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    • 2. 发明申请
    • Self-aligning patterning method
    • 自对准图案化方法
    • US20060128076A1
    • 2006-06-15
    • US11253756
    • 2005-10-20
    • Shunpu LiThomas KuglerChristopher NewsomeDavid Russell
    • Shunpu LiThomas KuglerChristopher NewsomeDavid Russell
    • H01L21/461
    • H01L51/105H01L21/823456H01L27/1292H01L27/285H01L51/0037H01L51/0516H01L51/0545
    • The present invention relates to a self-aligning patterning method which can be used to manufacture a plurality of multi-layer thin film transistors on a substrate. The method comprises firstly forming a patterned mask 20 on the surface of a sacrificial layer 18 which is part of a multi-layer structure 10 which comprises the substrate 12, a conductive layer 14, an insulating layer 16 and the sacrificial layer 18. Unpatterned areas are then etched to remove the corresponding areas of the sacrificial layer, the insulating layer 16 and the conductive layer 14 thereby leaving voids. A layer of dielectric 22 is then deposited over the etched multi-layer structure to at least substantially fill the voids. The deposited dielectric is then etched in order to at least partially expose the sides of the remaining areas 28 of the sacrificial layer. Conductive material 30 is then deposited on the surface of the etched dielectric. Finally, the remaining areas 28 of the sacrificial layer are removed together with any overlying material. The resulting plurality of multi-layer thin film transistors is preferably in the form of an array which may in turn be formed into a display device by coupling each transistor in the array to a light-emitting cell.
    • 本发明涉及可用于在基板上制造多个多层薄膜晶体管的自对准图案化方法。 该方法包括首先在牺牲层18的表面上形成图案化掩模20,牺牲层18是多层结构10的一部分,其包括基底12,导电层14,绝缘层16和牺牲层18.未图案化的区域 然后蚀刻以除去牺牲层,绝缘层16和导电层14的相应区域,从而留下空隙。 然后将一层电介质22沉积在蚀刻的多层结构上以至少基本上填充空隙。 然后蚀刻沉积的电介质以便至少部分地暴露牺牲层的剩余区域28的侧面。 然后将导电材料30沉积在蚀刻的电介质的表面上。 最后,牺牲层的剩余区域28与任何上覆材料一起被去除。 所得到的多个多层薄膜晶体管优选地是阵列的形式,其可以通过将阵列中的每个晶体管耦合到发光单元而依次形成为显示装置。
    • 4. 发明授权
    • Method of fabricating a heterojunction of organic semiconducting polymers
    • 制备有机半导体聚合物异质结的方法
    • US07468287B2
    • 2008-12-23
    • US11363063
    • 2006-02-28
    • Christopher NewsomeThomas KuglerShunpu LiDavid Russell
    • Christopher NewsomeThomas KuglerShunpu LiDavid Russell
    • H01L21/00
    • H01L51/0005H01L51/0007H01L51/424Y02E10/549
    • Provided is a method of forming a heterojunction of contiguous layers of organic semiconducting polymers. The method comprises firstly forming a layer of a first organic semiconducting polymer on a substrate. A solution of a film-forming material is then deposited on the layer of the first organic semiconducting polymer. The first organic semiconducting polymer is insoluble in this solution and so is not disturbed by its deposition. The deposited solution is then dried to form a temporary film having a thickness of less then 20 nm formed from the film-forming material. Next a solution of a second organic semiconducting polymer dissolved in an organic solvent is deposited on the temporary film and this solution dried. The solubility of the material forming the temporary film in the organic solvent and the thickness of the temporary film are such that the organic solvent permeates through the thickness of the temporary film during drying of the solution of the second organic semiconducting polymer. This causes the temporary film to break down but without disturbing the layer of the first organic semiconducting polymer so that the layer of the second organic semiconducting polymer is formed contiguously on the layer of the first organic semiconducting polymer.
    • 提供了形成有机半导体聚合物的连续层的异质结的方法。 该方法包括首先在衬底上形成第一有机半导体聚合物层。 然后将成膜材料的溶液沉积在第一有机半导体聚合物的层上。 第一种有机半导体聚合物不溶于该溶液,因此不会因其沉积而受到干扰。 然后将沉积的溶液干燥以形成由成膜材料形成的厚度小于20nm的临时膜。 接下来,将溶解在有机溶剂中的第二有机半导体聚合物的溶液沉积在临时膜上,并将该溶液干燥。 形成临时膜的材料在有机溶剂中的溶解度和临时膜的厚度使得有机溶剂在第二有机半导体聚合物的溶液的干燥期间渗透临时膜的厚度。 这导致临时膜破裂但不干扰第一有机半导体聚合物的层,使得第二有机半导体聚合物的层在第一有机半导体聚合物的层上连续形成。
    • 6. 发明申请
    • Thin film transistor and method for fabrication of an electronic device
    • 薄膜晶体管及其制造方法
    • US20070082438A1
    • 2007-04-12
    • US11540729
    • 2006-10-02
    • Shunpu LiChristopher NewsomeDavid RussellThomas Kugler
    • Shunpu LiChristopher NewsomeDavid RussellThomas Kugler
    • H01L21/8238
    • H01L51/055H01L51/0512
    • A method for fabricating an electronic device is disclosed, the method comprising depositing a first layer of insulator over a substrate, depositing a first layer portion over the insulator using a printing technique, and removing a portion of the insulator using a photo-exposure technique or an etching technique, using the first layer portion as a mask. A vertical short channel thin film transistor is also disclosed, the transistor comprising a substrate, a first electrode formed over the substrate, a first layer of insulator formed over a portion of the first electrode, a second electrode formed over the first layer of insulator, a semiconductor layer forming a channel between the first and second electrodes, a dielectric layer formed over the semiconductor layer, and a gate electrode formed over the dielectric layer, wherein the gate electrode spans at least a part of the channel between the first and second electrodes.
    • 公开了一种用于制造电子器件的方法,所述方法包括在衬底上沉积第一绝缘体层,使用印刷技术在绝缘体上沉积第一层部分,以及使用照相曝光技术去除绝缘体的一部分, 使用第一层部分作为掩模的蚀刻技术。 还公开了一种垂直短沟道薄膜晶体管,所述晶体管包括衬底,形成在衬底上的第一电极,形成在第一电极的一部分上的第一绝缘体层,形成在第一绝缘体层上的第二电极, 形成在所述第一和第二电极之间的沟道的半导体层,形成在所述半导体层上的电介质层以及形成在所述电介质层上的栅电极,其中所述栅电极跨越所述第一和第二电极之间的所述沟道的至少一部分 。
    • 8. 发明申请
    • Method of producing a substrate having areas of different hydrophilicity and/or oleophilicity on the same surface
    • 在相同表面上制备具有不同亲水性和/或亲油性区域的基材的方法
    • US20070066080A1
    • 2007-03-22
    • US11517442
    • 2006-09-08
    • Thomas KuglerShunpu LiChristopher NewsomeDavid Russell
    • Thomas KuglerShunpu LiChristopher NewsomeDavid Russell
    • H01L21/302H01L21/461H01L21/31H01L21/469
    • C08K3/36C08K9/06H01L51/0022H01L51/0541H01L2251/105
    • The present invention relates to substrates having wetting contrasts which include a top layer of polymer matrix and particles of an inorganic material. Such substrates can be processed in various ways which allow the production of good wetting contrasts by various processing means. According to a first aspect of the present invention, a method of producing a substrate having a surface comprising adjacent areas which have different hydrophilicities and/or oleophilicities is provided. The method comprises the step of etching away polymer from an area of the surface layer of a substrate precursor which comprises inorganic particles embedded in a polymer matrix. The etching exposes the inorganic particles at the surface to form one of the adjacent areas. The present invention is further directed to methods of producing a microelectronic component which involves depositing electronically functional material onto such a substrate. Further, the present invention is directed to substrates and substrate precursors.
    • 本发明涉及具有湿润对比度的衬底,其包括聚合物基质的顶层和无机材料的颗粒。 可以以各种方式处理这样的基底,这些方式允许通过各种处理方法产生良好的润湿对比度。 根据本发明的第一方面,提供一种制造具有包括具有不同亲水性和/或亲油性的相邻区域的表面的基材的方法。 该方法包括从包含嵌入聚合物基质中的无机颗粒的衬底前体的表面层的区域中去除聚合物的步骤。 蚀刻暴露表面处的无机颗粒以形成相邻区域中的一个。 本发明进一步涉及制造微电子部件的方法,该方法涉及将电子功能材料沉积到这种基底上。 此外,本发明涉及基板和基板前体。
    • 9. 发明申请
    • Method of fabricating a heterojunction of organic semiconducting polymers
    • 制备有机半导体聚合物异质结的方法
    • US20060247132A1
    • 2006-11-02
    • US11363063
    • 2006-02-28
    • Christopher NewsomeThomas KuglerShunpu LiDavid Russell
    • Christopher NewsomeThomas KuglerShunpu LiDavid Russell
    • H01L39/24
    • H01L51/0005H01L51/0007H01L51/424Y02E10/549
    • Provided is a method of forming a heterojunction of contiguous layers of organic semiconducting polymers. The method comprises firstly forming a layer of a first organic semiconducting polymer on a substrate. A solution of a film-forming material is then deposited on the layer of the first organic semiconducting polymer. The first organic semiconducting polymer is insoluble in this solution and so is not disturbed by its deposition. The deposited solution is then dried to form a temporary film having a thickness of less then 20 nm formed from the film-forming material. Next a solution of a second organic semiconducting polymer dissolved in an organic solvent is deposited on the temporary film and this solution dried. The solubility of the material forming the temporary film in the organic solvent and the thickness of the temporary film are such that the organic solvent permeates through the thickness of the temporary film during drying of the solution of the second organic semiconducting polymer. This causes the temporary film to break down but without disturbing the layer of the first organic semiconducting polymer so that the layer of the second organic semiconducting polymer is formed contiguously on the layer of the first organic semiconducting polymer.
    • 提供了形成有机半导体聚合物的连续层的异质结的方法。 该方法包括首先在衬底上形成第一有机半导体聚合物层。 然后将成膜材料的溶液沉积在第一有机半导体聚合物的层上。 第一种有机半导体聚合物不溶于该溶液,因此不会因其沉积而受到干扰。 然后将沉积的溶液干燥以形成由成膜材料形成的厚度小于20nm的临时膜。 接下来,将溶解在有机溶剂中的第二有机半导体聚合物的溶液沉积在临时膜上,并将该溶液干燥。 形成临时膜的材料在有机溶剂中的溶解度和临时膜的厚度使得有机溶剂在第二有机半导体聚合物的溶液的干燥期间渗透临时膜的厚度。 这导致临时膜破裂但不干扰第一有机半导体聚合物的层,使得第二有机半导体聚合物的层在第一有机半导体聚合物的层上连续形成。