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    • 91. 发明申请
    • INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
    • 用于与基底容器存储系统接口的集成系统
    • US20150063958A1
    • 2015-03-05
    • US14537696
    • 2014-11-10
    • Brooks Automation, Inc.
    • Anthony C. BonoraRichard H. GouldMichael Krolak
    • H01L21/677
    • H01L21/67766B65G2201/0297H01L21/67733H01L21/67736H01L21/67769H01L21/67775Y10S414/14
    • A storage system and methods for operating a storage system are disclosed. The storage system includes a plurality of storage shelves, and each of storage shelves has a shelf plate for supporting a container. Each of the storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain. The rail has some sections that are linear and some sections that are nonlinear. The sections are arranged in a loop. Example configurations of the storage system include one or more of stationary shelves, extended horizontal tracks for a hoist, a conveyor at a level of the storage system, and a manual loading station. The hoist, with an extended horizontal track interfaces with the manual loading station.
    • 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括多个存放架,每个储物架具有用于支撑容器的搁板。 每个储物架被联接到链条以实现水平移动,并且每个都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮。 轨道有一些部分是线性的,有些部分是非线性的。 这些部分排列成一个循环。 存储系统的示例配置包括一个或多个固定架,用于提升机的延伸的水平轨道,存储系统的一级的输送机以及手动装载站。 起重机,带有手动加载站的扩展水平轨道。
    • 92. 发明申请
    • CONVEYANCE SYSTEM
    • 输送系统
    • US20150045937A1
    • 2015-02-12
    • US14390420
    • 2013-03-07
    • MURATA MACHINERY, LTD.
    • Makoto Yamamoto
    • B65G1/04G05B19/418
    • B65G1/0421B65G1/04B65G1/137B65G2201/0297G05B19/418G05B2219/45031H01L21/67294H01L21/67769
    • A conveyance system includes storage racks that are provided near or adjacent to semiconductor manufacturing devices and store therein objects to be conveyed, a stacker crane that carries the objects into and out of the storage racks, vehicles that convey the objects, an ID tag reader that is provided to the stacker crane and reads ID tags of the objects; and a controller that is configured or programmed to, when identification information acquired by the ID tag reader R coincides with identification information contained in a conveyance command of an object, control the stacker crane to convey the object to a destination specified in the conveyance command. At least one section of each storage rack allows a gripper of each vehicle to take in and out the objects.
    • 输送系统包括设置在半导体制造装置附近或邻近半导体制造装置并存储在其中的物品的存储架,将物体进出存储架的堆垛起重机,传送物体的车辆,ID标签读取器 被提供给堆垛机并且读取对象的ID标签; 以及控制器,其被构造或编程为当由ID标签读取器R获取的识别信息与包含在物体的传送命令中的识别信息一致时,控制堆垛机将物体传送到在传送命令中指定的目的地。 每个存储架的至少一个部分允许每个车辆的夹具进出物体。
    • 93. 发明申请
    • SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
    • 半导体波浪处理和运输
    • US20140271083A1
    • 2014-09-18
    • US14353153
    • 2012-10-26
    • Brooks Automation, Inc.
    • Robert T. Caveney
    • B65G47/90
    • B65G47/901B65G2201/0297H01L21/67173H01L21/67178H01L21/67184H01L21/67196H01L21/67715H01L21/67733
    • A substrate processing system including at least two vertically stacked transport chambers, each of the vertically stacked transport chambers including a plurality of openings arranged to form vertical stacks of openings configured for coupling to vertically stacked process modules, at least one of the vertically stacked transport chambers includes at least one transport chamber module arranged for coupling to another transport chamber module to form a linear transport chamber and another of the at least two stacked transport chambers including at least one transport chamber module arranged for coupling to another transport chamber module to form another linear transport chamber, and a transport robot disposed in each of the transport chamber modules, where a joint of the transport robot is locationally fixed along a linear path formed by the respective linear transport chamber.
    • 一种衬底处理系统,包括至少两个垂直堆叠的传送室,每个垂直堆叠的传送室包括多个开口,所述多个开口被布置成形成垂直堆叠的开口,其被构造成用于联接到垂直堆叠的处理模块,垂直堆叠的传送室 包括至少一个传送室模块,其布置成联接到另一传送室模块以形成线性传送室,并且所述至少两个堆叠传送室中的另一个包括至少一个传送室模块,所述至少一个传送室模块被布置成联接到另一传送室模块以形成另一个线性传输室 传送室,以及设置在每个传送室模块中的传送机器人,其中传送机器人的接头沿着由各个线性传送室形成的线性路径位置地固定。
    • 95. 发明授权
    • Side buffer for a transport vehicle that travels along the ceiling, and transport vehicle system
    • 用于沿天花板行驶的运输车辆的侧缓冲器,以及运输车辆系统
    • US08550006B2
    • 2013-10-08
    • US13637914
    • 2010-04-02
    • Eiji Wada
    • Eiji Wada
    • B61B3/00
    • H01L21/67766B65G2201/0297H01L21/67775
    • A side buffer includes a bottom portion on which a FOUP may be placed, a restriction portion, an article receiving portion, and a link portion. The restriction portion is movable between a restricting position and a retracted position. At the restricting position, the restriction portion restricts an inclination of the FOUP on the bottom portion. At the retracted position, the restriction portion allows the FOUP to move between the bottom portion and a position directly above the bottom portion. The article receiving portion is disposed so as to receive a force from the FOUP placed on the bottom portion. The link portion moves the restriction portion from the retracted position to the restricting position with the received force.
    • 侧缓冲器包括可以放置FOUP的底部,限制部分,物品接收部分和连杆部分。 限制部分可在限制位置和缩回位置之间移动。 在限制位置,限制部分限制FOUP在底部上的倾斜。 在缩回位置,限制部分允许FOUP在底部和底部正上方的位置之间移动。 物品接收部分设置成接收来自放置在底部上的FOUP的力。 连杆部分用接收的力将限制部分从缩回位置移动到限制位置。
    • 96. 发明申请
    • Article Transport Facility
    • 文章运输设施
    • US20130213755A1
    • 2013-08-22
    • US13817676
    • 2011-06-17
    • Suguru ShibataDaisuke OgawaYukio Iizuka
    • Suguru ShibataDaisuke OgawaYukio Iizuka
    • B61J1/06
    • B61J1/06B61B3/02B65G2201/0297
    • An article transport facility in which driving electric power can be supplied from an electricity supply line to an article transport vehicle so that it can travel through a crossing portion properly regardless of whether it is traveling along a first path or a second path. The switching device of the article transport facility is configured to switch a position change rail to a first position and a second position. The electricity supply line is supported by a first travel rail such that electric power can be supplied to the article transport vehicle traveling along the first travel rail and along the position change rail in the first position and is supported by the second travel rail such that electric power can be supplied to the article transport vehicle traveling along the second travel rail and along the position change rail in the second position.
    • 一种物品输送设备,其中驱动电力可以从供电线路供应到物品输送车辆,使得其可以适当地行进通过交叉部分,而不管其是沿着第一路径还是第二路径行进。 物品输送设备的切换装置被配置为将位置变换轨道切换到第一位置和第二位置。 供电线由第一行进轨道支撑,使得能够沿着第一行驶轨道沿着位置变换轨道沿着第一位置行驶的物品输送车辆供给电力,并且由第二行驶轨道支撑,使得电力 可以将动力供给到沿着第二行驶轨道行驶的物品输送车辆,并且沿第二位置的位置变换轨道供给。
    • 97. 发明申请
    • Article Transport Facility
    • 文章运输设施
    • US20130202392A1
    • 2013-08-08
    • US13568439
    • 2012-08-07
    • Yuichi MORIMOTOTakeshi CHUMA
    • Yuichi MORIMOTOTakeshi CHUMA
    • B65G1/04
    • B65G1/0457B65G1/0407B65G2201/0297H01L21/67733H01L21/67769
    • An article transport facility includes a first transport conveyer for transporting an article between a first transfer position outside the article storage and a position inside the article storage, and a second transport conveyer for transporting an article between a second transfer position outside the article storage and a position inside the article storage. An article transport vehicle is configured to be capable of transferring an article to or from one of the first transfer position and the second transfer position by vertically moving a grip portion with the article transport vehicle stopped at a transfer stop position in a path defined by a travel rail and is configured to be capable of transferring an article to or from the other of the first transfer position and the second transfer position by slidingly moving the grip portion with the article transport vehicle stopped at the transfer stop position.
    • 物品输送设备包括用于在物品储存器外部的第一转移位置和物品存储器之间的位置之间输送物品的第一输送输送器和用于在物品存储器外部的第二转移位置和第二输送位置之间输送物品的第二输送输送器 文章存放位置。 物品输送车辆被构造成能够通过在由物品运输车辆停止在转移停止位置的方向上垂直移动手柄部分而将物品运送到第一转移位置和第二转移位置中的一个, 行驶轨道,并且被构造成能够通过在停止在转移停止位置处的物品输送车辆滑动地移动抓握部分而将物品传送到第一转印位置和第二转印位置中的另一个转移位置和第二转印位置。
    • 98. 发明申请
    • CONVEYANCE SYSTEM AND METHOD OF COMMUNICATION IN CONVEYANCE SYSTEM
    • 输送系统及其输送方法
    • US20130079920A1
    • 2013-03-28
    • US13702324
    • 2010-06-10
    • Mitsuya Tokumoto
    • Mitsuya Tokumoto
    • G06F17/00
    • G06F17/00B65G2201/0297H01L21/67196H01L21/67201H01L21/67276H01L21/677H01L21/6773H01L21/67736H01L21/67769
    • An automated warehouse is attachable and detachable to a processing equipment without requiring an operation to change wiring of a first controller when attaching and detaching the automated warehouse. The automated warehouse is attachable and detachable in front of the apparatus including a first loading port and a first controller, the automated warehouse including a second loading port to transfer an article between a transfer vehicle and a second controller. A communication terminal disposed within a range allowing communication with the transfer vehicle for an article, and a communication apparatus connected with the communication terminal are provided. The communication apparatus includes a switch that switches a connection destination of the first controller between the second controller and the communication terminal.
    • 自动化仓库可附接到可处理设备并可拆卸,而不需要在安装和拆卸自动化仓库时更换第一控制器的接线。 该自动化仓库可在装置的前面附接和拆卸,包括第一装载端口和第一控制器,该自动化仓库包括用于在搬送车辆和第二控制器之间传送物品的第二装载端口。 设置在允许与物品的转移车辆通信的范围内的通信终端,以及与通信终端连接的通信装置。 通信装置包括在第二控制器和通信终端之间切换第一控制器的连接目的地的交换机。
    • 99. 发明授权
    • Article processing facility and its control method
    • 文章处理设施及其控制方法
    • US08374719B2
    • 2013-02-12
    • US12041936
    • 2008-03-04
    • Yoshitaka Inui
    • Yoshitaka Inui
    • B65G43/00
    • B61B3/02B65G37/02B65G2201/0297H01L21/67276H01L21/67769H01L21/67775
    • An article processing facility includes an article carrier movable along a track and having an article gripper, and a pair of article racks for temporarily supporting articles. Each of the article racks is configured to be shiftable between an extended position and a retracted position. When an article for loading gripped by the article gripper is to be delivered to an article loading and unloading station but an article for unloading is present at the article loading and unloading station, the article for loading is stored temporarily on one of the article racks, and thereafter the article for unloading at the article loading and unloading station is temporarily stored on the other article rack.
    • 物品处理设备包括可沿轨道移动并具有物品夹持器的物品托架和用于临时支撑物品的一对物品架。 每个物品架被构造成在延伸位置和缩回位置之间可移动。 当由物品夹持器夹持的装载物品被运送到物品装卸站时,在物品装卸站处存在用于卸载的物品,用于装载的物品临时存储在物品架之一上, 此后,在物品装卸站卸载的物品临时存储在另一物品架上。