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1. 发明公开

US20240110790A1 METHOD FOR CORRECTING THE MEASUREMENT FROM A VIBRATING ANGULAR INERTIAL SENSOR 审中-公开
公开(公告)号：US20240110790A1
公开(公告)日：2024-04-04
申请号：US18276892
申请日：2022-02-15
申请人： THALES
发明人： Nicolas VERCIER , Jacques COATANTIEC
IPC分类号： G01C19/5747 , G01C25/00 , G01C21/16
CPC分类号： G01C19/5747 , G01C25/005 , G01C21/188
摘要： A measurement of a vibrating inertial sensor disposed on a carrier and includes a resonator extending around two mutually perpendicular x and y axes defining an xy sensor frame of reference and comprising: at least one vibrating movable mass comprising at least two portions configured to vibrate in phase opposition in a direction x′ defining an x′y′ wave frame of reference, with the vibration wave forming an electrical angle θ relative to the x-axis; at least a pair of excitation transducers and a pair of detection transducers operating along the two axes x and y; the correction method being applied when the sensor is operating with a vibration wave vibrating along the x′-axis and comprising the following steps, when the carrier is substantially stationary: A commanding an electrical rotation of the vibration wave according to a commanded angular velocity Ωc, such that the electrical angle θ scans at least one angular range of kπ radians; then B retrieving the measured angular values Ωe measured by the inertial sensor over the angular range, and determining the mean Ωem of the angular values measured; then C subtracting the commanded angular velocity Ωc from the mean Ωem; with steps A to C being carried out for at least two different commanded angular velocities so as to determine at least two means of the measured angular values; then D determining: the mean electrical scale factor error FEem, and the actual angular value Ωv of the carrier plus a drift value Dm of the sensor, the determining being carried out on the basis of the commanded angular velocity Ωc and of the means Ωem of the measured angular values, according to the following formula:

Ωem−Ωc=(Ωv+Dm)+FEem·Ωc

2. 发明授权

US11774244B2 3-axis gyroscope with rotational vibration rejection 有权
公开(公告)号：US11774244B2
公开(公告)日：2023-10-03
申请号：US17515271
申请日：2021-10-29
申请人： Analog Devices, Inc.
发明人： Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC分类号： G01C19/5747 , G01C19/5712 , G01C19/5719 , G01C19/574
CPC分类号： G01C19/5747 , G01C19/574 , G01C19/5712 , G01C19/5719
摘要： Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

3. 发明授权

US11561097B2 Multiaxis gyroscope with supplementary masses 有权
公开(公告)号：US11561097B2
公开(公告)日：2023-01-24
申请号：US17328754
申请日：2021-05-24
申请人： MURATA MANUFACTURING CO., LTD.
发明人： Anssi Blomqvist , Ville-Pekka Rytkönen , Mikko Partanen
IPC分类号： G01C19/5747
摘要： A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

4. 发明授权

US11448506B2 Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle 有权
公开(公告)号：US11448506B2
公开(公告)日：2022-09-20
申请号：US17176379
申请日：2021-02-16
申请人： Seiko Epson Corporation
发明人： Koichiro Komizo
IPC分类号： G01C19/574 , G01C19/5769 , H01L21/3065 , B81C1/00 , G01C19/5747 , B81B3/00
摘要： A gyro sensor includes a plurality of beams connected via a turnaround part. A groove is provided on a main surface of at least one beam of the plurality of beams. Wall thicknesses on the main surface of two sidewalls facing each other of the groove in a direction orthogonal to a longitudinal direction of the beam satisfy 0.9≤T1/T2≤1.1, where T1 is the wall thickness of one sidewall and T2 is the wall thickness of the other sidewall.

5. 发明授权

US11280613B2 MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning 有权
公开(公告)号：US11280613B2
公开(公告)日：2022-03-22
申请号：US16829413
申请日：2020-03-25
申请人： GEORGIA TECH RESEARCH CORPORATION
发明人： Farrokh Ayazi , Haoran Wen
IPC分类号： G01C19/5747 , G01P15/125 , G01P15/097 , G01C19/5642 , G01P15/08 , G01D5/241
摘要： An inertial measurement apparatus has mechanically bendable beams that have an isosceles trapezoid cross-section. The apparatus has a resonant member having a perimeter at least partially defined by a sidewall slanted at a first angular value and at least one electrode disposed adjacent, and parallel, to the sidewall and separated therefrom by a capacitive gap.

6. 发明授权

US11226202B2 Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units 有权
公开(公告)号：US11226202B2
公开(公告)日：2022-01-18
申请号：US16640882
申请日：2018-08-08
申请人： Robert Bosch GmbH
发明人： Odd-Axel Pruetz , Andreas Lassi , Burkhard Kuhlmann , Jan-Timo Liewald , Matthias Kuehnel , Niels Bode , Nils Felix Kuhlmann , Peter Degenfeld-Schonburg , Reinhard Neul
IPC分类号： G01C19/5712 , G01C19/5755 , G01C19/5747
摘要： A micromechanical rotation rate sensor system and a corresponding manufacturing method are described. The micromechanical rotation rate sensor system includes a first rotation rate sensor unit drivable rotatorily about a first axis in an oscillating manner for detecting a first outside rotation rate about a second axis and a second outside rotation rate about a third axis, the first, second and third axes being situated perpendicularly to one another, and a second rotation rate sensor unit linearly drivable by a drive unit along the second axis in an oscillating manner for detecting a third outside rotation rate about the first axis. The second rotation rate sensor unit is connected to the first rotation rate sensor unit via a first coupling unit for driving the first rotation rate sensor unit by the drive unit.

7. 发明申请

US20210381834A1 3-AXIS GYROSCOPE WITH ROTATIONAL VIBRATION REJECTION 有权
公开(公告)号：US20210381834A1
公开(公告)日：2021-12-09
申请号：US16894717
申请日：2020-06-05
申请人： Analog Devices, Inc.
发明人： Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC分类号： G01C19/5747 , G01C19/5712
摘要： Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

8. 发明授权

US11079229B2 Microelectromechanical structure with enhanced rejection of acceleration noise 有权
公开(公告)号：US11079229B2
公开(公告)日：2021-08-03
申请号：US16263416
申请日：2019-01-31
申请人： STMicroelectronics S.r.l.
发明人： Luca Coronato , Gabriele Cazzaniga
IPC分类号： G01C19/5747 , G01C19/5712 , G01C19/02
摘要： An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

9. 发明授权

US11054260B2 Vibration type angular velocity sensor 有权
公开(公告)号：US11054260B2
公开(公告)日：2021-07-06
申请号：US16708668
申请日：2019-12-10
申请人： DENSO CORPORATION
发明人： Tomoya Jomori
IPC分类号： G01C19/5747 , H01L41/08 , H01L41/187
摘要： A vibration type angular velocity sensor includes a substrate having a surface; a plurality of fixation parts, a plurality of weights, two linear drive beams, a plurality of supporting members, a drive part and a detection part. The two linear drive beams are disposed on opposite sides of the weights in one direction so as to be connected to each other through the weights. The supporting members join the fixation parts to the drive beams. The drive part drives the drive beams to vibrate. The detection part generates an electric output according to displacement of the weights caused by an angular velocity applied thereto while the drive beams are being driven to vibrate. The fixation parts are disposed between the two linear drive beams.

10. 发明授权

US10962367B2 Mobile mass suspension system comprising means of connecting the mobile mass with optimised linearity 有权
公开(公告)号：US10962367B2
公开(公告)日：2021-03-30
申请号：US16064123
申请日：2016-12-22
申请人： SAFRAN , COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
发明人： Philippe Serge Claude Onfroy , Mikael Colin , Thierry Verdot
IPC分类号： G01C19/5769 , G01C19/5747 , G01C19/5733 , G01C19/574 , G01C19/5762
摘要： A system is disclosed for suspension of a mobile mass, such as an inertial angular sensor, including a connection device including first and second connection elements connected to each other through a connection block and deformable in bending in a mobility plane so as to enable displacements relative to the connection block, of the mobile mass connected to the first connection element, and of another element of the system connected to the second connection element such as a support or another mobile mass respectively, along two distinct directions respectively. At least one of the connection elements is formed from two springs, connecting the connection block to the mobile mass or the other element of the system respectively. The connection element thus has improved linearity properties.

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