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    • 98. 发明申请
    • THIN FILM DEPOSITION APPARATUS INCLUDING DEPOSITION BLADE
    • 薄膜沉积装置,包括沉积刀片
    • US20110033621A1
    • 2011-02-10
    • US12849092
    • 2010-08-03
    • Choong-Ho LeeJung-Min Lee
    • Choong-Ho LeeJung-Min Lee
    • C23C16/04C23C16/44
    • C23C14/243C23C14/042C23C14/12
    • A thin film deposition apparatus for use with a substrate having deposition regions separated by non-deposition regions includes a deposition source, a first nozzle assembly disposed in front of the deposition source, at least one barrier wall assembly disposed in front of the first nozzle assembly, and a second nozzle assembly disposed between the barrier wall assembly and the substrate. At least one deposition blade is disposed between the deposition source and the first nozzle assembly, the first nozzle assembly and the barrier wall assembly, the barrier wall assembly and the second nozzle assembly, or the second nozzle assembly and the substrate. Using the deposition blade, the deposition of the deposition material on the non-deposition regions of the substrate may be minimized during a deposition process.
    • 一种用于具有由非沉积区域分离的沉积区域的基板的薄膜沉积设备包括沉积源,设置在沉积源前面的第一喷嘴组件,设置在第一喷嘴组件前面的至少一个阻挡壁组件 以及设置在阻挡壁组件和基板之间的第二喷嘴组件。 至少一个沉积刀片设置在沉积源和第一喷嘴组件,第一喷嘴组件和阻挡壁组件,阻挡壁组件和第二喷嘴组件之间,或第二喷嘴组件和衬底之间。 使用沉积刀片,可以在沉积工艺期间将沉积材料沉积在衬底的非沉积区域上。
    • 99. 发明申请
    • THIN FILM DEPOSITION APPARATUS
    • 薄膜沉积装置
    • US20100297348A1
    • 2010-11-25
    • US12784774
    • 2010-05-21
    • Choong-Ho LEEJung-Min LEE
    • Choong-Ho LEEJung-Min LEE
    • C23C16/52C23C16/00C23C16/04C23C16/44
    • C23C14/24
    • A thin film deposition apparatus that can be simply applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield includes: a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; a barrier wall assembly including a plurality of barrier walls that are arranged in the first direction in order to partition a space between the first nozzle and the second nozzle; and an alignment member including an interval control member that adjusts an interval between the second nozzle and the substrate, and/or an alignment control member that adjusts alignment between the second nozzle and the substrate.
    • 可以简单地应用于大规模制造大尺寸显示装置并且提高制造成品率的薄膜沉积装置包括:沉积源; 第一喷嘴,其设置在所述沉积源的一侧,并且包括沿第一方向布置的多个第一狭缝; 第二喷嘴,与所述第一喷嘴相对设置并且包括沿所述第一方向布置的多个第二狭缝; 阻挡壁组件,其包括沿第一方向布置的多个阻挡壁,以便分隔第一喷嘴和第二喷嘴之间的空间; 以及对准构件,其包括调节第二喷嘴和基板之间的间隔的间隔控制构件和/或调整第二喷嘴和基板之间的对准的对准控制构件。