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101. 发明申请

US20050264778A1 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US20050264778A1
公开(公告)日：2005-12-01
申请号：US10857614
申请日：2004-06-01
申请人： Joeri Lof , Erik Bijlaart , Roelof Aeilko Ritsema , Frank Schaik , Timotheus Sengers , Klaus Simon , Joannes De Smit , Arie Den Boef , Hans Butler , Sjoerd Donders , Christiaan Hoogendam , Marcus Van De Kerkhof , Aleksey Kolesnychenko , Mark Kroon , Erik Loopstra , Hendricus Meijer , Jeroen Maria Mertens , Johannes Mulkens , Joost Ottens , Alexander Straaijer , Bob Streefkerk , Helmar Van Santen
发明人： Joeri Lof , Erik Bijlaart , Roelof Aeilko Ritsema , Frank Schaik , Timotheus Sengers , Klaus Simon , Joannes De Smit , Arie Den Boef , Hans Butler , Sjoerd Donders , Christiaan Hoogendam , Marcus Van De Kerkhof , Aleksey Kolesnychenko , Mark Kroon , Erik Loopstra , Hendricus Meijer , Jeroen Maria Mertens , Johannes Mulkens , Joost Ottens , Alexander Straaijer , Bob Streefkerk , Helmar Van Santen
IPC分类号： G03F7/20 , H01L21/027 , G03B27/42
CPC分类号： G03F7/70141 , G03F7/70341 , G03F7/7085 , G03F7/70883
摘要： A lithographic projection apparatus is disclosed in which a space between the projection system and a sensor is filled with a liquid.
摘要翻译：公开了一种光刻投影装置，其中投影系统和传感器之间的空间填充有液体。

102. 发明申请

US20050263068A1 Lithographic apparatus 有权
标题翻译：平版印刷设备
公开(公告)号：US20050263068A1
公开(公告)日：2005-12-01
申请号：US10966110
申请日：2004-10-18
申请人： Christiaan Hoogendam , Bob Streefkerk , Johannes Catharinus Mulkens , Erik Theodorus Bijlaart , Aleksey Kolesnychenko , Erik Loopstra , Jeroen Johannes Sophia Mertens , Bernardus Slaghekke , Patricius Aloysius Tinnemans , Helmar Van Santen
发明人： Christiaan Hoogendam , Bob Streefkerk , Johannes Catharinus Mulkens , Erik Theodorus Bijlaart , Aleksey Kolesnychenko , Erik Loopstra , Jeroen Johannes Sophia Mertens , Bernardus Slaghekke , Patricius Aloysius Tinnemans , Helmar Van Santen
IPC分类号： G03F7/20 , B05C11/00 , G03B27/42 , G03B27/52 , H01L21/00 , H01L21/027
CPC分类号： G03F7/70866 , G03F7/70341 , G03F7/70808
摘要： Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant.
摘要翻译：通过入口将液体供给到投影系统和基板之间的空间。在一个实施例中，溢流区域去除高于给定水平的液体。溢流区域可以布置在入口的上方，因此液体可以不断刷新，并且液体中的压力可能保持基本恒定。

103. 发明授权

US06686689B2 Image display device 失效
标题翻译：图像显示装置
公开(公告)号：US06686689B2
公开(公告)日：2004-02-03
申请号：US09854382
申请日：2001-05-11
申请人： Wouter Roest , Helmar Van Santen
发明人： Wouter Roest , Helmar Van Santen
IPC分类号： H01J162
CPC分类号： G02B6/0038 , G02B6/0023 , G02B6/0053
摘要： An image display device comprising a light modulation panel, an illumination device arranged opposite the light modulation panel and a light source connected to the illumination device. The illumination device comprises at least one separating layer which has at least one flat surface extending parallel to the light modulation panel and a serrated surface situated on a side which faces away from the flat surface. Said serrated surface includes a number of sawtooth-shaped, juxtaposed projections which are each bounded by a first and a second separating surface, the first separating surface enclosing an acute interior angle with the flat surface and the second separating surface enclosing an obtuse interior angle with the flat surface.
摘要翻译：一种图像显示装置，包括光调制面板，与光调制面板相对布置的照明装置和连接到照明装置的光源。所述照明装置包括至少一个分离层，其具有平行于所述光调制面板延伸的至少一个平坦表面和位于远离所述平坦表面的一侧上的锯齿状表面。所述锯齿状表面包括多个锯齿状的并置凸起，每个凸起由第一和第二分隔表面限定，第一分离表面与平坦表面包围锐角内角，第二分离表面包围钝角内角平面。

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