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    • 105. 发明授权
    • Plasma reactor having a symmetric parallel conductor coil antenna
    • 具有对称并联导体线圈天线的等离子体反应器
    • US06893533B2
    • 2005-05-17
    • US10697893
    • 2003-10-29
    • John HollandValentin N. TodorowMichael Barnes
    • John HollandValentin N. TodorowMichael Barnes
    • H01J37/32H05H1/00C23C16/00H01J21/00
    • H01J37/321
    • The invention in one embodiment is realized in a plasma reactor for processing a semiconductor workpiece. The reactor includes a vacuum chamber having a side wall and a ceiling, a workpiece support pedestal within the chamber and generally facing the ceiling, a gas inlet capable of supplying a process gas into the chamber and a solenoidal interleaved parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric helical solenoids of at least nearly uniform lateral displacements from the axis of symmetry, each helical solenoid being offset from the other helical solenoids in a direction parallel to the axis of symmetry. An RF plasma source power supply is connected across each of the plural conductors.
    • 在一个实施例中的本发明在用于处理半导体工件的等离子体反应器中实现。 反应器包括具有侧壁和天花板的真空室,腔室内的工件支撑基座,并且大致面对天花板,能够将工艺气体供应到室中的气体入口和覆盖在天花板上的螺线管交错的并行导体线圈天线 并且包括缠绕在大致垂直于天花板的相应同心螺旋螺线管中的对称轴线的第一多个导体,其具有来自对称轴线的至少几乎均匀的横向位移,每个螺旋螺线管在与另一个螺旋螺线管平行的方向上偏离 对称轴。 RF等离子体源电源连接在多个导体中的每一个上。
    • 110. 发明授权
    • Hybrid sphygmomanometer
    • 混合血压计
    • US06168567A
    • 2001-01-02
    • US09275595
    • 1999-03-24
    • Thomas G. PickeringJohn HollandWilliam PickeringStephen Nicholas Weiss
    • Thomas G. PickeringJohn HollandWilliam PickeringStephen Nicholas Weiss
    • A61B500
    • A61B5/0225A61B5/02208A61B5/023A61B5/742
    • A hybrid sphygmomanometer comprises: (a) an arm cuff with an inflatable air bladder; (b) a pumping device for inflating the air bladder; (c) a manually controlled air outlet valve for deflating the air bladder; (d) an air pressure transducer operative to receive the pressure in the air bladder of the arm cuff and to produce an electrical signal representing this pressure; (e) a manually operated switch for generating systolic and diastolic interrupt signals; (f) a first electronic display for displaying the instantaneous pressure in the air bladder in the form of a bar graph; (g) a second electronic display for displaying systolic and diastolic pressures; and (h) an electrical circuit connected to the pressure transducer and to the button for controlling said first and second display. The first display, for displaying the instantaneous pressure in the air bladder, is a simulated mercury column. The electrical circuit provides an output of digital signals, representing the systolic and diastolic pressures, for use by a programmed digital computer for storage and processing. It also provides an output of manually or digitally entered patient identification data.
    • 混合血压计包括:(a)具有可充气气囊的臂箍;(b)用于使气囊膨胀的泵送装置;(c)用于使气囊膨胀的手动控制的空气出口阀;(d)空气压力 传感器,用于接收臂箍的气囊中的压力并产生表示该压力的电信号;(e)用于产生收缩和舒张中断信号的手动操作的开关;(f)第一电子显示器,用于显示瞬时 空气囊中的压力以条形图形式;(g)用于显示收缩压和舒张压的第二电子显示器; 和(h)连接到压力传感器和按钮的电路,用于控制所述第一和第二显示器。用于显示气囊中的瞬时压力的第一显示器是模拟的汞柱。 电路提供数字信号的输出,代表收缩压和舒张压,供编程数字计算机用于存储和处理。 它还提供手动或数字输入的患者识别数据的输出。