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    • 91. 发明授权
    • Micromachined optical switching devices
    • 微加工光开关器件
    • US06445840B1
    • 2002-09-03
    • US09483269
    • 2000-01-13
    • Marc FernandezAnis HusainLi Fan
    • Marc FernandezAnis HusainLi Fan
    • G02B635
    • G02B6/3514G02B6/352G02B6/3546G02B6/357G02B6/3576G02B26/0833G02B26/085H04Q11/0005H04Q2011/0026H04Q2011/003H04Q2011/0039H04Q2011/0049
    • Various 3-port and 4-port micromachined optomechanical matrix switches are disclosed herein. In accordance with one aspect of the invention there is provided an optomechanical matrix switch including a substrate and a first plurality of optomechanical switching cells coupled thereto. Each of the first plurality of optomechanical switching cells is arranged to be in optical alignment with a first input port. A second plurality of optomechanical switching cells is also coupled to the substrate, each of the second plurality of optomechanical switching cells being in optical alignment with a second input port. In another aspect of the present invention an optomechanical matrix switch is provided which includes a substrate and a first plurality of optomechanical switching cells coupled thereto. Each of the first plurality of optomechanical switching cells is placed in optical alignment with one of a corresponding first plurality of input ports and with one of a corresponding first plurality of output ports. The matrix switch further includes a second plurality of optomechanical switching cells coupled to the substrate. Each of the second plurality of optomechanical switching cells is placed in optical alignment with one of a corresponding second plurality input ports and with one of a corresponding second plurality of output ports.
    • 本文公开了各种3端口和4端口微加工机电矩阵开关。 根据本发明的一个方面,提供了一种包括基板和耦合到其上的第一多个光机械切换单元的光机械矩阵开关。 第一多个光学机械转换单元中的每一个被布置成与第一输入端口光学对准。 第二组多个光机械转换单元也耦合到基板,第二多个光机械切换单元中的每一个与第二输入端口对准。 在本发明的另一方面,提供了一种光机械矩阵开关,其包括基板和耦合到其上的第一多个光机械切换单元。 第一组多个光机械切换单元中的每一个被放置成与对应的第一多个输入端口中的一个和相应的第一多个输出端口中的一个对准。 矩阵开关还包括耦合到衬底的第二多个光机械转换单元。 第二组多个光学机械式开关单元中的每一个被放置成与相应的第二多个输入端口中的一个和相应的第二多个输出端口中的一个对准。