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1. 发明公开

US20240158223A1 Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt, and Piston Beamsteering 审中-公开
公开(公告)号：US20240158223A1
公开(公告)日：2024-05-16
申请号：US18421596
申请日：2024-01-24
申请人： Government of the United States, as represented by the Secretary of the Air Force
发明人： John PK Walton , LaVern A. Starman , David Torres Reyes
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： B81B3/0043 , G02B26/0833 , G02B26/0841 , G02B26/0866 , B81B2201/032 , B81B2201/042 , B81B2203/053 , B81B2203/058
摘要： An actuator element of a MEMS device on a substrate able to create large, out-of-plane deflection includes two separated metallic layers contacting the substrate. The second metallic layer has a first portion contacting the substrate and a second portion having cantilevered over the substrate and first metallic layer. A first insulating layer contacts the cantilevered metallic layer on a bottom contacting surface and a second insulating layer contacting the cantilevered metallic layer on a portion of a top contacting surface. The second, cantilevered portion of the metallic layer is prestressed causing the distal end to deform away from the substrate. Applying a voltage potential between the first and second metallic layers creates an electrostatic field drawing the distal end toward the substrate.

2. 发明授权

US10838286B2 Image generating unit, image projecting apparatus, and heat sink 有权
公开(公告)号：US10838286B2
公开(公告)日：2020-11-17
申请号：US16333689
申请日：2017-10-20
申请人： Yoshito Saito , Akihisa Mikawa
发明人： Yoshito Saito , Akihisa Mikawa
IPC分类号： G03B21/16 , G02B26/08 , G03B21/00 , G03B33/16
CPC分类号： G03B21/16 , G02B26/085 , G02B26/0833 , G02B26/0866 , G03B21/008 , G03B33/16
摘要： An image generating unit includes an image generating part configured to generate an image from illumination light; a driving magnet configured to generate a magnetic field; a driving coil arranged in the magnetic field of the driving magnet; a heat radiating part coupled to the image generating part and configured to radiate heat of the image generating part. The driving magnet and the driving coil move the image generating part and the heat radiating part. The driving coil is placed at the heat radiating part via a substance, thermal conductivity of the substance being lower than thermal conductivity of the heat radiating part.

3. 发明授权

US10488650B2 Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another 有权
公开(公告)号：US10488650B2
公开(公告)日：2019-11-26
申请号：US15604065
申请日：2017-05-24
申请人： Robert Bosch GmbH
发明人： Helmut Grutzeck , Joerg Muchow , Mirko Hattass , Stefan Mark , Thorsten Balslink , Frank Schatz
IPC分类号： G02B26/08 , B81B3/00 , G02B26/10
CPC分类号： G02B26/085 , B81B3/0045 , B81B3/0062 , G02B26/0858 , G02B26/0866 , B81B2201/042 , B81B2203/0163 , B81B2203/056 , B81B2203/058 , G02B26/101
摘要： A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.

4. 发明申请

US20190004310A1 HIGH POWER ADAPTIVE MIRROR 审中-公开
公开(公告)号：US20190004310A1
公开(公告)日：2019-01-03
申请号：US16062516
申请日：2016-12-16
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： Erwin John VAN ZWET , Teunis Cornelis VAN DEN DOOL , Evert NIEUWKOOP
IPC分类号： G02B26/08
CPC分类号： G02B26/0825 , G02B26/06 , G02B26/0841 , G02B26/0866
摘要： According to an aspect of the invention, there is provided a mirror structure for adaptive optics devices, characterized in that it comprises: an elastically deformable layer in response to an applied force, said deformable layer comprising a central portion reflective to said an incident light beam (F); a support substrate positioned spaced with respect to said deformable layer; a spacer element connected to said elastically deformable layer and support substrate and positioned there between, said spacer element being arranged so that the separation distance between said first and second inner surface is in the range between 2 and 100 micron; an inner chamber at least partially defined by said first and substrate and by said spacer element, said inner chamber containing a pressurized gas (G); an actuator system capable of causing a deformation of said central portion counteracting the pressure of said pressurized gas; wherein, in use, said central portion is deformed according to profiles such as to control said light beam. Advantages may include thermal robustness and improved dimensional scaling properties.

5. 发明申请

US20160154203A1 OPTICAL STRUCTURE WITH RIDGES ARRANGED AT THE SAME AND METHOD FOR PRODUCING THE SAME 审中-公开
标题翻译：具有安装在其上的RIDGES的光学结构及其生产方法
公开(公告)号：US20160154203A1
公开(公告)日：2016-06-02
申请号：US14952617
申请日：2015-11-25
申请人： Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
发明人： Frank WIPPERMANN , Andreas REIMANN , Nicolas LANGE , Andreas BRAEUER
IPC分类号： G02B7/02 , G02B7/18 , G02B7/00
CPC分类号： G02B7/028 , G02B7/008 , G02B7/025 , G02B7/1815 , G02B26/0866
摘要： An apparatus having an optical structure and ridges is described, wherein the ridges connect the optical structure to a supporting structure and wherein the optical structure is able to perform a movement in relation to a reference plane.
摘要翻译：描述了具有光学结构和脊的装置，其中脊将光学结构连接到支撑结构，并且其中光学结构能够执行相对于参考平面的移动。

6. 发明申请

US20140016177A1 ENVIRONMENTALLY RESPONSIVE OPTICAL MICROSTRUCTURED HYBRID ACTUATOR ASSEMBLIES AND APPLICATIONS THEREOF 有权
标题翻译：环境光学微结构化混合动力装置组件及其应用
公开(公告)号：US20140016177A1
公开(公告)日：2014-01-16
申请号：US13990385
申请日：2011-11-29
申请人： Joanna Aizenberg , Michael Aizenberg , Philseok Kim
发明人： Joanna Aizenberg , Michael Aizenberg , Philseok Kim
IPC分类号： G02B26/00 , B29D11/00
CPC分类号： G02B26/0833 , B29D11/0074 , B81B3/0032 , B81B2201/038 , B81B2207/053 , G02B26/00 , G02B26/0808 , G02B26/0866 , Y10T156/109
摘要： Microstructured hybrid actuator assemblies in which microactuators carrying designed surface properties to be revealed upon actuation are embedded in a layer of responsive materials. The microactuators in a microactuator array reversibly change their configuration in response to a change in the environment without requiring an external power source to switch their optical properties.
摘要翻译：微结构化混合致动器组件，其中携带设计表面特性的微致动器在致动时被显示，嵌入在一层响应材料中。微致动器阵列中的微致动器响应于环境的变化而可逆地改变其配置，而不需要外部电源来切换其光学特性。

7. 发明申请

US20130242364A1 METHOD FOR PROJECTING AN IMAGE 有权
标题翻译：投影图像的方法
公开(公告)号：US20130242364A1
公开(公告)日：2013-09-19
申请号：US13892971
申请日：2013-05-13
申请人： Lemoptix SA
发明人： Lucio Kilcher , Nicolas Abele
IPC分类号： G02B26/10
CPC分类号： G02B26/101 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/0866
摘要： According to the present invention there is provided a method of projecting an image, the method comprising the steps of, providing light signal which is configured such that it can be projected onto a display surface to display an image; oscillating a first reflective surface, to scan the light signal over the display surface, using an actuator which is in operable co-operation with the first reflective surface, by applying a first actuation signal to the first reflective surface, wherein a rise time or fall time of the first actuation signal is inversely proportional to a resonant frequency of oscillation of the first reflective surface.
摘要翻译：根据本发明，提供了一种投影图像的方法，该方法包括以下步骤：提供光信号，该信号被配置成可以投影到显示表面上以显示图像; 振荡第一反射表面，通过向第一反射表面施加第一致动信号，使用与第一反射表面可操作地协作的致动器来扫描显示表面上的光信号，其中上升时间或下降第一致动信号的时间与第一反射表面的振荡的共振频率成反比。

8. 发明授权

US08450132B2 Thermally activated micromirror and fabrication method 有权
标题翻译：热活化微镜及其制造方法
公开(公告)号：US08450132B2
公开(公告)日：2013-05-28
申请号：US13001247
申请日：2008-06-24
申请人： Nicolas Abele , Faouzi Khechana , Philippe Renaud
发明人： Nicolas Abele , Faouzi Khechana , Philippe Renaud
IPC分类号： H01L21/00
CPC分类号： G02B26/0866 , B81B3/0075 , B81B2201/042
摘要： A method for fabricating a micromirror in a wafer, including the steps of: depositing and etching layers forming two arms; etching the wafer such that in the back face only a thin portion of the wafer remains in the region of formation of the micromirror and the arms; performing an anisotropic etch, such that the thin portion remains only in the areas of the micromirror and the arms; and performing an isotropic etch to remove the thin portions under the arms, the etching step for forming the arms being performed following their shape and so as to form holes traversing the arms, the holes being positioned at edges of the region separating the micromirror and the wafer on both the side of the micromirror and the side of the portions of the wafer remaining after the anisotropic etching step. The invention also concerns the micromirror.
摘要翻译：一种在晶片中制造微镜的方法，包括以下步骤：沉积和蚀刻形成两个臂的层; 蚀刻晶片，使得在背面仅晶片的一部分保留在微镜和臂的形成区域中; 执行各向异性蚀刻，使得薄部分仅保留在微镜和臂的区域中; 并且进行各向同性蚀刻以去除臂下方的薄部分，用于形成臂的蚀刻步骤按照它们的形状进行，并且形成横过臂的孔，孔位于分隔微镜的区域的边缘在各向异性蚀刻步骤之后保留微镜两侧的晶片和晶片部分的一侧。本发明还涉及微镜。

9. 发明申请

US20130021656A1 MEMS ACTUATOR AND MEMS ACTUATED SHUTTER MECHANISM 有权
标题翻译： MEMS致动器和MEMS致动切换机构
公开(公告)号：US20130021656A1
公开(公告)日：2013-01-24
申请号：US13187185
申请日：2011-07-20
申请人： BRIAN ALBUS , EDWARD TANG
发明人： BRIAN ALBUS , EDWARD TANG
IPC分类号： G02B26/02
CPC分类号： G02B26/02 , G02B26/0866
摘要： The present application generally describes several microelectromechanical systems (MEMS) including apparatuses, devices and systems configured for actuating a microdevice such as a shutter for use in a mobile terminal camera. One preferred embodiment described herein can include an apparatus including a curtain substantially disposed in a plane; an actuator mechanically connected to the curtain; and a voltage supply electrically connected to the actuator such that in response to a predetermined voltage the actuator thermally expands and thereby causes displacement of the curtain within the plane.
摘要翻译：本申请通常描述了几个微机电系统（MEMS），其包括被配置用于致动诸如用于移动终端照相机的快门的微设备的装置，设备和系统。本文描述的一个优选实施例可以包括一种包括基本上设置在平面中的帘幕的装置; 机械地连接到窗帘的致动器; 以及电连接到致动器的电压源，使得响应于预定电压，致动器热膨胀，从而引起窗帘在平面内的位移。

10. 发明申请

US20120067709A1 MEMS SWITCH WITH LATCH MECHANISM 有权
标题翻译：具有锁定机构的MEMS开关
公开(公告)号：US20120067709A1
公开(公告)日：2012-03-22
申请号：US13375406
申请日：2010-06-07
申请人： James Melvin Slicker , Hongwei Qu
发明人： James Melvin Slicker , Hongwei Qu
IPC分类号： H01H9/20
CPC分类号： H01H1/0036 , G02B26/0866 , H01H1/50 , H01H2001/0047 , H01H2001/0078 , H01H2061/006
摘要： A MEMS switch includes a latch mechanism, first and second electrical conductors, a first latch actuator, a second latch actuator, and an axial actuator. The latch mechanism may include a transfer rod and a contact member, the contact member extending radially outwardly from a position along the axial length of the transfer rod. The first and second electrical conductors may extend along, and may be radially offset from, a portion of the transfer rod. The first latch actuator may include a first latch pin, and the second latch actuator may include a second latch pin, the first and second latch actuators being configured to move toward and away from the transfer rod, and the first and second latch pins configured to engage the contact member. The at least one axial actuator may be configured to move the contact member towards and away from the first and second electrical conductors.
摘要翻译： MEMS开关包括闩锁机构，第一和第二电导体，第一闩锁致动器，第二闩锁致动器和轴向致动器。闩锁机构可以包括传送杆和接触构件，接触构件从沿着传递杆的轴向长度的位置径向向外延伸。第一和第二电导体可以沿着传输杆的一部分延伸并且可以沿径向偏移。第一闩锁致动器可以包括第一闩锁销，并且第二闩锁致动器可以包括第二闩锁销，第一和第二闩锁致动器被配置成朝向和远离传递杆移动，并且第一和第二闩锁销被配置成接触联系人。至少一个轴向致动器可以被配置成使接触构件朝向和远离第一和第二电导体移动。

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