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    • 3. 发明申请
    • Z-STAGE WITH DYNAMICALLY DRIVEN STAGE MIRROR AND CHUCK ASSEMBLY
    • Z型舞台动态舞台和大型组合
    • US20130176548A1
    • 2013-07-11
    • US13784402
    • 2013-03-04
    • Salam HarbKent DouglasMarek ZywnoJames HaslimJon Hamilton
    • Salam HarbKent DouglasMarek ZywnoJames HaslimJon Hamilton
    • G03F7/20
    • G03F7/70758H01L21/68H01L21/6831Y10T74/20006Y10T279/21Y10T279/23Y10T279/27
    • Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.
    • 公开了基板支撑装置和方法。 衬底卡盘相对于舞台反射镜的运动可以通过感测衬底卡盘相对于舞台镜的位移而被动态地补偿,并将与一个或多个反馈回路中的位移成比例的信号与Z级致动器和/或XY平台 耦合到舞台镜的致动器。 或者,基板支撑装置可以包括Z平台板,平台反射镜,附接到Z平台板的一个或多个致动器以及安装到平台反射镜的基板卡盘,其具有基板卡盘的六个自由度的限制。 当Z平台板在与Z方向垂直的平面中扫描时,执行器在Z方向上向Z平台施加移动。 致动器可以包括具有附接到Z平台板的基部部分和从基部沿横向方向延伸的悬臂部分的力弯曲。 悬臂部分可以包括耦合在基部和悬臂部分的自由端之间的平行四边形弯曲部。
    • 5. 发明授权
    • Safety unit and safety device with the same
    • 安全装置与安全装置相同
    • US08230754B2
    • 2012-07-31
    • US11997222
    • 2006-08-11
    • Jae-Bok SongJung-Jun ParkByeong-Sang Kim
    • Jae-Bok SongJung-Jun ParkByeong-Sang Kim
    • F16P7/02
    • F16P5/005B25J19/063B62D1/195E05F15/40E05F15/608E05Y2900/132Y10T74/18176Y10T74/18184Y10T74/20006
    • The present invention provides a safety unit comprising: a case; a rotary linkage disposed at one end thereof at the outside of the case and rotatably mounted at the other end thereof to the case; a force transfer shaft mounted to one side of the rotary linkage in such a fashion as to be oriented perpendicular to the rotating plane of the rotary linkage; a crank linkage rotatably mounted at one end thereof to the inner side of the case and adapted to abut against the force transfer shaft at the outer circumferential edge thereof so as to be transferred with an external force to be rotatably moved; and a support means rotatably connected to the other end of the crank linkage and adapted to allow for the rotation of the crank linkage when an external force having a value larger than a predetermined threshold value is exerted to the rotary linkage.
    • 本发明提供了一种安全单元,包括:壳体; 旋转连杆,其一端设置在壳体的外侧,并可旋转地安装在壳体的另一端; 以与所述旋转连杆的旋转平面垂直的方式安装在所述旋转连杆的一侧的力传递轴; 曲柄连杆,其一端可旋转地安装在壳体的内侧,并且适于在其外周边缘处抵靠力传递轴,以便以外力被转动以可旋转地移动; 以及支撑装置,其可旋转地连接到所述曲柄连杆的另一端,并且当具有大于预定阈值的外力被施加到所述旋转连杆时,所述支撑装置允许所述曲柄连杆的旋转。
    • 6. 发明授权
    • Rotary actuator incorporating a force relationship, and a method of reducing angular slack in such a rotary actuator
    • 包含力关系的旋转致动器,以及减小这种旋转致动器中的角度松弛的方法
    • US08181550B2
    • 2012-05-22
    • US12622936
    • 2009-11-20
    • Bernard GemmatiRomuald Biest
    • Bernard GemmatiRomuald Biest
    • G05G1/00
    • B64C13/28G05G5/03G05G5/05Y10T74/20006
    • A rotary actuator incorporating a force relationship includes a twistably-deformable structure having a first and a second end plate and a helical spring with a first and a second terminal end secured on the first and the second end plate, respectively, and wherein the first and the second end plate have a first and a second notch, respectively, and wherein the first and the second notch have a first and a second contact zone, respectively. The rotary actuator further includes an outlet shaft and a motor assembly having an outlet gear configured to drive the twistably-deformable structure so as to drive the outlet shaft in rotation, wherein the motor assembly, the twistably-deformable structure and the outlet shaft are disposed in succession. The rotary actuator has a first finger constrained to rotate with the outlet gear and a second finger constrained to rotate with the outlet shaft.
    • 包括力关系的旋转致动器包括具有第一和第二端板的可扭转变形的结构和螺旋弹簧,第一和第二端部分别固定在第一和第二端板上,并且其中第一和第二端板 第二端板分别具有第一和第二凹口,并且其中第一和第二凹口分别具有第一和第二接触区域。 旋转致动器还包括出口轴和马达组件,其具有被配置为驱动可扭曲变形的结构以便驱动出口轴转动的出口齿轮,其中马达组件,可扭曲变形的结构和出口轴被设置 陆续。 旋转致动器具有被限制为与出口齿轮一起旋转的第一手指和被限制为与出口轴一起旋转的第二手指。
    • 9. 发明授权
    • Actuator for systems for guiding space equipment with a variable rate of rotation
    • 用于引导具有可变转速的空间设备的系统的执行器
    • US07988098B2
    • 2011-08-02
    • US11773764
    • 2007-09-13
    • Yannick BaudasseJérôme BrossierXavier Jeandot
    • Yannick BaudasseJérôme BrossierXavier Jeandot
    • B64G1/22
    • B64G1/222B64G1/66Y10T74/20006
    • Actuator for a device for the rotary positioning of a movable element for space equipment comprising a part attached to the fixed portion of said equipment, a bearing, a sleeve designed to actuate the movable portion of said equipment and mounted on an output shaft supported by a first race of said bearing, said actuator comprising a mechanically movable input means and being capable of converting a movement of the input means into a rotary movement of the output shaft about the axis of said bearing, characterized in that said second race of said bearing is connected in rotation to the part of said equipment, in that an adjustable stop so as to angularly limit the relative rotation of the two races of the bearing, and in that the rate of rotation of the output shaft in response to a movement of the input means is different depending on whether or not the sleeve is resting on the adjustable stop.
    • 用于用于空间设备的可移动元件的旋转定位的装置的致动器,包括附接到所述设备的固定部分的部件,轴承,设计成致动所述设备的可移动部分并安装在由 所述致动器包括机械可移动的输入装置,并且能够将输入装置的运动转换成所述输出轴围绕所述轴承的轴线的旋转运动,其特征在于,所述轴承的所述第二座圈是 与所述设备的一部分旋转连接,其特征在于,其是可调节止动件,以便角度地限制轴承的两个座圈的相对旋转,并且响应于输入轴的移动,输出轴的旋转速率 手段是不同的,这取决于套管是否靠在可调节止动件上。
    • 10. 发明授权
    • Z-stage with dynamically driven stage mirror and chuck assembly
    • Z级,动态驱动舞台镜和卡盘组合
    • US07800735B2
    • 2010-09-21
    • US11420985
    • 2006-05-30
    • Salam HarbKent DouglasMarek ZwynoJames HaslimJon Hamilton
    • Salam HarbKent DouglasMarek ZwynoJames HaslimJon Hamilton
    • G03B27/58
    • G03F7/70758H01L21/68H01L21/6831Y10T74/20006Y10T279/21Y10T279/23Y10T279/27
    • Substrate support apparatus and methods are described. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.
    • 描述了基板支撑装置和方法。 衬底卡盘相对于舞台反射镜的运动可以通过感测衬底卡盘相对于舞台镜的位移而被动态地补偿,并将与一个或多个反馈回路中的位移成比例的信号与Z级致动器和/或XY平台 耦合到舞台镜的致动器。 或者,基板支撑装置可以包括Z平台板,平台反射镜,附接到Z平台板的一个或多个致动器以及安装到平台反射镜的基板卡盘,其具有基板卡盘的六个自由度的约束。 当Z平台板在与Z方向垂直的平面中扫描时,执行器在Z方向上向Z平台施加移动。 致动器可以包括具有附接到Z平台板的基部部分和从基部沿横向方向延伸的悬臂部分的力弯曲。 悬臂部分可以包括耦合在基部和悬臂部分的自由端之间的平行四边形弯曲部。