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    • 1. 发明授权
    • Nitride-based semiconductor device
    • 氮化物半导体器件
    • US09379102B2
    • 2016-06-28
    • US13926553
    • 2013-06-25
    • Samsung Electronics Co., Ltd.
    • Woo-chul JeonKi-yeol ParkYoung-hwan ParkJai-kwang ShinJae-joon Oh
    • H01L29/778H01L27/06H01L21/8252
    • H01L27/0629H01L21/8252H01L27/0605
    • A nitride-based semiconductor diode includes a substrate, a first semiconductor layer disposed on the substrate, and a second semiconductor layer disposed on the first semiconductor layer. The first and second semiconductor layers include a nitride-based semiconductor. A first portion of the second semiconductor layer may have a thickness thinner than a second portion of the second semiconductor layer. The diode may further include an insulating layer disposed on the second semiconductor layer, a first electrode covering the first portion of the second semiconductor layer and forming an ohmic contact with the first semiconductor layer and the second semiconductor layer, and a second electrode separated from the first electrode, the second electrode forming an ohmic contact with the first semiconductor layer and the second semiconductor layer.
    • 氮化物系半导体二极管包括衬底,设置在衬底上的第一半导体层以及设置在第一半导体层上的第二半导体层。 第一和第二半导体层包括氮化物基半导体。 第二半导体层的第一部分可以具有比第二半导体层的第二部分薄的厚度。 二极管还可以包括设置在第二半导体层上的绝缘层,覆盖第二半导体层的第一部分并与第一半导体层和第二半导体层形成欧姆接触的第一电极,以及与第二半导体层分开的第二电极 第一电极,第二电极与第一半导体层和第二半导体层形成欧姆接触。