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    • 92. 发明授权
    • Optical disk apparatus
    • 光盘装置
    • US06304536B1
    • 2001-10-16
    • US09624351
    • 2000-07-24
    • Shin-Ichi YamadaMitsurou MoriyaYasuaki EdahiroKouichi TakamineKatsuya Watanabe
    • Shin-Ichi YamadaMitsurou MoriyaYasuaki EdahiroKouichi TakamineKatsuya Watanabe
    • G11B700
    • G11B7/131G11B7/0908G11B7/0941G11B7/0945G11B19/12G11B2007/0006
    • An optical disk apparatus comprising a device for moving a focal point of a light beam for reproducing information recorded on an information face of a disk, in the direction perpendicular to the information face; a device for detecting a reflected light from the disk; and a device for discriminating whether the disk set in the apparatus is a disk having a thick base substrate or a disk having a thin base substrate. In this apparatus, a maximum value AS1Lmax of an output signal from the reflected light detecting device and a maximum value ENVmax of an amplitude of an information reproducing signal are detected while driving the focal point moving device so that the focal point passes through the information face, and the discriminating device discriminates whether the disk set in the apparatus is a disk having a thick base substrate or a disk having a thin base substrate, on the basis of the ratio of ENVmax to AS1Lmax. Therefore, it is possible to discriminate between a DVD having a thin base substrate and a CD having a thick base substrate.
    • 一种光盘装置,包括:用于移动光束焦点的装置,用于在与信息面垂直的方向上再现记录在盘的信息面上的信息; 用于检测来自盘的反射光的装置; 以及用于鉴别设备中的盘是否是具有厚基底或具有薄基底的盘的盘的装置。 在该装置中,在驱动焦点移动装置时检测来自反射光检测装置的输出信号的最大值AS1Lmax和信息再现信号的振幅的最大值ENVmax,使得焦点通过信息面 鉴别装置基于ENVmax与AS1Lmax的比率来判别装置中的盘是否是具有厚基底或具有薄基底的盘的盘。 因此,可以区分具有薄基底基板的DVD和具有厚基底基板的CD。
    • 93. 发明授权
    • Plasma processing apparatus and plasma processing method
    • 等离子体处理装置和等离子体处理方法
    • US06197151B1
    • 2001-03-06
    • US09564788
    • 2000-05-05
    • Tetsunori KajiShinichi TachiToru OtsuboKatsuya WatanabeKatsuhiko MitaniJunichi Tanaka
    • Tetsunori KajiShinichi TachiToru OtsuboKatsuya WatanabeKatsuhiko MitaniJunichi Tanaka
    • H05H100
    • H01J37/32082H01J37/32678
    • A plasma processing apparatus comprising a vacuum processing chamber, a plasma generating means including a pair of electrodes, a sample table for mounting a sample to be processed inside the vacuum processing chamber and also serving as one of the electrodes, and a evacuating means for evacuating the vacuum processing chamber, which further comprises a high frequency electric power source for applying an electric power of a VHF band from 50 MHz to 200 MHz between the pair of electrodes; and a magnetic field forming means for forming a static magnetic field or a low frequency magnetic field larger than 10 gausses and smaller than 110 gausses in a direction intersecting an electric field generated between the pair of electrodes and the vicinity by the high frequency electric power source; therein the magnetic field forming means being set so that a portion where a component of the magnetic field in a direction along the surface of the sample table becomes maximum is brought to a position in the opposite side of the sample table from the middle of the both electrodes; an electron cyclotron resonance region being formed between the both electrodes by the magnetic field and the electric field.
    • 一种等离子体处理装置,包括真空处理室,包括一对电极的等离子体产生装置,用于在真空处理室内安装待处理样品并且还用作其中一个电极的样品台,以及用于抽真空的抽空装置 所述真空处理室还包括用于在所述一对电极之间施加50MHz至200MHz的VHF频带的电力的高频电源; 以及磁场形成装置,用于在与所述一对电极之间产生的电场和由所述高频电源附近产生的电场的方向上形成大于10高斯并且小于110高斯的静态磁场或低频磁场 ; 其中,磁场形成装置被设置成使得沿着样品台的表面的方向上的磁场分量变得最大的部分被带到样品台的与两者的中间相反的一侧的位置 电极 通过磁场和电场在两个电极之间形成电子回旋共振区域。
    • 94. 发明授权
    • Optical disk apparatus
    • 光盘装置
    • US6147946A
    • 2000-11-14
    • US1289
    • 1997-12-31
    • Shin-Ichi YamadaMitsurou MoriyaYasuaki EdahiroKouichi TakamineKatsuya Watanabe
    • Shin-Ichi YamadaMitsurou MoriyaYasuaki EdahiroKouichi TakamineKatsuya Watanabe
    • G11B7/00G11B7/09G11B7/13G11B19/12
    • G11B7/131G11B19/12G11B7/0945G11B2007/0006G11B7/0908G11B7/0941
    • An optical disk apparatus comprising means for moving a focal point of a light beam for reproducing information recorded on an information face of a disk, in the direction perpendicular to the information face; means for detecting a reflected light from the disk; and means for discriminating whether the disk set in the apparatus is a disk having a thick base substrate or a disk having a thin base substrate. In this apparatus, a maximum value AS1L.sub.max of an output signal from the reflected light detecting means and a maximum value ENV.sub.max of an amplitude of an information reproducing signal are detected while driving the focal point moving means so that the focal point passes through the information face, and the discriminating means discriminates whether the disk set in the apparatus is a disk having a thick base substrate or a disk having a thin base substrate, on the basis of the ratio of ENV.sub.max to AS1L.sub.max. Therefore, it is possible to discriminate between a DVD having a thin base substrate and a CD having a thick base substrate.
    • 一种光盘装置,包括用于移动光束的焦点的装置,用于在与信息面垂直的方向上再现记录在盘的信息面上的信息; 用于检测来自盘的反射光的装置; 以及用于鉴别设备中的盘是否是具有厚基底或具有薄基底的盘的盘的装置。 在该装置中,在驱动焦点移动装置时检测来自反射光检测装置的输出信号的最大值AS1Lmax和信息再现信号的幅度的最大值ENVmax,使得焦点通过信息面 鉴别装置基于ENVmax与AS1Lmax的比值来判别装置中的盘是否是具有厚基底或具有薄基底的盘的盘。 因此,可以区分具有薄基底基板的DVD和具有厚基底基板的CD。
    • 95. 发明授权
    • Plasma processing apparatus and plasma processing method
    • 等离子体处理装置和等离子体处理方法
    • US6129806A
    • 2000-10-10
    • US808805
    • 1997-02-28
    • Tetsunori KajiShinichi TachiToru OtsuboKatsuya WatanabeKatsuhiko MitaniJunichi Tanaka
    • Tetsunori KajiShinichi TachiToru OtsuboKatsuya WatanabeKatsuhiko MitaniJunichi Tanaka
    • H01J37/32H05H1/46C23F4/00
    • H01J37/32082H01J37/32678
    • A plasma processing apparatus and method are provided which are capable of easily performing precise working of a fine pattern on a large sized sample having a diameter of 300 mm or larger, and also capable of improving selectivity during micro processing. The apparatus includes a vacuum processing chamber, a plasma generating arrangement including a pair of electrodes, a sample table for mounting a sample to be processed inside the vacuum processing chamber and also serving as one of the electrodes, and an evacuating means for evacuating the vacuum processing chamber. The apparatus further includes a high frequency electric power source for applying an electric power of VHF band from 50 MHz to 200 MHz between the pair of electrodes. A magnetic field forming structure is also provided for forming a static magnetic field or a low frequency magnetic field larger than 10 gauss and smaller than 110 gauss in a direction intersecting an electric field generated between the pair of electrodes and in the vicinity thereof by the high frequency electric power source. The magnetic field forming structure is set so that a portion where a component of the magnetic field in a direction along the surface of the sample table becomes maximum is brought to a position on the opposite side of the sample table from the middle of the two electrodes. As a result, an electron cyclotron resonance region is formed between the upper and lower electrodes by the magnetic field and the electric field.
    • 提供一种等离子体处理装置和方法,其能够容易地对直径为300mm以上的大尺寸样品进行精细图案的精确加工,并且还能够提高微加工期间的选择性。 该装置包括真空处理室,包括一对电极的等离子体产生装置,用于在真空处理室内安装待处理样品并且还用作其中一个电极的样品台,以及抽真空装置 处理室。 该装置还包括用于在一对电极之间施加50MHz至200MHz的VHF频带的电力的高频电源。 还提供了一种磁场形成结构,用于在与一对电极之间产生的电场相交的方向上形成大于10高斯并且小于110高斯的静态磁场或低频磁场,并且在其附近形成高 频率电源。 磁场形成结构被设定为使得沿着样品台的表面的方向上的磁场分量变得最大的部分被带到样品台的与两个电极的中间相反的一侧的位置 。 结果,通过磁场和电场在上电极和下电极之间形成电子回旋共振区域。
    • 98. 发明授权
    • Immersion-type microscope objective lens
    • 浸入型显微镜物镜
    • US5798869A
    • 1998-08-25
    • US736145
    • 1996-10-28
    • Katsuya Watanabe
    • Katsuya Watanabe
    • G02B21/02G02B21/33
    • G02B21/02G02B21/33
    • An apochromatic, immersion-type microscope objective lens is disclosed, comprising (in order from the object side) a first lens group having positive refractive power, a second lens group having a positive refractive power, and a third lens group having a negative refractive power. The first lens group comprises a planoconvex lens element (having refractive index n.sub.1) as the most objectwise lens element in the objective lens. The planoconvex lens element is "embedded" in and cemented to a negative meniscus lens having a refractive index n.sub.2 and a convex surface oriented imagewise. Also in the first lens group is a positive meniscus lens element having a concave surface oriented objectwise. The second lens group comprises at least one compound lens. The third lens group comprises a cemented meniscus lens having a concave surface oriented imagewise. The objective lens satisfies Conditional Expressions including n.sub.2 -n.sub.1 .gtoreq.0.2.
    • 公开了一种复消色差的浸没式显微镜物镜,其包括(从物体侧开始的顺序)具有正折光力的第一透镜组,具有正折光力的第二透镜组,以及具有负折光力的第三透镜组 。 第一透镜组包括作为物镜中最物体的透镜元件的平凸透镜元件(折射率n1)。 平凸透镜元件被“嵌入”并粘合到具有折射率n2和成像方向的凸面的负凹凸透镜。 在第一透镜组中也是具有朝向目标方向的凹面的正弯月透镜元件。 第二透镜组包括至少一个复合透镜。 第三透镜组包括具有凹面朝向成像方向的胶结凹凸透镜。 物镜满足包括n2-n1> / = 0.2的条件表达式。