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    • 91. 发明授权
    • Boron phosphide-based semiconductor light-emitting device and production method thereof
    • 硼化磷系半导体发光元件及其制造方法
    • US07488987B2
    • 2009-02-10
    • US12040107
    • 2008-02-29
    • Takashi Udagawa
    • Takashi Udagawa
    • H01L21/00
    • H01L33/38H01L21/02381H01L21/02458H01L21/02461H01L21/0254H01L21/02543H01L21/02576H01L21/02579H01L21/0262H01L21/28575H01L33/145H01L33/16H01L33/30
    • A boron phosphide-based semiconductor light-emitting device, comprising: a crystalline substrate; a first semiconductor layer formed on said crystalline substrate, said first semiconductor layer including a light-emitting layer, serving as a base layer and having a first region and a second region different from the first region; a boron phosphide-based semiconductor amorphous layer formed on said first region of said first semiconductor layer, said boron phosphide-based semiconductor amorphous layer including a high-resistance boron phosphide-based semiconductor amorphous layer or a first boron phosphide-based semiconductor amorphous layer having a conduction type opposite to that of said first semiconductor layer; a pad electrode formed on said high-resistance or opposite conductivity-type boron phosphide-based semiconductor amorphous layer for establishing wire bonding; and a conductive boron phosphide-based crystalline layer formed on said second region of said first semiconductor layer, said conductive boron phosphide-based crystalline layer extending optionally to a portion of said boron phosphide-based semiconductor amorphous layer, wherein said pad electrode is in contact with said boron phosphide-based semiconductor crystalline layer at a portion of said pad electrode above the bottom of said pad electrode.
    • 一种磷化硼基半导体发光器件,包括:晶体衬底; 形成在所述结晶基板上的第一半导体层,所述第一半导体层包括用作基底层并具有不同于所述第一区域的第一区域和第二区域的发光层; 形成在所述第一半导体层的所述第一区域上的磷化硅基半导体非晶层,所述磷化磷基半导体非晶层包括高电阻磷化硼基半导体非晶层或第一磷化硼基半导体非晶层, 与所述第一半导体层相反的导电类型; 形成在所述高电阻或相反导电型磷化硅基半导体非晶层上的焊盘电极,用于建立引线键合; 以及形成在所述第一半导体层的所述第二区域上的导电磷化硼基晶体层,所述导电磷化硼基晶体层任选地延伸到所述磷化硼基半导体非晶层的一部分,其中所述焊盘电极接触 所述磷化硅基半导体晶体层在所述焊盘电极的位于所述焊盘电极的底部之上的部分处。
    • 92. 发明授权
    • High power-low noise microwave GaN heterojunction field effect transistor
    • 高功率低噪声微波GaN异质结场效应晶体管
    • US07470941B2
    • 2008-12-30
    • US10313374
    • 2002-12-06
    • Miroslav MicovicMike AntcliffeTahir HussainPaul Hashimoto
    • Miroslav MicovicMike AntcliffeTahir HussainPaul Hashimoto
    • H01L31/0328
    • H01L29/66462H01L21/28575H01L21/28581H01L21/28587H01L29/2003H01L29/7787
    • A method for fabricating heterojunction field effect transistors (HFET) and a family of HFET layer structures are presented. In the method, a step of depositing a HFET semiconductor structure onto a substrate is performed. Next, a photoresist material is deposited. Portions of the photoresist material are removed corresponding to source and drain pad pairs. A metal layer is deposited onto the structure, forming source pad and drain pad pairs. The photoresist material is removed, exposing the structure in areas other than the source and drain pad pairs. Each source and drain pad pair has a corresponding exposed area. The structure is annealed and devices are electrically isolated. The exposed area of each device is etched to form a gate recess and a gate structure is formed in the recess. Semiconductor layer structures for GaN/AlGaN HFETs are also presented.
    • 提出了一种用于制造异质结场效应晶体管(HFET)和一系列HFET层结构的方法。 在该方法中,执行将HFET半导体结构沉积到衬底上的步骤。 接下来,沉积光致抗蚀剂材料。 对应于源极和漏极焊盘对,去除部分光致抗蚀剂材料。 金属层沉积在结构上,形成源极焊盘和漏极焊盘对。 去除光致抗蚀剂材料,将其暴露于不同于源极和漏极焊盘对的区域中。 每个源极和漏极焊盘对具有相应的曝光区域。 该结构进行退火,并且器件是电隔离的。 蚀刻每个器件的暴露面积以形成栅极凹部,并且在凹部中形成栅极结构。 还提出了用于GaN / AlGaN HFET的半导体层结构。
    • 96. 发明申请
    • BORON PHOSPHIDE-BASED SEMICONDUCTOR LIGHT-EMITTING DEVICE AND PRODUCTION METHOD THEREOF
    • 基于磷光体的半导体发光器件及其生产方法
    • US20080157079A1
    • 2008-07-03
    • US12040107
    • 2008-02-29
    • Takashi UDAGAWA
    • Takashi UDAGAWA
    • H01L33/00
    • H01L33/38H01L21/02381H01L21/02458H01L21/02461H01L21/0254H01L21/02543H01L21/02576H01L21/02579H01L21/0262H01L21/28575H01L33/145H01L33/16H01L33/30
    • A boron phosphide-based semiconductor light-emitting device, comprising: a crystalline substrate; a first semiconductor layer formed on said crystalline substrate, said first semiconductor layer including a light-emitting layer, serving as a base layer and having a first region and a second region different from the first region; a boron phosphide-based semiconductor amorphous layer formed on said first region of said first semiconductor layer, said boron phosphide-based semiconductor amorphous layer including a high-resistance boron phosphide-based semiconductor amorphous layer or a first boron phosphide-based semiconductor amorphous layer having a conduction type opposite to that of said first semiconductor layer; a pad electrode formed on said high-resistance or opposite conductivity-type boron phosphide-based semiconductor amorphous layer for establishing wire bonding; and a conductive boron phosphide-based crystalline layer formed on said second region of said first semiconductor layer, said conductive boron phosphide-based crystalline layer extending optionally to a portion of said boron phosphide-based semiconductor amorphous layer, wherein said pad electrode is in contact with said boron phosphide-based semiconductor crystalline layer at a portion of said pad electrode above the bottom of said pad electrode.
    • 一种磷化硼基半导体发光器件,包括:晶体衬底; 形成在所述结晶基板上的第一半导体层,所述第一半导体层包括用作基底层并具有不同于所述第一区域的第一区域和第二区域的发光层; 形成在所述第一半导体层的所述第一区域上的磷化硅基半导体非晶层,所述磷化磷基半导体非晶层包括高电阻磷化硼基半导体非晶层或第一磷化硼基半导体非晶层, 与所述第一半导体层相反的导电类型; 形成在所述高电阻或相反导电型磷化硅基半导体非晶层上的焊盘电极,用于建立引线键合; 以及形成在所述第一半导体层的所述第二区域上的导电磷化硼基晶体层,所述导电磷化硼基晶体层任选地延伸到所述磷化硼基半导体非晶层的一部分,其中所述焊盘电极接触 所述磷化硅基半导体晶体层在所述焊盘电极的位于所述焊盘电极的底部之上的部分处。
    • 98. 发明申请
    • Gallium nitride-based compound semiconductor light-emitting device and negative electrode thereof
    • 氮化镓系化合物半导体发光元件及其负极
    • US20070108458A1
    • 2007-05-17
    • US10581751
    • 2004-12-08
    • Koji Kamei
    • Koji Kamei
    • H01L33/00
    • H01L21/28575H01L33/32H01L33/40
    • An object of the present invention is to provide a negative electrode which attains excellent Ohmic contact with an n-type gallium nitride-based compound semiconductor layer and which resists deterioration in characteristics which would be caused by heating. Another object of the invention is to provide a gallium nitride-based compound semiconductor light-emitting device having the negative electrode. The inventive gallium nitride-based compound semiconductor light-emitting device comprises an n-type semiconductor layer of a gallium nitride-based compound semiconductor, a light-emitting layer of a gallium nitride-based compound semiconductor and a p-type semiconductor layer of a gallium nitride-based compound semiconductor formed on a substrate in this order, and has a negative electrode and a positive electrode provided on the n-type semiconductor layer and the p-type semiconductor layer, respectively; wherein the negative electrode comprises a bonding pad layer and a contact metal layer which is in contact with the n-type semiconductor layer, and the contact metal layer is composed of Cr or a Cr alloy and formed through sputtering.
    • 本发明的目的是提供一种与n型氮化镓系化合物半导体层进行优异的欧姆接触的负极,能够抵抗由加热引起的特性劣化。 本发明的另一个目的是提供一种具有负极的氮化镓基化合物半导体发光器件。 本发明的氮化镓系化合物半导体发光元件包括氮化镓系化合物半导体的n型半导体层,氮化镓类化合物半导体的发光层和p型半导体层 氮化镓基化合物半导体依次形成在基板上,分别具有设置在n型半导体层和p型半导体层上的负极和正极; 其中所述负极包括接合焊盘层和与所述n型半导体层接触的接触金属层,并且所述接触金属层由Cr或Cr合金构成并通过溅射形成。