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91. 发明授权

US07369947B2 Quantification of adsorbed molecular contaminant using thin film measurement 失效
标题翻译：使用薄膜测量对吸附的分子污染物进行定量
公开(公告)号：US07369947B2
公开(公告)日：2008-05-06
申请号：US11423844
申请日：2006-06-13
申请人： Lin Zhou , Eric P. Solecky
发明人： Lin Zhou , Eric P. Solecky
IPC分类号： G06F17/00
CPC分类号： G01N1/2214 , Y10T428/31663
摘要： A test method for measuring adsorbed molecular contamination uses a test structure that includes a substrate comprising a plurality of separated test sites having a plurality separate thicknesses having a base design thickness and a designed thickness interrelationship. The test structure is exposed to a molecular contaminant environment to provide an adsorbed molecular contaminant layer upon each of the plurality of separated test sites. The plurality of separated test sites with the adsorbed molecular contaminant layer thereon is measured. An appropriate algorithm that considers the designed thickness interrelationship is used to determine at least one of: (1) the base design thickness; and (2) a thickness of the adsorbed molecular contaminant layer.
摘要翻译：用于测量吸附的分子污染物的测试方法使用测试结构，该测试结构包括包含多个分离的测试位置的基底，所述测试位置具有基本设计厚度和设计的厚度相互关系的多个分离的厚度。测试结构暴露于分子污染环境，以在多个分离的测试位点中的每一个上提供吸附的分子污染物层。测量其上具有吸附的分子污染物层的多个分离的测试位点。考虑设计的厚度相互关系的适当算法用于确定以下至少一个：（1）基础设计厚度; 和（2）吸附的分子污染物层的厚度。

92. 发明申请

US20070298402A1 System and method for providing educational course data 审中-公开
标题翻译：提供教育课程数据的系统和方法
公开(公告)号：US20070298402A1
公开(公告)日：2007-12-27
申请号：US11450712
申请日：2006-06-09
申请人： Lin Zhou , Margaret Lee Munkittrick
发明人： Lin Zhou , Margaret Lee Munkittrick
IPC分类号： G09B3/00
CPC分类号： G09B5/00
摘要： A system and method for providing educational course data includes receiving identification data of a first educational course of a first educational institution from a client machine and retrieving educational course equivalency data from a database based on the identification data. The educational course equivalency data is transmitted to the client machine. The educational course equivalency data may include identification data of a second educational course of a second educational institution. The educational course equivalency data may indicate that the first and second educational courses are directly equivalent. The method may also include retrieving course information related to the second educational course based on a request and transmitting the course information to the client machine.
摘要翻译：用于提供教育课程数据的系统和方法包括从客户端机器接收第一教育机构的第一教育课程的识别数据，并且基于识别数据从数据库中检索教育课程等价数据。教育课程的等值数据传送到客户端机器。教育课程等价数据可以包括第二教育机构的第二教育课程的识别数据。教育课程等值数据可能表明第一和第二教育课程是直接相等的。该方法还可以包括基于请求检索与第二教育课程相关的课程信息，并将课程信息发送给客户端机器。

93. 发明申请

US20070124108A1 Structure, system and method for dimensionally unstable layer dimension measurement 失效
标题翻译：尺寸不稳定层尺寸测量的结构，系统和方法
公开(公告)号：US20070124108A1
公开(公告)日：2007-05-31
申请号：US11290737
申请日：2005-11-30
申请人： Lin Zhou , Eric Solecky
发明人： Lin Zhou , Eric Solecky
IPC分类号： G01B11/02 , G01B15/00 , G03C5/00 , H01L21/66
CPC分类号： H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A structure, a system and a method are directed towards determination of a dimension of a patterned dimensionally unstable layer when the dimension is measured using an apparatus that induces a variation of the dimension. The structure, system and method use a patterned dimensionally unstable layer pattern design that correlates with an algorithm used to determine the dimension when the dimension is measured using the apparatus that induces the variation of the dimension.
摘要翻译：当使用引起尺寸变化的装置测量尺寸时，结构，系统和方法针对图案化尺寸不稳定层的尺寸的确定。结构，系统和方法使用图案化的尺寸不稳定的层图案设计，其与用于在使用引起尺寸变化的装置测量尺寸时确定尺寸的算法相关联。

94. 发明授权

US07187993B2 Metrology tool error log analysis methodology and system 有权
标题翻译：计量工具错误日志分析方法和系统
公开(公告)号：US07187993B2
公开(公告)日：2007-03-06
申请号：US11407543
申请日：2006-04-19
申请人： Sarah A. Kay , Eric P. Solecky , Lin Zhou
发明人： Sarah A. Kay , Eric P. Solecky , Lin Zhou
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32222 , G05B2219/45031 , Y02P90/20 , Y02P90/22
摘要： A method of identifying failures in a metrology tool system used to measure desired dimensions in microelectronic features. Each metrology tool in the system runs a plurality of recipes for measuring desired dimensions in microelectronic features, with each recipe comprising a set of instructions for measuring at least one dimension in a microelectronic feature. The system includes an error log having stored thereon failures in measurement of microelectronic feature dimensions. The method includes determining normalized number of errors for the recipes used by the metrology tool from the failures stored in the error log, identifying one or more recipes having the greatest normalized number of errors in the error log, identifying, in a list of jobs to be performed by the metrology tool, the one or more identified recipes having the greatest normalized number of errors, and from the identified one or more recipes having the greatest normalized number of errors, determining the cause of the errors in the one or more recipes. The method then includes effecting a change in the one or more identified recipes having the greatest normalized number of errors to correct the errors therein and tracking a metrology tool job having the one or more recipes in which a change has been effected to determine whether the cause of errors has been corrected.
摘要翻译：一种识别用于测量微电子特征中所需尺寸的度量工具系统中的故障的方法。系统中的每个计量工具运行用于测量微电子特征中的期望尺寸的多个配方，每个配方包括用于测量微电子特征中的至少一个维度的指令集。该系统包括其中存储微电子特征尺寸的测量失败的错误日志。该方法包括从存储在错误日志中的故障确定计量工具使用的配方的归一化错误数，识别错误日志中具有最大归一化错误数量的一个或多个配方，在工作列表中识别由计量工具执行，所述一个或多个识别的配方具有最大的归一化错误数量，以及从所识别的具有最大归一化错误数量的一个或多个配方，确定一个或多个配方中的错误的原因。该方法然后包括实现具有最大归一化错误数量的一个或多个识别的配方的改变以校正其中的错误并跟踪具有其中进行了改变以确定原因的一个或多个配方的计量工具作业的错误已被更正。

95. 发明授权

US06839202B2 Electromagnetic wave shielded write and read wires on a support for a magnetic media drive 失效
标题翻译：电磁波屏蔽写入和读取电线在支持磁介质驱动器
公开(公告)号：US06839202B2
公开(公告)日：2005-01-04
申请号：US10133596
申请日：2002-04-26
申请人： Lin Zhou
发明人： Lin Zhou
IPC分类号： G11B5/48 , H05K1/02 , H05K1/05 , H05K3/00 , H05K3/04
CPC分类号： G11B5/187 , G11B5/484 , G11B5/4853 , G11B5/486 , H05K1/0221 , H05K1/056 , H05K3/0041 , H05K3/048 , H05K2201/0179 , H05K2201/09809 , H05K2203/0733 , Y10T29/49025 , Y10T29/49027 , Y10T29/49032 , Y10T29/49155 , Y10T29/49194
摘要： An assembly includes a suspension, a magnetic head assembly, first and second write wires and first and second read wires wherein the magnetic head assembly includes a write head and a read head with the first and second write wires connected to the write head and the first and second read wires connected to the read head and wherein the first and second insulative sheaths are disposed about the first and second read wires and first and second conductive sheaths are disposed about the first and second insulative sheaths. In another aspect of the invention, third and fourth insulative sheaths are disposed about the first and second write wires and third and fourth conductive sheaths are disposed about the third and fourth insulative sheaths.
摘要翻译：组件包括悬架，磁头组件，第一和第二写入线以及第一和第二读取线，其中磁头组件包括写入头和读取头，其中第一和第二写入线连接到写入头，第一和第二读取线以及连接到读取头的第二读取线，并且其中第一和第二绝缘护套围绕第一和第二读取线设置，并且第一和第二导电护套围绕第一和第二绝缘护套设置。在本发明的另一方面，第三和第四绝缘护套围绕第一和第二写入线布置，第三和第四导电护套围绕第三和第四绝缘护套设置。

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