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    • 94. 发明授权
    • Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus
    • 用于真空沉积设备的组件和其真空沉积设备,以及目标设备
    • US06855236B2
    • 2005-02-15
    • US09926041
    • 2000-12-28
    • Michio SatoTakashi NakamuraYoichiro Yabe
    • Michio SatoTakashi NakamuraYoichiro Yabe
    • C23C4/00C23C4/02C23C4/08C23C4/18C23C14/56C23C16/44C23C16/00C23C14/34
    • H01J37/32477C23C4/00C23C4/02C23C4/08C23C4/18C23C14/564C23C16/4404H01J37/32559
    • A component for a vacuum deposition apparatus comprises a component body and a spray deposit formed on a surface of a component body. A spray deposit has surface roughness in which a mean spacing S of tops of local peak of profile is in the range from 50 to 150 μm, and distances to a bottom of profile valley line Rv and to a top of profile peak line are in the ranges from 20 to 70 μm, respectively. Furthermore, a spray deposit has a low hardness coat selected from an Al base spray deposit of Hv 30 (Vickers hardness) or less, a Cu base spray deposit of Hv 100 or less, a Ni base spray deposit of Hv 200 or less, a Ti base spray deposit of Hv 300 or less, a Mo base spray deposit of Hv 300 or less and a W base spray deposit of Hv 500 or less. Such component for a vacuum deposition apparatus may suppress, with stability and effectiveness, peeling of deposition material adhering on a component during deposition. In addition, the number of apparatus cleaning and of exchange of components may be largely reduced. A target comprises a similar spray deposit. A vacuum deposition apparatus is one in which above component for a vacuum deposition apparatus is applied in a holder of a sample to be deposited, a deposition material source holder, a preventive component and so on.
    • 用于真空沉积设备的部件包括在组件主体的表面上形成的组件体和喷涂层。 喷雾沉积物具有表面粗糙度,其中局部峰的峰顶的平均间隔S在50至150μm的范围内,并且轮廓谷线Rv的底部和轮廓峰线的顶部的距离在 分别为20至70毫米。 此外,喷雾沉积物具有低硬度涂层,其选自Hv 30(维氏硬度)以下的Al基底喷雾沉积物,Hv 100以下的Cu基喷雾沉积物,Hv为200以下的Ni基喷雾沉积物,Hv为200以下的Ni基喷雾沉积物 Hv 300以下的Ti基喷雾沉积物,Hv 300以下的Mo基喷雾沉积物和Hv 500以下的W基喷雾沉积物。 用于真空沉积装置的这种部件可以在沉积期间抑制附着在部件上的沉积材料的稳定性和有效性。 此外,可以大大减少设备清洁和部件更换的次数。 目标包括类似的喷雾沉积物。 真空沉积装置是将上述用于真空沉积装置的部件应用于待沉积样品的保持器,沉积材料源保持器,预防部件等的真空沉积装置。
    • 96. 发明申请
    • Sliding member and method for manufacture thereof
    • 滑动构件及其制造方法
    • US20040191110A1
    • 2004-09-30
    • US10480653
    • 2003-12-29
    • Kazuyuki NakanishiHideo TachikawaHiroyuki MoriTadashi Oshima
    • C22C038/12
    • F16H57/041B22F7/08B22F2999/00C23C4/04C23C4/06C23C4/08C23C4/12C23C8/02C23C24/08F16C33/06F16C33/12F16C2204/20F16C2204/60B22F3/115
    • The object of the present invention is to provide a sliding member which sustains lubricating characteristics given to the sliding surface over a long period of time to maintain the low friction coefficient and durability. A sliding member including a superficial portion forming a sliding surface, at least the superficial portion including an oxygen-containing alloy (an iron alloy, an aluminum alloy or a copper alloy) containing: at least one metallic element selected from the group consisting of molybdenum and tungsten in an amount of from 2 to 80% by weight; and oxygen in an amount of from 0.5 to 15% by weight. Since the sliding material of the present invention forms an oxygen-containing alloy including molybdenum or tungsten in the sliding surface, the molybdenum or tungsten becomes sulfide by way of oxides to form a solid lubricant when organic molybdenum compounds or sulfur-feeding components are included in lubricating oils. Since the solid lubricant is fastened on the surface of the sliding material, the extent of consumption is less, the friction reduction effect is shown maximally, and the friction coefficient is reduced so that it is possible to maintain the low abrasion resistance, anti-seizurability and anti-wearability of sliding members over a long period of time. The present sliding member can be applied to a variety of machinery and the like such as internal combustion engines like automobile engines, gears and automatic transmissions which are used together with lubricating oils.
    • 本发明的目的是提供一种能够长时间地保持滑动面的润滑特性以保持低摩擦系数和耐久性的滑动构件。 一种包括形成滑动表面的表面部分的滑动构件,至少包括含氧合金(铁合金,铝合金或铜合金)的表面部分,其包含:至少一种选自钼 和钨的量为2-80重量%; 和氧浓度为0.5〜15重量%。 由于本发明的滑动材料在滑动表面形成包含钼或钨的含氧合金,所以当有机钼化合物或含硫组分包括在其中时,钼或钨通过氧化物形成硫化物以形成固体润滑剂 润滑油。 由于将固体润滑剂固定在滑动材料的表面上,所以消耗的程度较小,摩擦减小效果最大化,摩擦系数降低,从而可以保持低的耐磨性,抗咬合性 和滑动构件的长时间耐磨性。 本滑动构件可以应用于与润滑油一起使用的诸如汽车发动机,齿轮和自动变速器的内燃机等各种机械等。