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    • 3. 发明授权
    • Controller for wire-cut electrical discharge machine
    • 线切割放电机控制器
    • US07888617B2
    • 2011-02-15
    • US12044184
    • 2008-03-07
    • Kaoru HiragaToshiyuki Ogata
    • Kaoru HiragaToshiyuki Ogata
    • B23H7/02B23H7/20
    • B23H7/065B23H7/20
    • In a reference (n-th) machining pass, the wire travels along a machining route RTn and passes through a reentrant angular corner with wire position WMn, producing a workpiece edge Hn. In the following (n+1)-th machining pass, the wire travels along a machining route RTn+1, but the straight sections preceding and following the corner are replaced with a circular arc route so that the wire passes smoothly through a straight route, then a circular arc route, and then a straight route. The radius of curvature of the circular arc route is determined in the controller on the basis of the difference between the offset specified for the reference (n-th) machining pass and the offset specified for the (n+1)-th pass in which the circular arc route is inserted. Accordingly, the machining margin does not increase in the reentrant angular corner and the machining accuracy is thereby improved.
    • 在参考(第n)个加工道次中,线沿着加工路径RTn行进,并通过具有线位置WMn的可重入角角,产生工件边缘Hn。 在下面的第(n + 1)次加工中,线沿着加工路径RTn + 1行进,但是角部前后的直线部分被圆弧路线替代,使得线材顺利地通过直线路线 ,然后是圆弧路线,然后是直线路线。 圆弧路径的曲率半径基于对第(n)个加工通过指定的偏移与第(n + 1)次通过指定的偏移量之间的差异,在控制器中确定,其中 插入圆弧路线。 因此,在凹入角角中的加工余量不增加,从而提高了加工精度。
    • 5. 发明申请
    • Monitoring device for machining apparatus
    • 加工设备监控装置
    • US20070156278A1
    • 2007-07-05
    • US11646564
    • 2006-12-28
    • Kaoru HiragaToshiyuki Ogata
    • Kaoru HiragaToshiyuki Ogata
    • G06F19/00
    • G05B19/406
    • A monitoring device capable of automatically plotting a machining path according to a machining program to be executed or being executed for a machining apparatus in which workpieces and machining programs are automatically changed and executed successively. When a machining program is selected from machining managing means, the selected machining program is stored to be renewed in machining program execution means. When machining program analysis means determines the renewal of the machining program in the machining program, the machining program analysis means analyzes the machining program stored in the machining program execution means, so that a machining path according to the machining program is plotted on a display device.
    • 一种监视装置,其能够根据要对所述加工装置执行或正在执行的加工程序自动绘制加工路径,所述加工装置在其中自动地改变和执行工件和加工程序。 当从加工管理装置中选择加工程序时,所选择的加工程序被存储以在加工程序执行装置中更新。 当加工程序分析装置确定加工程序中的加工程序的更新时,加工程序分析装置分析存储在加工程序执行装置中的加工程序,使得根据加工程序的加工路径被绘制在显示装置上 。
    • 7. 发明授权
    • Polymer compound, photoresist composition including the polymer compound, and resist pattern formation method
    • 高分子化合物,包含高分子化合物的光致抗蚀剂组合物和抗蚀图案形成方法
    • US07807328B2
    • 2010-10-05
    • US10588866
    • 2005-01-20
    • Toshiyuki OgataSyogo MatsumaruHideo Hada
    • Toshiyuki OgataSyogo MatsumaruHideo Hada
    • G03F7/00G03F7/004
    • G03F7/0046C08G61/08G03F7/0392G03F7/0395G03F7/0397
    • The present invention provide a polymer compound whereby the alkali solubility greatly changes before and after exposure in a chemically amplified positive resist, and a photoresist composition including the polymer compound and a resist pattern formation method which can form a fine pattern with high resolution. The photoresist composition and the resist pattern formation method use the polymer compound including at least one substituent group selected from an alcoholic hydroxyl group, a phenolic hydroxyl group, or a carboxyl group as an alkali soluble group (i), wherein the substituent group is protected by an acid dissociable, dissolution inhibiting group (ii) represented by a general formula (1): —CH2—O—R  (1) (wherein R represents an organic group containing no more than 20 carbon atoms and at least one hydrophilic group).
    • 本发明提供了一种聚合物化合物,其中碱溶解度在化学放大的正性抗蚀剂中暴露之前和之后剧烈变化,以及包含高分子化合物的光致抗蚀剂组合物和能够以高分辨率形成精细图案的抗蚀剂图案形成方法。 光致抗蚀剂组合物和抗蚀图案形成方法使用包含至少一个选自醇羟基,酚羟基或羧基的取代基的聚合物化合物作为碱溶性基团(i),其中取代基被保护 由通式(1)表示的酸解离的溶解抑制基团(ⅱ):-CH 2 -O-R(1)(其中R表示含有不超过20个碳原子的有机基团和至少一个亲水基团) 。
    • 8. 发明申请
    • Phase Locked Loop with Temperature and Process Compensation
    • 具有温度和过程补偿的锁相环
    • US20090285344A1
    • 2009-11-19
    • US12120331
    • 2008-05-14
    • David W. BoerstlerMasaaki KanekoToshiyuki OgataJieming Qi
    • David W. BoerstlerMasaaki KanekoToshiyuki OgataJieming Qi
    • H03D3/24
    • H03L1/022H03L1/00H03L7/099H03L2207/06
    • Mechanisms are provided for compensating for process and temperature variations in a circuit. The mechanisms may select at least one resistor in a plurality of resistors in the circuit to provide a resistance value for generating a calibration voltage input to the circuit to compensate for variations in process. A reference signal may be compared to a feedback signal generated by the circuit based on the calibration signal. A determination is made as to whether the feedback signal is within a tolerance of the reference signal and, if so, an identifier of the selected at least one resistor is stored in a memory device coupled to the circuit. The circuit may be operated using the selected at least one resistor based on the identifier stored in the memory device. An apparatus and integrated circuit device utilizing these mechanisms are also provided.
    • 提供用于补偿电路中的工艺和温度变化的机构。 这些机构可以选择电路中的多个电阻器中的至少一个电阻器,以提供用于产生输入到电路的校准电压的电阻值,以补偿过程中的变化。 参考信号可以与基于校准信号的电路产生的反馈信号进行比较。 确定反馈信号是否在参考信号的公差之内,如果是,则将所选择的至少一个电阻器的标识符存储在耦合到该电路的存储器件中。 可以基于存储在存储器件中的标识符,使用所选择的至少一个电阻器来操作该电路。 还提供了利用这些机构的装置和集成电路装置。