会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FABRICATING THE SAME
    • 半导体存储器件及其制造方法
    • US20150380421A1
    • 2015-12-31
    • US14848423
    • 2015-09-09
    • Samsung Electronics Co., Ltd.
    • Jae-Hwang SIMJinhyun SHINJong-Min LEE
    • H01L27/115H01L21/764
    • H01L27/11524H01L21/764H01L29/42324
    • Provided are a semiconductor memory device and a method of fabricating the same. the semiconductor memory device may include a semiconductor substrate with a first trench defining active regions in a first region and a second trench provided in a second region around the first region, a gate electrode provided on the first region to cross the active regions, a charge storing pattern disposed between the gate electrode and the active regions, a blocking insulating layer provided between the gate electrode and the charge storing pattern and extending over the first trench to define a first air gap in the first trench, and an insulating pattern provided spaced apart from a bottom surface of the second trench to define a second air gap in the second trench.
    • 提供一种半导体存储器件及其制造方法。 半导体存储器件可以包括半导体衬底,其具有限定第一区域中的有源区域的第一沟槽和设置在第一区域周围的第二区域中的第二沟槽,设置在第一区域上的栅电极以跨越有源区域, 存储图案,设置在所述栅电极和所述有源区之间,阻挡绝缘层,设置在所述栅电极和所述电荷存储图案之间并在所述第一沟槽上延伸以限定所述第一沟槽中的第一气隙,以及间隔开的绝缘图案 从第二沟槽的底表面到第二沟槽中限定第二气隙。