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91. 发明授权

US08422168B2 Magnetic write head having a self-aligned side wrap-around shield with multi-angle slanted bump 有权
标题翻译：具有具有多角度倾斜凸起的自对准侧包绕屏蔽的磁性写头
公开(公告)号：US08422168B2
公开(公告)日：2013-04-16
申请号：US12343709
申请日：2008-12-24
申请人： Wen-Chien David Hsiao , Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Wen-Chien David Hsiao , Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A method for forming a magnetic write head having a trailing shield with a tapered and stepped, self aligned trailing magnetic shield. The shield has a tapered portion that tapers away from the write pole as it extends away from the ABS. This tapered portion helps to channel flux to the pole tip portion of the shield, while preventing the loss of write field to the shield. The stepped portion of the shield further helps to prevent the loss of write field and also defines a secondary throat height of the shield that can be accurately located relative to the air bearing surface.
摘要翻译：一种用于形成具有带有锥形和阶梯式自对准拖尾磁屏蔽的后挡板的磁写头的方法。屏蔽件具有锥形部分，当锥形部分远离ABS延伸时，该锥形部分从写入柱逐渐变细。该锥形部分有助于将通量传导到屏蔽的极端部分，同时防止对屏蔽件的写入场的损失。护罩的台阶部分还有助于防止写入场的损失，并且还限定可相对于空气轴承表面精确定位的护罩的次级喉部高度。

92. 发明申请

US20130020204A1 MAGNETIC WRITE HEAD HAVING AN ELECTROPLATED WRITE POLE WITH A LEADING EDGE TAPER 审中-公开
标题翻译：具有导线边缘的电镀写入磁头的磁头
公开(公告)号：US20130020204A1
公开(公告)日：2013-01-24
申请号：US13187381
申请日：2011-07-20
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/127 , C25D7/00 , C23F1/04 , C25D5/02
CPC分类号： C25D5/022 , C25D5/48 , G11B5/3116 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a tapered leading edge. The method includes depositing a sacrificial non-magnetic layer to a thickness that is at least as great as the thickness of the write pole to be formed. The sacrificial non-magnetic layer is then masked and ion milled so as to form a tapered edge on the sacrificial non-magnetic layer that extends through the thickness of the non-magnetic fill layer. A magnetic material is then deposited and planarized by chemical mechanical polishing. The remaining magnetic material forms the entirety of the magnetic write pole so that there is no need to deposit additional magnetic layers further construct the write pole.
摘要翻译：一种用于制造具有锥形前缘的磁写头的方法。该方法包括将牺牲非磁性层沉积至至少与待形成的写极的厚度一样大的厚度。然后对牺牲非磁性层进行掩模和离子研磨，以在牺牲非磁性层上形成延伸穿过非磁性填充层的厚度的锥形边缘。然后通过化学机械抛光沉积和平坦化磁性材料。剩余的磁性材料形成整个磁性写入磁极，使得不需要沉积另外的磁性层进一步构造写入极。

93. 发明授权

US08189292B2 Method for manufacturing a magnetic write head having a write pole with a trailing edge taper using a Rieable hard mask 有权
标题翻译：一种使用可重构硬掩模制造具有后缘锥形的写极的磁写头的方法
公开(公告)号：US08189292B2
公开(公告)日：2012-05-29
申请号：US12343723
申请日：2008-12-24
申请人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered, stepped trailing edge. The method includes depositing a magnetic write pole material over a substrate, and then forming a magnetic step structure over the magnetic write pole material. A mask structure is then formed, which includes a multilayer hard mask formed over the magnetic write pole material and the magnetic step structure. An ion milling process is then performed to remove a portion of the write pole material to define a write pole. A non-magnetic material can be deposited and ion milling performed to form non-magnetic side gap layer at the sides of the write pole. A multi-step reactive ion milling process can then be performed to remove the remaining hard mask from over the write pole.
摘要翻译：一种用于制造磁头的方法，该写磁头具有带锥形的阶梯式后缘的写极。该方法包括将磁性写入磁极材料沉积在衬底上，然后在磁性写入磁极材料上形成磁性阶梯结构。然后形成掩模结构，其包括形成在磁性写入磁极材料和磁性步骤结构之上的多层硬掩模。然后执行离子铣削工艺以去除写入极材料的一部分以限定写入极。可以沉积非磁性材料并进行离子铣削以在写入极的两侧形成非磁性侧隙层。然后可以执行多步反应离子研磨过程，以从写极上去除剩余的硬掩模。

94. 发明授权

US08059367B2 Methods for creating a magnetic main pole with side shield and systems thereof 有权
标题翻译：用于制造具有侧面屏蔽的磁性主极和其系统的方法
公开(公告)号：US08059367B2
公开(公告)日：2011-11-15
申请号：US12341925
申请日：2008-12-22
申请人： Edward Hin Pong Lee , Aron Pentek
发明人： Edward Hin Pong Lee , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T428/1186
摘要： A method according to another embodiment includes forming a side shield layer of ferromagnetic material above a substrate; masking the side shield layer; milling an unmasked region of the side shield layer for forming a pole trench therein; and forming a pole layer in the pole trench. A structure according to one embodiment includes a substrate; a side shield layer of ferromagnetic material on the substrate, wherein the substrate has a region covered by the side shield layer and a region not covered by the side shield layer; a pole trench in the side shield layer and the region of the substrate not covered by the side shield layer; a layer of nonmagnetic material in the pole trench; and a pole layer in the pole trench, wherein the pole layer has a greater thickness above the region of the substrate not covered by the side shield layer than above the region of the substrate covered by the side shield layer.
摘要翻译：根据另一实施例的方法包括在基板上形成铁磁材料的侧屏蔽层; 遮蔽侧面屏蔽层; 研磨用于在其中形成极沟槽的侧屏蔽层的未掩模区域; 以及在所述极沟槽中形成极层。根据一个实施例的结构包括基底; 在所述基板上的铁磁材料的侧屏蔽层，其中所述基板具有被所述侧屏蔽层覆盖的区域和未被所述侧屏蔽层覆盖的区域; 侧屏蔽层中的极沟槽和未被侧屏蔽层覆盖的衬底的区域; 在磁极沟中的一层非磁性材料; 以及在所述极沟槽中的极层，其中所述极层在不被所述侧屏蔽层覆盖的所述衬底的区域之上具有比在所述侧屏蔽层覆盖的衬底的区域之上更大的厚度。

95. 发明申请

US20110132869A1 MAGNETIC WRITE HEAD MANUFACTURED BY DAMASCENE PROCESS PRODUCING A TAPERED WRITE POLE WITH A NON-MAGNETIC STEP AND NON-MAGNETIC BUMP 有权
标题翻译：由具有非磁性步进和非磁性制动的带状刀片制造的大型制造工艺制造的磁性写头
公开(公告)号：US20110132869A1
公开(公告)日：2011-06-09
申请号：US12634490
申请日：2009-12-09
申请人： Liubo Hong , Aron Pentek , Yi Zheng
发明人： Liubo Hong , Aron Pentek , Yi Zheng
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.
摘要翻译：一种用于制造具有非磁性步骤层，非磁性阶梯层前面的非磁性凸起和具有锥形后缘的写入磁极的磁性写入头的方法。写柱的后缘的锥形部分通过两步法形成，其允许以比使用单步骤锥形工艺可能的更高的精度和重复性形成写柱锥度。还描述了一种替代方法，该方法还描述了如何制造具有可调凸起喉部高度的非磁性凸块结构，然后在镶嵌在屏蔽头周围的大马士革侧面屏蔽间隙形成。

96. 发明授权

US07952831B2 Perpendicular magnetic recording write head with notched trailing shield 有权
标题翻译：垂直磁记录写头带有凹口的后盾
公开(公告)号：US07952831B2
公开(公告)日：2011-05-31
申请号：US12849796
申请日：2010-08-03
申请人： John I. Kim , Aron Pentek
发明人： John I. Kim , Aron Pentek
IPC分类号： G11B5/23 , G11B5/127
CPC分类号： G11B5/1278 , G11B5/11 , G11B5/3116 , G11B5/3146 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording write head has a write pole, a trapezoidal-shaped trailing shield notch, and a gap between the write pole and notch, with the gap being formed of a nonmagnetic mask film, such as alumina, a nonmagnetic metal protective film and a nonmagnetic gap layer. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap. A reactive ion beam etching (RIBE) process removes the filler material at the side edges of the write pole and thus widens the opening at the side edges. The nonmagnetic metal film protects the underlying mask film and write pole during the widening of the opening. The gap layer and trailing shield notch are deposited into a widened opening above the write pole, so the sides of the notch diverge to cause the generally trapezoidal shape.
摘要翻译：垂直磁记录写头具有写极，梯形后屏蔽切口和写极与凹口之间的间隙，间隙由非磁性掩模膜形成，例如氧化铝，非磁性金属保护膜和非磁隙层。写极具有后缘，其具有基本上限定轨道宽度的宽度，并且面向凹口的前边缘，但是与间隙隔开。写极具有非磁性填充材料，例如氧化铝，除了在其后缘处与间隙接触的位置之外围绕它。反应离子束蚀刻（RIBE）工艺去除了写极的侧边缘处的填充材料，从而加宽了侧边缘处的开口。非磁性金属膜在开口扩大期间保护下面的掩模膜和写极。间隙层和后屏蔽切口沉积在写极上方的加宽开口中，因此凹口的侧面发散以引起大致梯形的形状。

97. 发明申请

US20100155363A1 METHOD FOR MANUFACTURING A MAGNETIC WRITE HEAD HAVING A WRITE POLE WITH A TRAILING EDGE TAPER USING A RIEABLE HARD MASK 有权
标题翻译：使用可弯曲硬掩模制造具有跟踪边缘的磁头的磁头写入头的方法
公开(公告)号：US20100155363A1
公开(公告)日：2010-06-24
申请号：US12343723
申请日：2008-12-24
申请人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered, stepped trailing edge. The method includes depositing a magnetic write pole material over a substrate, and then forming a magnetic step structure over the magnetic write pole material. A mask structure is then formed, which includes a multilayer hard mask formed over the magnetic write pole material and the magnetic step structure. An ion milling process is then performed to remove a portion of the write pole material to define a write pole. A non-magnetic material can be deposited and ion milling performed to form non-magnetic side gap layer at the sides of the write pole. A multi-step reactive ion milling process can then be performed to remove the remaining hard mask from over the write pole.
摘要翻译：一种用于制造磁头的方法，该写磁头具有带锥形的阶梯式后缘的写极。该方法包括将磁性写入磁极材料沉积在衬底上，然后在磁性写入磁极材料上形成磁性阶梯结构。然后形成掩模结构，其包括形成在磁性写入磁极材料和磁性步骤结构之上的多层硬掩模。然后执行离子铣削工艺以去除写入极材料的一部分以限定写入极。可以沉积非磁性材料并进行离子铣削以在写入极的两侧形成非磁性侧隙层。然后可以执行多步反应离子研磨过程，以从写极上去除剩余的硬掩模。

98. 发明申请

US20090168258A1 HYBRID, SELF ALIGNED MAGNETIC WRITE HEAD WITH A PARTIALLY PLATED POLE AND METHOD OF PRODUCING SAME 有权
标题翻译：混合自动对准的具有部分电极的磁性写头及其制造方法
公开(公告)号：US20090168258A1
公开(公告)日：2009-07-02
申请号：US11966113
申请日：2007-12-28
申请人： Quang Le , Jeffrey S. Lille , Aron Pentek
发明人： Quang Le , Jeffrey S. Lille , Aron Pentek
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A magnetic write head for perpendicular magnetic recording. The write head has a secondary flare point defined by magnetic structures that extend from the sides of the write pole, but not over the trailing edge of the write pole. The magnetic structures each have a front edge that defines the secondary flare point. By constructing the magnetic structures so that they only extend from the sides of the write pole and not over the write pole, they can be formed by electroplating, while leafing the mask structure (used to define the write pole) still intact, thereby greatly simplifying manufacture and preventing damage to the write pole during manufacture.
摘要翻译：用于垂直磁记录的磁写头。写头具有由磁性结构限定的次级耀斑，其从写入极的侧面延伸，但不在写入极的后缘上方。磁性结构各自具有限定次级耀斑点的前边缘。通过构造磁结构，使得它们仅从写入极的侧面延伸而不是在写入极之上，它们可以通过电镀形成，同时使掩模结构（用于定义写入极）仍然完整，从而大大简化在制造过程中制造和防止对写入极的损坏。

99. 发明授权

US07506431B2 Method of manufacturing a perpendicular magnetic write head having a wrap-around trailing shield and a concave trailing edge main pole 有权
标题翻译：制造具有环绕后挡板和凹后缘主极的垂直磁写头的方法
公开(公告)号：US07506431B2
公开(公告)日：2009-03-24
申请号：US11744022
申请日：2007-05-03
申请人： Wen-Chien David Hsiao , Yimin Hsu , Vladimir Nikitin , Aron Pentek , Yi Zheng
发明人： Wen-Chien David Hsiao , Yimin Hsu , Vladimir Nikitin , Aron Pentek , Yi Zheng
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) is deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.
摘要翻译：一种用于制造用于垂直磁记录的磁写头的方法。该方法允许写头形成有具有凹形后缘的写入极。该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的ALD层的一部分。执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

100. 发明申请

US20080271308A1 METHOD OF MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A WRAP-AROUND TRAILING SHIELD AND A CONCAVE TRAILING EDGE MAIN POLE 有权
标题翻译：制造具有缠绕护栏和凹凸条纹边缘的普通磁性写头的方法
公开(公告)号：US20080271308A1
公开(公告)日：2008-11-06
申请号：US11744022
申请日：2007-05-03
申请人： Wen-Chien David Hsiao , Yimin Hsu , Vladimir Nikitin , Aron Pentek , Yi Zheng
发明人： Wen-Chien David Hsiao , Yimin Hsu , Vladimir Nikitin , Aron Pentek , Yi Zheng
IPC分类号： G11B5/127 , C23C14/00
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) h deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.
摘要翻译：一种用于制造用于垂直磁记录的磁写头的方法。该方法允许写头形成有具有凹形后缘的写入极。该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的一部分ALD层。执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

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