磁传感器
公开(公告)号：US07639459B2
公开(公告)日：2009-12-29
申请号：US11032598
申请日：2005-01-10
申请人： Jeffrey R. Childress , Robert E. Fontana, Jr. , Jeffrey S. Lille
发明人： Jeffrey R. Childress , Robert E. Fontana, Jr. , Jeffrey S. Lille
IPC分类号： G11B5/33
CPC分类号： B82Y25/00 , G01R33/093 , G11B5/3903 , G11B5/3932 , H01L29/66984 , H01L43/08
摘要： In one illustrative example, a three terminal magnetic sensor (TTM) suitable for use in a magnetic head has a sensor stack structure which includes a base region, a collector region, and an emitter region. A first barrier layer separates the emitter region from the base region, and a second barrier layer separates the collector region from the base region. A plurality of terminals of the TTM include a base lead coupled to the base region, a collector lead coupled to the collector region, and an emitter lead coupled to the emitter region. Preferably, the base region consists of a free layer structure so as to have a relatively small thickness. A pinned layer structure is made part of the emitter region. An in-stack longitudinal biasing layer (LBL) structure is formed in stack with the sensor stack structure and has a magnetic moment that is parallel to a sensing plane of the TTM for magnetically biasing the free layer structure. The in-stack LBL structure is made part of the collector region which also includes a layer of semiconductor material. In one variation, the emitter region has the in-stack LBL structure and the collector region has the pinned layer structure. The TTM may comprise a spin valve transistor (SVT), a magnetic tunnel transistor (MTT), or a double junction structure.
摘要翻译：在一个说明性示例中，适用于磁头的三端磁传感器（TTM）具有包括基极区域，集电极区域和发射极区域的传感器堆叠结构。第一阻挡层将发射极区域与基极区域分开，并且第二阻挡层将集电极区域与基极区域分离。 TTM的多个端子包括耦合到基极区域的基极引线，耦合到集电极区域的集电极引线和耦合到发射极区域的发射极引线。优选地，基区由自由层结构组成，以便具有相对较小的厚度。被钉扎层结构是发射极区域的一部分。堆叠纵向偏置层（LBL）结构与传感器堆叠结构堆叠形成，并且具有平行于TTM的感测平面的磁矩，用于磁偏置自由层结构。叠层LBL结构是集成区域的一部分，其还包括半导体材料层。在一个变型中，发射极区域具有叠层LBL结构，并且集电极区域具有钉扎层结构。 TTM可以包括自旋阀晶体管（SVT），磁隧道晶体管（MTT）或双结结构。

105. 发明授权

US07635599B2 Three terminal magnetic sensing devices having base lead layers in-plane with collector substrate materials and methods of making the same 失效
标题翻译：具有与集电体基板材料在一起的基极引线层的三端子磁感测装置及其制造方法
公开(公告)号：US07635599B2
公开(公告)日：2009-12-22
申请号：US11239178
申请日：2005-09-29
申请人： Robert E. Fontana, Jr. , Jui-Lung Li , Jeffrey S. Lille , Sergio Nicoletti
发明人： Robert E. Fontana, Jr. , Jui-Lung Li , Jeffrey S. Lille , Sergio Nicoletti
IPC分类号： H01L21/00
CPC分类号： G11B5/398 , B82Y10/00 , B82Y25/00 , G01R33/093 , G11B5/3903 , H01L29/66984
摘要： Three terminal magnetic sensing devices (TTMs) having base lead layers in-plane with collector substrate materials, and methods of making the same, are disclosed. In one illustrative example, a collector substrate having an elevated region and a recessed region adjacent the elevated region is provided. An insulator layer is formed in full-film over the collector substrate, and a base lead layer is formed in full-film over the insulator layer and in-plane with semiconductor materials of the elevated region. The insulator materials and the base lead materials that are formed over the elevated region are removed. A sensor stack structure having an emitter region and a base region is then formed over the elevated region such that part of the base region is formed over an end of the base lead layer. A base conductive via may be formed to contact base lead materials of the base lead layer at a suitable distance away from the sensor stack structure. Advantageously, the base conductive via formation may occur without causing damage to the sensor stack structure. Also, the base lead layer is formed in the recessed region of the collector substrate prior to the formation of the sensor stack structure such that the TTM may be entirely in-situ manufactured. Furthermore, the trackwidth of the TTM may be defined directly by the elevated region of the collector substrate. The TTM is suitable for incorporation into nanoscale devices which increase areal recording densities, therefore aiding the revolution in magnetic storage.
摘要翻译：公开了具有与集电器基板材料在一起的基极引线层的三端子磁感测装置（TTM）及其制造方法。在一个说明性示例中，提供了具有升高区域和与升高区域相邻的凹陷区域的收集器基板。在集电体基板上形成绝缘体层，并且在绝缘体层上形成基极引线层，并且与升高区域的半导体材料在同一平面内形成基极引线层。去除在升高区域上形成的绝缘体材料和基底引线材料。然后在升高的区域上形成具有发射极区域和基极区域的传感器堆叠结构，使得基极区域的一部分形成在基极引线层的一端上。可以形成基底导电通孔，以在离传感器堆叠结构适当的距离处接触基底引线层的基底引线材料。有利地，可以在不会对传感器堆叠结构造成损害的情况下发生基底导电通孔形成。此外，在形成传感器堆叠结构之前，基极引线层形成在集电体基板的凹陷区域中，使得TTM可以完全原位制造。此外，TTM的轨道宽度可以由收集器基板的升高区域直接定义。 TTM适合纳入纳米级器件，增加面积记录密度，从而有助于磁存储的革命。

106. 发明授权

US07621038B2 Method for fabricating a three terminal magnetic sensor for magnetic heads with a semiconductor junction 失效
标题翻译：用于制造具有半导体结的磁头的三端磁传感器的方法
公开(公告)号：US07621038B2
公开(公告)日：2009-11-24
申请号：US12009427
申请日：2008-01-17
申请人： Jeffrey S. Lille
发明人： Jeffrey S. Lille
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/06 , G11B5/3903 , G11B2005/3996 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044
摘要： A method for fabricating a three terminal magnetic (TTM) sensor of a magnetic head according to one embodiment includes fabricating a P-type semiconductor material; fabricating an N-type semiconductor material at an upper surface of a portion of said P-type semiconductor material; fabricating a spin valve structure upon said N-type semiconductor material; engaging a collector lead to said P-type semiconductor material; engaging a base lead to said N-type semiconductor material; and engaging an emitter lead to said spin valve structure.
摘要翻译：根据一个实施例的用于制造磁头的三端磁（TTM）传感器的方法包括制造P型半导体材料; 在所述P型半导体材料的一部分的上表面上制造N型半导体材料; 在所述N型半导体材料上制造自旋阀结构; 将集电体引线接合到所述P型半导体材料; 将基底引线接合到所述N型半导体材料; 并将发射极引线接合到所述自旋阀结构。

107. 发明申请

US20090226760A1 INDUCTIVE WRITE HEAD WITH SLANTED ELECTROPLATED MEMBER AND METHOD FOR PRODUCING THE SAME 有权
标题翻译：带有电镀电极的电感写头及其制造方法
公开(公告)号：US20090226760A1
公开(公告)日：2009-09-10
申请号：US12043381
申请日：2008-03-06
申请人： Christian Rene Bonhote , Jeffrey S. Lille , Scott Arthur MacDonald
发明人： Christian Rene Bonhote , Jeffrey S. Lille , Scott Arthur MacDonald
IPC分类号： G11B5/733 , C25D5/48 , B05D5/12
CPC分类号： G11B5/3116 , C25D5/022 , C25D5/34 , C25D5/48 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T428/11
摘要： A method for forming a tapered, electroplated structure. The method involves forming a first mask structure having an opening. A shrink material is deposited into the opening, such that the thickness of the shrink material is less than the thickness of the first mask structure. The first mask structure and the shrink material are then heated causing the sides of the opening in the mask structure to bulge inward. The shrink material is then removed, and a first electrically conductive material can then be electroplated into the opening to a thickness that is much less than the thickness of the mask. The bulbous shaped of the deformed photoresist mask forms a taper on the first electrically conductive material. The first mask can then be removed and a second electrically conductive material can be electroplated over the first electrically conductive material.
摘要翻译：一种形成锥形电镀结构的方法。该方法包括形成具有开口的第一掩模结构。收缩材料沉积到开口中，使得收缩材料的厚度小于第一掩模结构的厚度。然后加热第一掩模结构和收缩材料，使得掩模结构中的开口的侧面向内凸出。然后去除收缩材料，然后可以将第一导电材料电镀到开口中至比掩模厚度小得多的厚度。变形的光致抗蚀剂掩模的球形形状在第一导电材料上形成锥形。然后可以去除第一掩模，并且可以在第一导电材料上电镀第二导电材料。

108. 发明申请

US20090168258A1 HYBRID, SELF ALIGNED MAGNETIC WRITE HEAD WITH A PARTIALLY PLATED POLE AND METHOD OF PRODUCING SAME 有权
标题翻译：混合自动对准的具有部分电极的磁性写头及其制造方法
公开(公告)号：US20090168258A1
公开(公告)日：2009-07-02
申请号：US11966113
申请日：2007-12-28
申请人： Quang Le , Jeffrey S. Lille , Aron Pentek
发明人： Quang Le , Jeffrey S. Lille , Aron Pentek
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A magnetic write head for perpendicular magnetic recording. The write head has a secondary flare point defined by magnetic structures that extend from the sides of the write pole, but not over the trailing edge of the write pole. The magnetic structures each have a front edge that defines the secondary flare point. By constructing the magnetic structures so that they only extend from the sides of the write pole and not over the write pole, they can be formed by electroplating, while leafing the mask structure (used to define the write pole) still intact, thereby greatly simplifying manufacture and preventing damage to the write pole during manufacture.
摘要翻译：用于垂直磁记录的磁写头。写头具有由磁性结构限定的次级耀斑，其从写入极的侧面延伸，但不在写入极的后缘上方。磁性结构各自具有限定次级耀斑点的前边缘。通过构造磁结构，使得它们仅从写入极的侧面延伸而不是在写入极之上，它们可以通过电镀形成，同时使掩模结构（用于定义写入极）仍然完整，从而大大简化在制造过程中制造和防止对写入极的损坏。

109. 发明申请

US20090154015A1 MAGNETIC WRITE POLE FABRICATION 有权
标题翻译：磁性写字槽制造
公开(公告)号：US20090154015A1
公开(公告)日：2009-06-18
申请号：US11957481
申请日：2007-12-16
申请人： Amanda Baer , Jeffrey S. Lille , Aron Pentek
发明人： Amanda Baer , Jeffrey S. Lille , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.
摘要翻译：描述制造磁性写入极的写入元件和方法。对于一种方法，在写入极的极尖和磁轭的位置的磁性层上形成垂直掩模结构。垂直掩模结构可以通过用原子层沉积（ALD）工艺或类似工艺涂覆抗蚀剂的垂直表面而形成。然后围绕垂直掩模结构执行去除处理以限定磁极尖端和写极的磁轭的一部分，并且去除垂直掩模结构。极尖的下部被掩蔽，而极尖的上部和轭的一部分露出。然后用磁性材料例如电镀工艺使磁极尖端的上部和磁轭的一部分膨胀。

110. 发明授权

US07535676B2 Slider with bonding pads opposite the air bearing surface 失效
标题翻译：带有与空气轴承表面相对的接合垫的滑块
公开(公告)号：US07535676B2
公开(公告)日：2009-05-19
申请号：US10928513
申请日：2004-08-26
申请人： Jeffrey S. Lille
发明人： Jeffrey S. Lille
IPC分类号： G11B5/60 , G11B15/64
CPC分类号： G11B5/6005 , G11B5/102 , G11B5/3169 , G11B5/4853
摘要： A slider having bonding pads opposite an air bearing surface and a method for producing the same is disclosed. Bonding pads are formed on the side of a slider assembly opposite the air bearing surface (ABS) to allow electrical probing devices on the slider while applying pressure to the slider during the lapping process and to allow a flip chip bonding process of the slider to the suspension thereby reducing or eliminating the need to bend wires and attach to the end of the slider body.
摘要翻译：公开了一种具有与空气轴承表面相对的接合垫的滑块及其制造方法。接合垫形成在与空气轴承表面（ABS）相对的滑块组件的侧面上，以允许滑块上的电探测装置，同时在研磨过程中向滑块施加压力，并且允许滑块的倒装芯片接合过程从而减少或消除了将电线弯曲并附接到滑块体的端部的需要。

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