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    • 94. 发明授权
    • Method and arrangement for passing data between a reference chip and an external bus
    • 在参考芯片和外部总线之间传递数据的方法和装置
    • US06467010B1
    • 2002-10-15
    • US09513009
    • 2000-02-25
    • Timothy PontiusMark Johnson
    • Timothy PontiusMark Johnson
    • G06F1340
    • G06F13/4059
    • A method and arrangement passes data between two busses without needing conventional bridge-interface protocols. Consistent with one method embodiment of the present invention, data is passed between a first bus on a reference chip and an external bus using a two-way buffer arrangement between the external bus and the first bus. The method includes coupling a two-way buffer arrangement between the external bus and the first bus, determining which of the busses is the initiating bus, and in response to this determination, controlling the two-way buffer arrangement to asynchronously copy data through the two-way buffer arrangement from the initiating bus to the other bus, wherein data is passed automatically in response to its presence at the buffer arrangement without any clock cycle delays. An example application is directed to interfacing with a bus used for a rapid silicon processing chip.
    • 一种方法和装置在两个总线之间传递数据,而不需要传统的桥接口协议。 根据本发明的一个方法实施例,使用在外部总线和第一总线之间的双向缓冲器布置,在参考芯片上的第一总线和外部总线之间传递数据。 该方法包括在外部总线和第一总线之间耦合双向缓冲器布置,确定哪个总线是起始总线,并且响应于该确定,控制双向缓冲器布置以异步地复制数据通过两个 从起始总线到另一总线的缓冲器布置,其中响应于其在缓冲器布置处的存在而自动地传送数据,而没有任何时钟周期延迟。 示例应用涉及与用于快速硅处理芯片的总线的接口。
    • 96. 发明授权
    • Optical instrument
    • 光学仪器
    • US6137571A
    • 2000-10-24
    • US125596
    • 1999-04-22
    • Mark Johnson
    • Mark Johnson
    • G01N21/15G01N21/85G01N1/10
    • G01N21/15G01N2021/035G01N2021/8564
    • An instrument for monitoring the characteristics of a liquid comprises a source of radiation (6) which is transmissible through the liquid and a detector (2) for detecting radiation emerging from the liquid. The detector (2) is responsive to components of the emerging radiation which are affected by variations in the characteristics of the liquid. The source (6) and detector (2) are arranged such that the radiation is transmitted through at least one free surface of the liquid (5) which is supported at least in part by surface tension of the liquid.
    • PCT No.PCT / GB97 / 00857 Sec。 371日期1999年4月22日 102(e)1999年4月22日PCT 1997年3月26日PCT公布。 出版物WO97 / 36167 日期1997年10月2日用于监测液体特性的仪器包括可通过液体传播的辐射源(6)和用于检测从液体中出射的辐射的检测器(2)。 检测器(2)响应于受液体特性变化影响的出射辐射的分量。 源(6)和检测器(2)被布置成使得辐射透过液体(5)的至少一个自由表面,其至少部分地由液体的表面张力支撑。
    • 97. 发明授权
    • Pivoting lid assembly for a chamber
    • 用于室的枢轴盖组件
    • US6050446A
    • 2000-04-18
    • US893410
    • 1997-07-11
    • Lawrence LeiSon TrinhGwo-Chuan TzuMark Johnson
    • Lawrence LeiSon TrinhGwo-Chuan TzuMark Johnson
    • H01L21/00B65D43/24
    • H01L21/67017
    • A lid assembly for a process chamber. The lid assembly includes a hinge having a hinge mount affixed to the chamber and a hinge arm. A pin extends from the hinge mount through an elongated slot in the hinge arm allowing both rotational and longitudinal motion of the hinge arm relative to the hinge mount. A support frame attached to the hinge arm has two side arms that extend perpendicularly from the hinge arms toward the front of the chamber. The lid is pivotally connected to the side arms by a pivot connection aligned with the center of mass of the lid. A detent extends from the lid through a slot in the side arm at a position offset from the pivot connection. The detent and slot serve to limit the allowable rotation of the lid relative to the lid support frame. Thus, the lid is allowed to float over the opening of the chamber as the lid is closed so that the lid may be positioned in parallel alignment relative to the opening of the chamber before being secured to the chamber.
    • 用于处理室的盖组件。 盖组件包括铰链,铰链具有固定到腔室的铰链座和铰链臂。 销从铰链座延伸通过铰链臂中的细长槽,允许铰链臂相对于铰链座的旋转和纵向运动。 附接到铰链臂的支撑框架具有从铰链臂朝向腔室的前部垂直延伸的两个侧臂。 盖通过与盖的质心对准的枢转连接件枢转地连接到侧臂。 制动器在从枢轴连接偏离的位置处从盖子延伸穿过侧臂中的狭槽。 制动器和狭槽用于限制盖相对于盖支撑框架的允许旋转。 因此,当盖被关闭时,允许盖在室的开口上浮动,使得盖可以在被固定到室之前相对于室的开口平行对准地定位。
    • 98. 发明授权
    • Heat exchange passage connection
    • 热交换通道连接
    • US5968276A
    • 1999-10-19
    • US893859
    • 1997-07-11
    • Lawrence LeiSon TrinhMark Johnson
    • Lawrence LeiSon TrinhMark Johnson
    • H01L21/205C23C16/44C23C16/455H01L21/285C23C16/00
    • C23C16/45565C23C16/455C23C16/45572
    • The present invention provides a method and apparatus for improving thermal management of gas being delivered to a chemical vapor deposition chamber. Thermal management is accomplished using a heat transfer fluid in thermal communication with the deposition gas passageways delivering the gases to the chamber for deposition. The gas injection manifold includes gas passageways and coolant liquid passageways, wherein the gas passageways extend through a constant voltage gradient gas feedthrough and the coolant liquid passageways extend through a gas input manifold coupled to the inlet end of the constant voltage gradient gas feedthrough. This arrangement provides for increase coolant liquid flow and allows maintenance or disassembly of the constant voltage gradient gas feedthrough without breaking the seal on the coolant liquid system.
    • 本发明提供一种用于改善被输送到化学气相沉积室的气体的热管理的方法和装置。 使用与沉积气体通道热连通的传热流体将气体输送到室以进行沉积来实现热管理。 气体注入歧管包括气体通道和冷却剂液体通道,其中气体通道延伸通过恒定电压梯度气体馈通,并且冷却剂液体通道延伸通过耦合到恒定电压梯度气体馈通的入口端的气体输入歧管。 这种布置提供了增加冷却剂液体流量并允许恒定电压梯度气体馈通的维护或拆卸而不破坏冷却剂液体系统上的密封。