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    • 93. 发明授权
    • Memory device, manufacturing method and operating method of the same
    • 存储器件,制造方法和操作方法相同
    • US08363476B2
    • 2013-01-29
    • US13009464
    • 2011-01-19
    • Hang-Ting LueShih-Hung Chen
    • Hang-Ting LueShih-Hung Chen
    • G11C16/00
    • H01L29/7926G11C16/0466G11C16/3418H01L27/11578H01L27/11582H01L29/66833
    • A memory device, a manufacturing method and an operating method of the same are provided. The memory device includes a substrate, stacked structures, a channel element, a dielectric element, a source element, and a bit line. The stacked structures are disposed on the substrate. Each of the stacked structures includes a string selection line, a word line, a ground selection line and an insulating line. The string selection line, the word line and the ground selection line are separated from each other by the insulating line. The channel element is disposed between the stacked structures. The dielectric element is disposed between the channel element and the stacked structure. The source element is disposed between the upper surface of the substrate and the lower surface of the channel element. The bit line is disposed on the upper surface of the channel element.
    • 提供了一种存储器件,其制造方法和操作方法。 存储器件包括衬底,堆叠结构,沟道元件,电介质元件,源元件和位线。 堆叠结构设置在基板上。 每个堆叠结构包括串选择线,字线,接地选择线和绝缘线。 串选择线,字线和接地选择线通过绝缘线彼此分离。 通道元件设置在堆叠结构之间。 电介质元件设置在通道元件和堆叠结构之间。 源元件设置在基板的上表面和通道元件的下表面之间。 位线设置在通道元件的上表面上。
    • 95. 发明授权
    • Method for manufacturing memory cell
    • 制造存储单元的方法
    • US08252654B2
    • 2012-08-28
    • US12942312
    • 2010-11-09
    • Tzu-Hsuan HsuHang-Ting Lue
    • Tzu-Hsuan HsuHang-Ting Lue
    • H01L21/336
    • H01L27/11568H01L21/28282H01L21/84H01L27/115H01L27/12H01L29/66833H01L29/792
    • In a method for manufacturing a memory cell, a substrate is provided. A doped region with a first conductive type is formed in the substrate near a surface of the substrate. A portion of the substrate is removed to define a plurality of fin structures in the substrate. A plurality of isolation structures is formed among the fin structures. A surface of the isolation structures is lower than a surface of the fin structures. A gate structure is formed over the substrate and straddles the fin structure. The gate structure includes a gate straddling the fin structure and a charge storage structure located between the fin structure and the gate. A source/drain region is formed with a second conductive type in the fin structure exposed by the gate structure, and the first conductive type is different from the second conductive type.
    • 在存储单元的制造方法中,设置有基板。 在基板的表面附近形成具有第一导电类型的掺杂区域。 去除衬底的一部分以在衬底中限定多个鳍结构。 在翅片结构之间形成多个隔离结构。 隔离结构的表面低于翅片结构的表面。 栅极结构形成在衬底上并跨越翅片结构。 栅极结构包括跨过鳍结构的栅极和位于鳍结构和栅极之间的电荷存储结构。 源极/漏极区域由栅极结构暴露的鳍状结构中的第二导电类型形成,并且第一导电类型不同于第二导电类型。
    • 98. 发明授权
    • Integrated circuit self aligned 3D memory array and manufacturing method
    • 集成电路自对准3D存储阵列及制造方法
    • US08208279B2
    • 2012-06-26
    • US12692798
    • 2010-01-25
    • Hang-Ting Lue
    • Hang-Ting Lue
    • G11C5/06
    • G11C5/06G11C5/02H01L27/0688H01L27/101H01L27/11565H01L27/11578H01L27/11582H01L29/792H01L2924/0002H01L2924/00
    • A 3D memory device includes a plurality of ridge-shaped stacks, in the form of multiple strips of conductive material separated by insulating material, arranged as bit lines which can be coupled through decoding circuits to sense amplifiers. The strips of conductive material have side surfaces on the sides of the ridge-shaped stacks. A plurality of conductive lines arranged as word lines which can be coupled to row decoders, extends orthogonally over the plurality of ridge-shaped stacks. The conductive lines conform to the surface of the stacks. Memory elements lie in a multi-layer array of interface regions at cross-points between side surfaces of the conductive strips on the stacks and the conductive lines. The memory elements are programmable, like the anti-fuses or charge trapping structures. The 3D memory is made using only two critical masks for multiple layers.
    • 3D存储器件包括多个由绝缘材料隔开的多条导电材料形式的脊状叠层,排列成可通过解码电路耦合到读出放大器的位线。 导电材料条具有在脊形叠层的侧面上的侧表面。 布置成可以连接到行解码器的字线的多条导线垂直地延伸在多个脊形叠层上。 导线符合堆叠的表面。 存储器元件位于叠层和导电线上的导电条的侧表面之间的交叉点处的界面区域的多层阵列。 存储器元件是可编程的,如抗熔丝或电荷捕获结构。 3D存储器仅使用两层用于多层的关键掩模。