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    • 10. 发明申请
    • MICROFABRICATED CALORIMETER FOR RF POWER MEASUREMENT
    • 用于RF功率测量的微波加热器
    • US20140239940A1
    • 2014-08-28
    • US14185298
    • 2014-02-20
    • The Research Foundation of the State University of New YorkBird Technologies Group Inc.
    • Joel D. MeltzerAlbert H. TitusBilel NejiJing Xu
    • G01R21/02
    • G01R21/02G01K17/08
    • Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.
    • 公开了一种具有电耦合到RF输入的负载的射频(RF)功率量热计,电耦合到负载并被配置为向负载施加低频偏置的可变低频电源。 RF功率量热计包括热耦合到负载的热介质。 此外,RF功率量热计包括热耦合到热介质的出口温度传感器,出口温度传感器被定位成通过负载加热来测量热介质的温度。 RF功率量热计还具有电路,其被配置为使用与RF负载热接触的热介质的温度测量结合低频偏置来测量与RF输入电耦合的RF源的平均功率。 还在使用RF功率量热计测量RF功率的方法中公开。