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91. 发明授权

US07014986B2 Writing device and writing method 有权
公开(公告)号：US07014986B2
公开(公告)日：2006-03-21
申请号：US10455403
申请日：2003-06-06
申请人： Mitsuru Sawano , Yoji Okazaki , Kazuhiko Nagano , Hiromi Ishikawa , Takeshi Fujii
发明人： Mitsuru Sawano , Yoji Okazaki , Kazuhiko Nagano , Hiromi Ishikawa , Takeshi Fujii
IPC分类号： B41J21/447
CPC分类号： H05K3/0079 , G03F7/16 , G03F7/2035 , G03F7/70275 , G03F7/70291 , H05K3/0023 , H05K3/0082 , H05K3/0091 , H05K3/064 , H05K3/125 , H05K3/4664 , H05K2203/013
摘要： A writing device is provided which, in simple processes, can write in two dimensions and three dimensions, and which can form highly accurate patterns. An exposure head, a conductive material discharging head, and an insulating material discharging head are disposed at one scanning stage. At the one scanning stage, a pattern can be formed on a printed board which is on the scanning stage. As a result, processes can be simplified, time between patternings can be shortened, and pattern formation can be made to be faster. Moreover, positional offset of the exposure head and the discharging heads with respect to the printed board does not arise. Thus, it is easy to increase a density of a pattern, and a highly accurate pattern is formed.

92. 发明申请

US20050281516A1 Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method 审中-公开
公开(公告)号：US20050281516A1
公开(公告)日：2005-12-22
申请号：US11195593
申请日：2005-08-03
申请人： Yoji Okazaki , Hiromi Ishikawa , Kazuhiko Nagano , Takeshi Fujii , Hiromitsu Yamakawa
发明人： Yoji Okazaki , Hiromi Ishikawa , Kazuhiko Nagano , Takeshi Fujii , Hiromitsu Yamakawa
IPC分类号： G02B6/04 , G02B6/08 , G02B6/255 , G02B6/26 , G02B6/42 , H01S3/067 , H01S3/30
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.

93. 发明授权

US06960035B2 Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method 失效
公开(公告)号：US06960035B2
公开(公告)日：2005-11-01
申请号：US10409675
申请日：2003-04-09
申请人： Yoji Okazaki , Hiromi Ishikawa , Kazuhiko Nagano , Takeshi Fujii , Hiromitsu Yamakawa
发明人： Yoji Okazaki , Hiromi Ishikawa , Kazuhiko Nagano , Takeshi Fujii , Hiromitsu Yamakawa
IPC分类号： G02B6/04 , G02B6/08 , G02B6/255 , G02B6/26 , G02B6/42 , H01S3/067 , H01S3/30
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.

94. 发明申请

US20050206866A1 Exposure method and exposure system 失效
标题翻译：曝光方法和曝光系统
公开(公告)号：US20050206866A1
公开(公告)日：2005-09-22
申请号：US11020574
申请日：2004-12-27
申请人： Takao Ozaki , Takayuki Uemura , Yoji Okazaki , Norihisa Takada , Yuji Shimoyama , Daisuke Nakaya , Katsuto Sumi , Morimasa Sato , Mitsutoshi Tanaka
发明人： Takao Ozaki , Takayuki Uemura , Yoji Okazaki , Norihisa Takada , Yuji Shimoyama , Daisuke Nakaya , Katsuto Sumi , Morimasa Sato , Mitsutoshi Tanaka
IPC分类号： G02F1/13 , G02F1/136 , G03B27/42 , G03F7/20
CPC分类号： G03F7/70283 , G03F7/70291 , G03F7/70791
摘要： Light modulated by a spatial light modulator is projected onto photosensitive material and the photosensitive material is exposed to light in a predetermined pattern. The action of the spatial light modulator is controlled so that the amount of the light projected onto the photosensitive material is changed in at least two stages according to the part of the photosensitive material.
摘要翻译：由空间光调制器调制的光被投影到感光材料上，感光材料以预定图案曝光。控制空间光调制器的作用，使得投射到感光材料上的光的量根据感光材料的一部分至少改变两个阶段。

95. 发明申请

US20050175302A1 Exposure head, exposure apparatus, and application thereof 有权
标题翻译：曝光头，曝光装置及其应用
公开(公告)号：US20050175302A1
公开(公告)日：2005-08-11
申请号：US11104598
申请日：2005-04-13
申请人： Hiromi Ishikawa , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromitsu Yamakawa
发明人： Hiromi Ishikawa , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromitsu Yamakawa
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191 , G02B6/04
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is described, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
摘要翻译：在本发明的曝光装置中，对于空间光调制器，利用根据曝光信息生成的控制信号来控制少于像素部分总数的多个像素部分中的每一个。即，在不控制基板上的整个像素部分的情况下，控制像素部分的一部分。因此，描述像素部分中的像素数量，并且控制信号的传送时间变短。这使得能够增加激光束的调制速度并执行高速曝光。其中激光束并入并撞击在光纤上的并入的激光光源优于激光装置。通过采用所结合的激光光源，可以获得高亮度和高输出，并且优选空间光调制器的曝光。由于光纤阵列是由少数光纤获得的，所以成本低成本由于光纤数量少，所以在配置光纤时，发光区域进一步降低。

96. 发明申请

US20050100074A1 Laser apparatus in which GaN-based compound surface-emitting semiconductor element is excited with GaN-based compound semiconductor laser element 审中-公开
标题翻译： GaN基化合物表面发射半导体元件被GaN基化合物半导体激光元件激发的激光装置
公开(公告)号：US20050100074A1
公开(公告)日：2005-05-12
申请号：US10942975
申请日：2004-09-17
申请人： Yoji Okazaki , Toshiaki Fukunaga
发明人： Yoji Okazaki , Toshiaki Fukunaga
IPC分类号： H01S3/00 , H01S3/091 , H01S5/00 , H01S5/02 , H01S5/024 , H01S5/028 , H01S5/04 , H01S5/14 , H01S5/183 , H01S5/20 , H01S5/30 , H01S5/32 , H01S5/323 , H01S5/343
CPC分类号： B82Y20/00 , H01S5/02252 , H01S5/028 , H01S5/041 , H01S5/141 , H01S5/183 , H01S5/2009 , H01S5/3086 , H01S5/3216 , H01S5/34333
摘要： A laser apparatus includes a semiconductor laser element having a first active layer made of a GaN-based compound, and emitting first laser light; and a surface-emitting semiconductor element having a second active layer made of a GaN-based compound, being excited with the first laser light, and emitting second laser light. In addition, the surface-emitting semiconductor element may have a first mirror arranged on one side of the second active layer, and a second mirror may be arranged outside the surface-emitting semiconductor element so that the first and second mirrors form a resonator.
摘要翻译：激光装置包括具有由GaN基化合物构成的第一有源层并发射第一激光的半导体激光元件; 以及表面发射半导体元件，其具有由GaN基化合物制成的第二有源层，被第一激光激发，并且发射第二激光。此外，表面发射半导体元件可以具有布置在第二有源层的一侧上的第一反射镜，并且第二反射镜可以布置在表面发射半导体元件的外部，使得第一和第二反射镜形成谐振器。

97. 发明申请

US20050047468A1 Laser-diode-excited laser apparatus, fiber laser apparatus, and fiber laser amplifier in which laser medium doped with one of Ho3+, Sm3+, Eu3+, Dy3+, Er3+, and Tb3+ is excited with GaN-based compound laser diode 失效
标题翻译：激光二极管激光装置，光纤激光装置和光纤激光放大器，其中掺杂有Ho3 +，Sm3 +，Eu3 +，Dy3 +，Er3 +和Tb3 +之一的激光介质被GaN基复合激光二极管
公开(公告)号：US20050047468A1
公开(公告)日：2005-03-03
申请号：US10952719
申请日：2004-09-30
申请人： Hisashi Ohtsuka , Yoji Okazaki , Takayuki Katoh
发明人： Hisashi Ohtsuka , Yoji Okazaki , Takayuki Katoh
IPC分类号： H01S3/02 , H01S3/06 , H01S3/067 , H01S3/0941 , H01S3/109 , H01S3/16 , H01S5/323 , H01S3/091
CPC分类号： H01S3/067 , H01S3/025 , H01S3/0405 , H01S3/042 , H01S3/0602 , H01S3/09415 , H01S3/109 , H01S3/1603 , H01S3/161 , H01S3/1615 , H01S5/32341 , H01S2302/00
摘要： A solid-state laser crystal constituting a laser-diode-excited solid-state laser apparatus or an optical fiber constituting a fiber laser apparatus or fiber laser amplifier is doped with one of Ho3+, Sm3+, Eu3+, Dy3+, Er3+, and Tb3+ so that a laser beam is emitted from the solid-state laser crystal or the optical fiber, or incident light of the fiber laser amplifier is amplified, by one of the transitions from 5S2 to 5I7, from 5S2 to 5I8, from 4G5/2 to 6H5/2, from 4G5/2 to 6H7/2, from 4F3/2 to 6H11/2, from 5D0 to 7F2, from 4F9/2 to 6H13/2, from 4F9/2 to 6H11/2, from 4S3/2 to 4I15/2, from 2H9/2 to 4I13/2, and from 5D4 to 7F5. The above solid-state laser-crystal or optical fiber is excited with a GaN-based compound laser diode.
摘要翻译：构成激光二极管激光固体激光装置的固态激光晶体或构成光纤激光装置或光纤激光放大器的光纤掺杂有Ho 3+，Sm 3+， 3+，Dy 3+，Er 3+和Tb 3+，使得激光束从固态激光晶体或光纤发射，或者光纤激光放大器的入射光为通过从<5> S2至<5> I7的从5S→5J8→4G5 / 2→6H5 / 2→4G5 / 2〜6 H7 / 2，从F3 / 2〜6H11 / 2，从5℃到0℃的F2，从F9 / 2到6的H13 / 2，从4/3> 3/1> 1/2，从4/3> 911/2到<6> H11 / 2，从S3 / D4至<7> F5。上述固态激光晶体或光纤被GaN基复合激光二极管激发。

98. 发明授权

US06693941B1 Semiconductor laser apparatus 失效
标题翻译：半导体激光装置
公开(公告)号：US06693941B1
公开(公告)日：2004-02-17
申请号：US09656700
申请日：2000-09-07
申请人： Yoji Okazaki , Toshiaki Fukunaga
发明人： Yoji Okazaki , Toshiaki Fukunaga
IPC分类号： H01S30941
CPC分类号： H01S5/041 , B82Y20/00 , H01S3/109 , H01S5/0207 , H01S5/02248 , H01S5/141 , H01S5/183 , H01S5/18369 , H01S5/18377 , H01S5/34326 , H01S5/34333
摘要： A semiconductor laser apparatus comprises a pumping beam source and a surface emission type of semiconductor device. The pumping beam source is constituted of a semiconductor laser device, in which a composition selected from the group consisting of InGaN and GaN is employed in an active layer. The surface emission type of semiconductor device comprises a substrate, and an active layer, which is constituted of a composition selected from the group consisting of InGaAlP and InGaP and is provided on the substrate. The surface emission type of semiconductor device is pumped by the pumping beam source to produce a laser beam. The semiconductor laser apparatus produces the laser beam having a wavelength of a red region or an ultraviolet region and undergoes oscillation in a fundamental mode with a high reliability and a high efficiency and up to a high output power.
摘要翻译：半导体激光装置包括泵浦光束源和表面发射型半导体器件。泵浦光源由半导体激光器件构成，其中在有源层中采用选自由InGaN和GaN组成的组的组成。半导体器件的表面发射型包括由选自InGaAlP和InGaP的组合物构成的衬底和有源层，并且设置在衬底上。半导体器件的表面发射类型由泵浦光源泵浦以产生激光束。半导体激光装置产生具有红色区域或紫外线区域的波长的激光束，并以高可靠性，高效率和高输出功率在基模中进行振荡。

99. 发明授权

US06490309B1 Laser-diode-pumped laser apparatus in which Pr3+-doped laser medium is pumped with GaN-based compound laser diode 失效
标题翻译：用GaN基复合激光二极管泵浦Pr3 +掺杂激光介质的激光二极管泵浦激光装置
公开(公告)号：US06490309B1
公开(公告)日：2002-12-03
申请号：US09621241
申请日：2000-07-21
申请人： Yoji Okazaki , Takayuki Katoh
发明人： Yoji Okazaki , Takayuki Katoh
IPC分类号： H01S30941
CPC分类号： B82Y20/00 , H01S3/0941 , H01S3/109 , H01S3/1613 , H01S3/1653 , H01S5/02248 , H01S5/024 , H01S5/02415 , H01S5/02438 , H01S5/32341 , H01S5/34333
摘要： In a laser-diode-pumped laser apparatus, a solid-state laser crystal doped with at least one rare-earth element including at least Pr3+ is pumped with a laser diode, and emits laser light. In the first aspect, the laser diode has an active layer made of one of an InGaN, InGaNAs, and GaNAs materials, and an optical wavelength conversion element converts the solid-state laser light into ultraviolet laser light by wavelength conversion. In the second aspect, the solid-state laser crystal is codoped with Pr3+ and at least one of Er3+, Ho3+, Dy3+, Eu3+, Sm3+, Pm3+, and Nd3+. In the third aspect, instead of the solid-state laser crystal, an optical fiber codoped with Pr3+ and at least one of Er3+, Ho3+, Dy3+, Eu3+, Sm3+, Pm3+, and Nd3+ is pumped with a GaN-based compound laser diode. In the fourth aspect, an optical fiber codoped with Pr3+ and at least one of Er3+, Ho3+, Dy3+, Eu3+, Sm3, Pm3, and Nd3+ amplifies incident light having a wavelength which is identical with a wavelength of fluorescence generated by pumping of the optical fiber with a GaN-based compound laser diode.
摘要翻译：在激光二极管泵浦激光装置中，掺杂有至少一种至少含有Pr3 +的稀土元素的固体激光晶体用激光二极管泵浦并发射激光。在第一方面中，激光二极管具有由InGaN，InGaNA和GaNA材料中的一种构成的有源层，并且光波长转换元件通过波长转换将固态激光转换成紫外激光。在第二方面中，固态激光晶体与Pr3 +和Er3 +，Ho3 +，Dy3 +，Eu3 +，Sm3 +，Pm3 +和Nd3 +中的至少一种共掺杂。在第三方面中，代替固态激光晶体，用GaN基复合激光二极管泵浦与Pr3 +和Er3 +，Ho3 +，Dy3 +，Eu3 +，Sm3 +，Pm3 +和Nd3 +中的至少一种共用的光纤。在第四方面中，与Pr3 +和Er3 +，Ho3 +，Dy3 +，Eu3 +，Sm3，Pm3和Nd3 +中的至少一种共用的光纤放大了与通过泵浦光学产生的荧光波长相同的波长的入射光光纤与GaN基复合激光二极管。

100. 发明授权

US5949804A Semiconductor light emission device 失效
标题翻译：半导体发光装置
公开(公告)号：US5949804A
公开(公告)日：1999-09-07
申请号：US993708
申请日：1997-12-18
申请人： Yoji Okazaki
发明人： Yoji Okazaki
IPC分类号： H01L33/06 , H01L33/24 , H01L33/30 , H01L33/40 , H01L33/44 , H01L33/58 , H01L33/60 , H01S3/10 , H01S5/10 , H01S5/14 , H01S3/13
CPC分类号： H01S5/141 , H01S5/1064
摘要： A semiconductor light emission device includes a semiconductor light amplifier, a mirror which reflects light emanating from an end face of the semiconductor light amplifier to return to the end face of the semiconductor light amplifier and a wavelength selector which is inserted into the optical path of the light. The wavelength selector is a Lyot filter, an etalon or a combination of a Lyot filter and an etalon.
摘要翻译：半导体发光器件包括半导体光放大器，反射从半导体光放大器的端面发出的光以返回到半导体光放大器的端面的反射镜，以及插入到该半导体光放大器的光路中的波长选择器光。波长选择器是Lyot滤光片，标准具或Lyot滤光片和标准具的组合。

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