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    • 6. 发明授权
    • Surface treatment apparatus
    • 表面处理装置
    • US6086710A
    • 2000-07-11
    • US750397
    • 1996-12-06
    • Takeshi MiyashitaTakuya MiyakawaYasutugu AokiIsao KubotaOsamu KurashinaYasuhiko AsanoYoshio OdaYoshiaki Mori
    • Takeshi MiyashitaTakuya MiyakawaYasutugu AokiIsao KubotaOsamu KurashinaYasuhiko AsanoYoshio OdaYoshiaki Mori
    • H01J37/32H05H1/46H01L21/302
    • H01J37/32834
    • In a surface treatment apparatus (30) of the face type, a porous dielectric (37) is supported by the outer periphery portion of the supporting member (45) under the bottom surface of a porous electrode (32). The dielectric can be supported by the supporting member to permit the thermal expansion deformation of the dielectric by forming an upward inclined-face (47) and a downward inclined-face (43) on the supporting member (45) and the dielectric (37), respectively. Further, a discharge gas can be supplied uniformly to a discharge region (51) through the electrode (32) and the dielectric (37), both of which are porous. Many gas exhaust ports (41), by which the flow rate of the gas can be regulated, are provided around the discharge region (51). Thus, the gas is uniformly exhausted around the discharge region (51). Especially, if the gap between the dielectric (37) and a work (39) depends on mounting accuracy or the like and varies with location, the gas can be exhausted uniformly around the discharge region (51).
    • PCT No.PCT / JP96 / 00935 Sec。 371日期1996年12月6日第 102(e)日期1996年12月6日PCT PCT 1996年4月5日PCT公布。 WO96 / 31997 PCT出版物 日期:1996年10月10日在表面处理装置(30)中,多孔电介质(37)由多孔电极(32)的底面下方的支撑部件(45)的外周部支撑。 电介质可以由支撑构件支撑,以通过在支撑构件(45)和电介质(37)上形成向上的倾斜面(47)和向下倾斜面(43)来允许电介质的热膨胀变形, , 分别。 此外,放电气体可以通过电极(32)和电介质(37)均匀地供给到放电区域(51),两者都是多孔的。 在排出区域51周围设置有可以调节气体流量的多个排气口41。 因此,气体在排出区域51周围均匀排出。 特别地,如果电介质(37)和工件(39)之间的间隙取决于安装精度等,并且随着位置而变化,则可以在放电区域(51)周围均匀地排出气体。