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1. 发明申请

US20160379802A1 APPARATUS FOR MONITORING VACUUM ULTRAVIOLET AND PLASMA PROCESS EQUIPMENT INCLUDING THE SAME 审中-公开
标题翻译：用于监测真空超声波和等离子体处理装置的装置
公开(公告)号：US20160379802A1
公开(公告)日：2016-12-29
申请号：US15161432
申请日：2016-05-23
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Sejin OH , Dougyong SUNG , Kiho HWANG , Yun-Kwang JEON
IPC分类号： H01J37/32 , G01J1/04 , G01J1/42 , C23C16/50 , C23C16/52
CPC分类号： G01J1/0407 , C23C16/50 , C23C16/52 , G01J1/0295 , G01J1/0422 , G01J1/0492 , G01J1/10 , G01J1/22 , G01J1/26 , G01J1/429 , G01J2001/242 , H01J37/32935 , H01J37/32972 , H01J37/3299
摘要： An apparatus for monitoring vacuum ultraviolet, the apparatus including a light controller including a slit, the slit to transmit plasma emission light emitted from a process chamber in which a plasma process is performed on a substrate; a light selector adjacent to the light controller, the light selector selectively to transmit light, having a predetermined wavelength band, of the plasma emission light passing through the slit; a light collector to concentrate the light selectively transmitted by the light selector; and a detector to detect the light concentrated by the light collector, the light selectively transmitted by the light selector being vacuum ultraviolet.
摘要翻译：一种用于监测真空紫外线的装置，该装置包括具有狭缝的光控制器，该狭缝用于传输从其中在基板上执行等离子体处理的处理室发射的等离子体发射光; 与所述光控制器相邻的光选择器，所述光选择器选择性地透射通过所述狭缝的等离子体发射光的具有预定波长带的光; 集光器，用于集中由选择器选择性地传输的光; 以及检测器，用于检测由光收集器集中的光，由选择器选择性地透射的光是真空紫外线。

2. 发明申请

US20160334285A1 FIBER COUPLED INTEGRATING SPHERE BASED-LASER ENERGY METER AND CALIBRATION SYSTEM (FCIS based - LEMCS) TRACEABLE TO PRIMARY LEVEL STANDARDS 有权
公开(公告)号：US20160334285A1
公开(公告)日：2016-11-17
申请号：US15113839
申请日：2014-01-24
申请人： TUBITAK (TURKIYE BILIMSEL VE TEKNOLOJIK ARASTIRMA KURUMU
发明人： Oguz CELIKEL , Ferhat SAMETOGLU
IPC分类号： G01K17/00 , G01J1/42
CPC分类号： G01K17/003 , G01J1/0407 , G01J1/0418 , G01J1/0425 , G01J1/0448 , G01J1/1626 , G01J1/22 , G01J1/4257 , G01J2001/0481 , G01J2001/4238 , G01J2001/444
摘要： The averaged pulse energy (J) of a Pulsed Type Laser Source can be measured by several types of commercial laser energy meters, such as pyroelectric detector or thermopile sensor, the spectral responsivity and the time/frequency related response properties of which are compatible with those of the Pulsed Type Laser Source. These Commercial Laser Energy Meters, regardless of sensor/detector type, should be calibrated against the working standards calibrated in a national (or an international) traceability chain relying on primary standards on the highest level having the lowest uncertainty in realizations of the fundamental SI units. FCIS based-LEMCS designed in this invention accomplishes both of the above proficiencies of measuring the averaged pulse energy of the Pulsed Type Laser Source and calibrating the Commercial Laser Energy Meters, which are traceably to primary level standards. FCIS based-LEMCS contains an integrating sphere having a novel port and an interior design and a series of mechanical choppers having separate Duty Cycles, each of which is rotated by an electrical motor in FCIS based-LEMCS, used for generating a chopped type laser, called as Chopped Type Laser Source, in order to provide the reference and averaged pulse energy for traceable calibration of Commercial Laser Energy Meters. With this invention, in addition to generating the reference and averaged pulse energy to be used during the calibration of Commercial Laser Energy Meters to be performed by means of FCIS based-LEMCS, the peak pulse energies of the Pulsed Type Laser Source and the Chopped Type Laser Source, which is a strict part of FCIS based-LEMS and which is used for producing the reference averaged pulse energy in the calibration of Commercial Laser Energy Meters, are also measured by FCIS based-LEMCS, traceable to Electrical Substitution Cryogenic Radiometer (ESCR) in primary optical watt scale (W), to 133Cs (or 87Rb) Atomic Frequency Standard in time scale t (s), and to direct current unit (A) realized with Quantum Hall—primary resistance standard (ohm) and DC Josephson primary voltage standard (V). With this configuration presented as a preferred embodiment, the averaged pulse energy measurements are performed and achieved for a range extending from 16.5 p J to 100 mJ.

3. 发明申请

US20120261547A1 Photon Detector with a Paralyzable Photon-Sensitive Element, in particular SPAD, and Distance Measuring Device Comprising said type of Photon Detector 有权
标题翻译：具有可分离光子敏感元件的光子检测器，特别是SPAD和包括所述类型的光子检测器的距离测量装置
公开(公告)号：US20120261547A1
公开(公告)日：2012-10-18
申请号：US13395425
申请日：2010-07-15
申请人： Andreas Eisele , Oliver Wolst , Bernd Schmidtke
发明人： Andreas Eisele , Oliver Wolst , Bernd Schmidtke
IPC分类号： G01J1/44
CPC分类号： G01S7/4816 , G01J1/04 , G01J1/0403 , G01J1/0411 , G01J1/0418 , G01J1/0437 , G01J1/0448 , G01J1/22 , G01J1/42 , G01S7/489 , G01S7/497 , G01S17/10 , G02F2203/52
摘要： A photon detector is disclosed that includes, in addition to an immobilisable photon-sensitive element, a photon transmission element. The photon detector is configured such that it can vary photon intensities impacting upon the photon-sensitive element and transmitted by the photon transmission element, for example, by modifying an absorption property or a defocussing property of the photon transmission element. Also, the immobile photon-sensitive element, which can be, for example a SPAD (Single Photon Avalanche Diode), always operates close to the optimal operating range and below an immobilisation range. A distancing device that includes this type of photo detector is also disclosed.
摘要翻译：公开了一种光子检测器，其包括除了可固定的光敏元件之外的光子传输元件。光子检测器被配置为使得其可以改变影响光子敏感元件并由光子传输元件透射的光子强度，例如通过改变光子传输元件的吸收特性或散焦特性。此外，可以是例如SPAD（单光子雪崩二极管）的固定光子敏感元件总是在接近最佳工作范围和低于固定范围的情况下操作。还公开了包括这种类型的光检测器的隔离装置。

4. 发明申请

US20110255088A1 POLARIZATION COMPENSATED BEAM SPLITTER AND DIAGNOSTIC SYSTEM FOR HIGH POWER LASER SYSTEMS 有权
标题翻译：极化补偿光束分离器和高功率激光系统的诊断系统
公开(公告)号：US20110255088A1
公开(公告)日：2011-10-20
申请号：US13038555
申请日：2011-03-02
申请人： C. BRENT DANE , Edward W.H. LAO , Scott N. FOCHS
发明人： C. BRENT DANE , Edward W.H. LAO , Scott N. FOCHS
IPC分类号： G01J4/00 , G02B27/28 , G02B27/10
CPC分类号： G01J1/22 , B23K26/043 , B23K26/0643 , B23K26/0652 , B23K26/0732 , B23K26/082 , B23K26/0884 , B23K26/146 , B23K26/356 , B23K26/705 , G01J1/04 , G02B27/0927 , G02B27/0955 , G02B27/0966 , G02B27/283
摘要： A beam sampling system, includes a first beam splitter adapted to split a laser beam having a primary polarization component and a secondary polarization component, into a first intermediate sample beam, and a first beam splitter output beam, the intermediate sample beam including first percentage of the primary polarization component and a second percentage of the secondary polarization component. A 90-degree polarization rotator is positioned in the intermediate sample beam line. A second beam splitter is mounted so that the intermediate sample beam is split into an output sample beam on an output sample beam line, and a second transmitted beam, the output sample beam including substantially said first percentage of the secondary polarization component and substantially said second percentage of the primary polarization component.
摘要翻译：一种光束采样系统，包括适于将具有主极化分量和次极化分量的激光束分裂成第一中间采样光束的第一分束器和第一分束器输出光束，所述中间样品光束包括第一百分比主极化分量和次极化分量的第二百分比。 90度偏振旋转器位于中间样品光束线中。安装第二分束器，使得中间采样光束在输出采样光束线上被分成输出样本光束，而第二透射光束，输出样本光束基本上包括第二百分比的二次偏振分量和基本上所述第二主偏振分量的百分比。

5. 发明申请

US20110253690A1 FLEXIBLE BEAM DELIVERY SYSTEM FOR HIGH POWER LASER SYSTEMS 审中-公开
标题翻译：用于大功率激光系统的柔性光束传送系统
公开(公告)号：US20110253690A1
公开(公告)日：2011-10-20
申请号：US12945713
申请日：2010-11-12
申请人： C. BRENT DANE , Edward W.H. Lao , Fritz B. Harris, JR. , Randall L. Hurd , Jon Rankin , Scott N. Fochs
发明人： C. BRENT DANE , Edward W.H. Lao , Fritz B. Harris, JR. , Randall L. Hurd , Jon Rankin , Scott N. Fochs
IPC分类号： B23K26/06
CPC分类号： G01J1/22 , B23K26/043 , B23K26/0643 , B23K26/0652 , B23K26/0732 , B23K26/082 , B23K26/0884 , B23K26/146 , B23K26/356 , B23K26/705 , G01J1/04 , G02B27/0927 , G02B27/0955 , G02B27/0966 , G02B27/283
摘要： A beam delivery technology for high power laser systems, like laser peening systems, for work pieces which may have compound curvatures, includes placing an optical assembly having a receiving optic, beam formatting optics and a scanner mounted thereon, in a position to receive laser pulses from a laser source and within an operating range of the process area. Polarized laser pulses are delivered to the receiving optic while the position of the optical assembly remains unchanged. The pulses proceed through the beam formatting optics to the scanner, and are direct to respective impact areas having nominal shapes and locations on the work piece. The scanning process includes for each laser pulse, setting direction, divergence, polarization, rotation and aspect ratio of the laser pulses output from the scanner, to control the polarization, shape and location on respective impact areas.
摘要翻译：用于大功率激光系统的射束输送技术，例如激光喷丸系统，用于可具有复合曲率的工件，包括放置具有接收光学元件，光束格式化光学器件和安装在其上的扫描仪的光学组件，以接收激光脉冲来自激光源并在处理区域的工作范围内。偏振的激光脉冲被传送到接收光学器件，同时光学组件的位置保持不变。脉冲通过光束格式化光学器件进入扫描器，并且直接到具有工件上的标称形状和位置的相应冲击区域。扫描过程包括从扫描仪输出的激光脉冲的每个激光脉冲，设定方向，发散度，极化，旋转和纵横比，以控制相应冲击区域上的偏振，形状和位置。

6. 发明授权

US2478399A Photometer lamp circuits providing a standard voltage 失效
标题翻译：光度计灯电路提供标准电压
公开(公告)号：US2478399A
公开(公告)日：1949-08-09
申请号：US72806947
申请日：1947-02-12
申请人： EASTMAN KODAK CO
发明人： GAINER HUNT ROBERT WILLIAM
IPC分类号： G01J1/22
CPC分类号： G01J1/22

7. 发明授权

US2353475A Photometer 失效
公开(公告)号：US2353475A
公开(公告)日：1944-07-11
申请号：US39026341
申请日：1941-04-25
申请人： KINNARD WOLCOTT S
发明人： KINNARD WOLCOTT S
IPC分类号： G01J1/22
CPC分类号： G01J1/22

8. 发明授权

US09874482B2 Fiber coupled integrating sphere based-laser energy meter and calibration system (FCIS based—LEMCS) traceable to primary level standards 有权
公开(公告)号：US09874482B2
公开(公告)日：2018-01-23
申请号：US15113839
申请日：2014-01-24
申请人： TUBITAK (TURKIYE BILIMSEL VE TEKNOLOJIK ARASTIRMA KURUMU)
发明人： Oguz Celikel , Ferhat Sametoglu
IPC分类号： G01K17/00 , G01J1/42 , G01J1/04
CPC分类号： G01K17/003 , G01J1/0407 , G01J1/0418 , G01J1/0425 , G01J1/0448 , G01J1/1626 , G01J1/22 , G01J1/4257 , G01J2001/0481 , G01J2001/4238 , G01J2001/444
摘要： FCIS based-LEMCS designed in this invention accomplishes both of the above proficiencies of measuring the averaged pulse energy of the Pulsed Type Laser Source and calibrating the Commercial Laser Energy Meters, which are traceably to primary level standards, FCIS based-LEMCS contains an integrating sphere having a novel port and an interior design and a series of mechanical choppers having separate Duty Cycles, each of which is rotated by an electrical motor in FCIS based-LEMCS, used for generating a chopped type laser, called as Chopped Type Laser Source, in order to provide the reference and averaged pulse energy for traceable calibration of Commercial Laser Energy Meters.

9. 发明申请

US20170211976A1 VARIABLE MODULATION OF RADIATION AND COMPONENTS 有权
公开(公告)号：US20170211976A1
公开(公告)日：2017-07-27
申请号：US15342937
申请日：2016-11-03
申请人： Halliburton Energy Services, Inc.
发明人： David L. Perkins , Christopher Michael Jones , Michael T. Pelletier , Li Gao , Robert Atkinson , William Soltmann
IPC分类号： G01J3/02 , G01J1/02 , G01J1/04 , E21B47/00 , G01J1/46 , G01J1/28 , G01J1/42 , G02B26/04 , G01V8/10 , G01J1/22
CPC分类号： G02B26/04 , E21B47/00 , G01J1/0228 , G01J1/0295 , G01J1/0444 , G01J1/0492 , G01J1/20 , G01J1/22 , G01J1/28 , G01J1/42 , G01J1/46 , G01J3/0235 , G01J3/027 , G01J3/0297 , G01V8/10
摘要： Various embodiments include systems and methods to provide selectable variable gain to signals in measurements using incident radiation. The selectable variable gain may be used to normalize signals modulated in measurements using incident radiation. The selectable variable gain may be attained using a number of different techniques or various combinations of these techniques. These techniques may include modulating a modulator having modulating elements in which at least one modulating element acts on incident radiation differently from another modulating element of the modulator, modulating the use of electronic components in electronic circuitry of a detector, modulating a source of radiation or combinations thereof. Additional apparatus, systems, and methods are disclosed.

10. 发明授权

US09201138B2 Photon detector with a paralyzable photon-sensitive element, in particular SPAD, and distance measuring device comprising said type of photon detector 有权
标题翻译：具有可分离光子元件，特别是SPAD的光子检测器和包括所述类型的光子检测器的测距装置
公开(公告)号：US09201138B2
公开(公告)日：2015-12-01
申请号：US13395425
申请日：2010-07-15
申请人： Andreas Eisele , Oliver Wolst , Bernd Schmidtke
发明人： Andreas Eisele , Oliver Wolst , Bernd Schmidtke
IPC分类号： G01S7/491 , G01S7/481 , G01J1/04 , G01J1/22 , G01J1/42 , G01S7/497 , G01S17/10 , G01S7/489
CPC分类号： G01S7/4816 , G01J1/04 , G01J1/0403 , G01J1/0411 , G01J1/0418 , G01J1/0437 , G01J1/0448 , G01J1/22 , G01J1/42 , G01S7/489 , G01S7/497 , G01S17/10 , G02F2203/52
摘要： A photon detector is disclosed that includes, in addition to an immobilizable photon-sensitive element, a photon transmission element. The photon detector is configured such that it can vary photon intensities impacting upon the photon-sensitive element and transmitted by the photon transmission element, for example, by modifying an absorption property or a defocusing property of the photon transmission element. Also, the immobile photon-sensitive element, which can be, for example a SPAD (Single Photon Avalanche Diode), always operates close to the optimal operating range and below an immobilization range. A distancing device that includes this type of photo detector is also disclosed.
摘要翻译：公开了一种除了可固定的光敏元件之外还包括光子传输元件的光子检测器。光子检测器被配置为使得其可以改变影响光子敏感元件并由光子传输元件透射的光子强度，例如通过改变光子传输元件的吸收特性或散焦特性。此外，可以是例如SPAD（单光子雪崩二极管）的固定光子敏感元件总是接近最佳工作范围并低于固定范围。还公开了包括这种类型的光检测器的隔离装置。

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