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    • 96. 发明授权
    • Solid-state image sensor
    • 固态图像传感器
    • US09024405B2
    • 2015-05-05
    • US13034194
    • 2011-02-24
    • Takeshi Aoki
    • Takeshi Aoki
    • H01L27/14H01L27/146
    • H01L27/14636H01L27/14623H01L27/14683
    • A solid-state image sensor including an effective pixel portion in which a plurality of pixels including photodiodes formed on a semiconductor substrate are arranged, and a peripheral portion arranged around the effective pixel portion, includes a plurality of metal wiring layers arranged above the semiconductor substrate, and a planarizing film covering a patterned metal wiring layer that is a top layer among the plurality of metal wiring layers, wherein in the effective pixel portion, the plurality of metal wiring layers have openings configured to guide light to the photodiodes, and in the peripheral portion, an opening is provided in the top layer, and at least one metal wiring layer between the top layer and the semiconductor substrate has a pattern which blocks light incident on the photodiodes via the opening in the top layer.
    • 一种固态图像传感器,包括有效像素部分,其中布置有形成在半导体衬底上的包含光电二极管的多个像素,以及围绕有效像素部分布置的周边部分,包括布置在半导体衬底上方的多个金属布线层 以及覆盖多个金属布线层中的顶层的图案化金属布线层的平坦化膜,其中,在有效像素部中,多个金属布线层具有将光引导到光电二极管的开口,在 在顶层设置有开口部,顶层与半导体基板之间的至少一个金属配线层具有通过上层的开口阻挡入射到光电二极管上的光的图案。