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    • 93. 发明申请
    • Via hole machining for microwave monolithic integrated circuits
    • 微波单片集成电路的通孔加工
    • US20070026676A1
    • 2007-02-01
    • US11194419
    • 2005-08-01
    • Ming LiXinbing LiuHiroyuki SakaiMasaaki NishijimaDaisuke Ueda
    • Ming LiXinbing LiuHiroyuki SakaiMasaaki NishijimaDaisuke Ueda
    • H01L21/302
    • B23K26/0624B23K26/40B23K2103/50
    • A method for forming a via in a sapphire substrate with a laser machining system that includes an ultrafast pulsed laser source. The sapphire substrate is provided. Pulses of laser light are substantially focused to a beam spot on the first surface of the sapphire substrate such that each focused pulse of laser light ablates a volume of the sapphire substrate having a depth less than the substrate thickness. The beam spot of the focused laser light pulses is scanned over a via portion of the first surface of the sapphire substrate. The sapphire substrate is moved in a direction substantially normal to the first surface to control the volume of the sapphire substrate ablated by each pulse of laser light to be substantially constant. The pulsing and scanning steps are repeated until the via is formed extending from the first surface to the second surface of the sapphire substrate.
    • 一种在具有包括超快脉冲激光源的激光加工系统的蓝宝石衬底中形成通孔的方法。 提供蓝宝石衬底。 激光的脉冲基本上聚焦到蓝宝石衬底的第一表面上的束斑上,使得每个聚焦的激光脉冲消除了具有小于衬底厚度的深度的蓝宝石衬底的体积。 聚焦激光脉冲的束斑在蓝宝石衬底的第一表面的通孔部分上扫描。 蓝宝石衬底沿着基本上垂直于第一表面的方向移动,以控制由每个激光脉冲消融的蓝宝石衬底的体积基本恒定。 重复脉冲和扫描步骤,直到形成从蓝宝石衬底的第一表面延伸到第二表面的通孔。