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    • 3. 发明授权
    • Method of manufacturing and structure of polycrystalline semiconductor thin-film heterostructures on dissimilar substrates
    • 在不同基板上制造多晶半导体薄膜异质结构的方法
    • US07410882B2
    • 2008-08-12
    • US10950452
    • 2004-09-28
    • William S. WongJeng-Ping LuRobert A. Street
    • William S. WongJeng-Ping LuRobert A. Street
    • H01L21/30
    • H01L27/1266H01L21/76254H01L21/763H01L27/1214H01L27/1274H01L29/78603
    • According to various exemplary embodiments of this invention, a method of producing a semiconductor structure is provided that includes providing a layered structure on a first substrate, the layered structure including a silicon layer that is provided over a first dielectric layer, a first dielectric layer that is provided over an etch-stop layer, the etch-stop layer provided over a buffer layer, the buffer layer provided over a sacrificial layer, and a sacrificial layer provided over a first substrate. Moreover, various exemplary embodiments of the methods of this invention provide for a second substrate over the layered structure, separating the first substrate and the sacrificial layer from the buffer layer, separating the buffer layer and the etch-stop layer from the first dielectric layer and providing a drain electrode and a source electrode over the layered structure. Moreover, according to various exemplary embodiments of the devices of this invention, a transistor device is provided that includes a substrate, a gate electrode over the substrate, a laser recrystallized polycrystalline semiconductor layer over the gate electrode and a source electrode and a drain electrode over the laser recrystallized polycrystalline semiconductor. Finally, according to various exemplary embodiments of the devices of this invention, a transistor device is provided that includes a substrate, a laser recrystallized polycrystalline semiconductor over the substrate, a source electric and a drain electrode over the laser recrystallized polycrystalline semiconductor and a gate electrode over the source electrode and the drain electrode.
    • 根据本发明的各种示例性实施例,提供了一种制造半导体结构的方法,其包括在第一基板上提供分层结构,所述层状结构包括设置在第一介电层上的硅层,第一介电层, 提供在蚀刻停止层上,在缓冲层上提供的蚀刻停止层,设置在牺牲层上的缓冲层以及设置在第一衬底上的牺牲层。 此外,本发明方法的各种示例性实施例提供了层叠结构上的第二衬底,将第一衬底和牺牲层与缓冲层分离,将缓冲层和蚀刻停止层与第一介电层分离,以及 在层状结构上设置漏电极和源电极。 此外,根据本发明的装置的各种示例性实施例,提供了一种晶体管器件,其包括衬底,衬底上的栅电极,栅电极上的激光再结晶多晶半导体层,以及源电极和漏电极 激光再结晶多晶半导体。 最后,根据本发明的器件的各种示例性实施例,提供了一种晶体管器件,其包括衬底,衬底上的激光再结晶多晶半导体,激光再结晶多晶半导体上的源电极和漏电极以及栅电极 在源电极和漏电极上。
    • 4. 发明授权
    • Geometry and design for conformal electronics
    • 适形电子学的几何和设计
    • US08492876B2
    • 2013-07-23
    • US12253390
    • 2008-10-17
    • William S. WongBrent S. KrusorRobert A. Street
    • William S. WongBrent S. KrusorRobert A. Street
    • H01L29/06
    • H05K3/0044G02F2201/56H01L27/14603H01L27/14692H01L27/14812H01L29/78603
    • A method of forming a three-dimensional electronic device includes forming at least one electronic device on a two-dimensional, flexible substrate, the electronic device being formed according to a three-dimensional structure, cutting the two-dimensional, flexible substrate, the cuts being located to allow the two-dimensional substrate to be shaped, the cuts having at least one stress relief feature, and shaping the two-dimensional, flexible substrate to form the three-dimensional structure, the stress relief features arranged to alleviate stress in the three-dimensional structure. A method of forming a three-dimensional electronic device includes forming at least one electronic device on a two-dimensional, flexible substrate, the electronic device being formed according to a three-dimensional structure, cutting the two-dimensional, flexible substrate, the cuts being arranged to as to increase a radius of curvature to meet a stress relief parameter when the substrate is shaped, and shaping the two-dimensional, flexible substrate to form the three-dimensional structure. A three-dimensional electronic device having an electronic device formed on a flexible substrate, the flexible substrate formed into a three-dimensional structure, wedged-shaped portions removed from the substrate to allow the substrate to be formed into the three-dimensional structure, and a stress relief feature arranged adjacent to the wedge-shaped portions.
    • 形成三维电子器件的方法包括在二维柔性基板上形成至少一个电子器件,该电子器件根据三维结构形成,切割二维柔性基片,切割 被设置成允许二维基底成形,切口具有至少一个应力消除特征,并且成形二维柔性基底以形成三维结构,应力消除特征被设置为减轻二维基底中的应力 三维结构。 形成三维电子器件的方法包括在二维柔性基板上形成至少一个电子器件,该电子器件根据三维结构形成,切割二维柔性基片,切割 被布置成当基底成形时增加曲率半径以满足应力消除参数,并且将二维柔性基底成形以形成三维结构。 一种具有形成在柔性基板上的电子器件的三维电子器件,形成为三维结构的柔性衬底,从衬底移除楔形部分以使衬底形成三维结构;以及 紧邻楔形部分布置的应力消除特征。
    • 6. 发明授权
    • Large area electronic device with high and low resolution patterned film features
    • 大面积电子设备具有高分辨率和低分辨率图案胶片功能
    • US07125495B2
    • 2006-10-24
    • US11019037
    • 2004-12-20
    • Robert A. StreetWilliam S. WongAlberto SalleoMichael L. Chabinyc
    • Robert A. StreetWilliam S. WongAlberto SalleoMichael L. Chabinyc
    • G01D15/00
    • H01L51/0004H01L51/0011H01L51/0021
    • Two different processing techniques are utilized to respectively form high resolution features and low resolution features in a critical layer of an electronic device, and in particular a large area electronic device. High resolution features are formed by soft lithography, and low resolution features are formed by jet-printing or using a jet-printed etch mask. Jet-printing is also used to stitch misaligned structures. Alignment marks are generated with the features to coordinate the various processing steps and to automatically control the stitching process. Thin-film transistors are formed by generating gate structures using a first jet-printed etch mask, forming source/drain electrodes using soft lithography, forming interconnect structures using a second jet-printed etch mask, and then depositing semiconductor material over the source/drain electrodes. Redundant structures are formed to further improve tolerance to misalignment, with non-optimally positioned structures removed (etched) during formation of the low resolution interconnect structures.
    • 利用两种不同的处理技术在电子设备的关键层,特别是大面积的电子设备中分别形成高分辨率特征和低分辨率特征。 通过软光刻形成高分辨率特征,并且通过喷墨印刷或使用喷射印刷的蚀刻掩模形成低分辨率特征。 喷墨印刷也用于缝合不对齐的结构。 产生对准标记的特征是协调各种处理步骤并自动控制缝合过程。 通过使用第一喷射印刷蚀刻掩模产生栅极结构来形成薄膜晶体管,使用软光刻形成源极/漏极,使用第二喷射印刷的蚀刻掩模形成互连结构,然后在源极/漏极上沉积半导体材料 电极。 形成冗余结构以进一步改善对未对准的容限,在形成低分辨率互连结构期间,非最佳定位的结构被去除(蚀刻)。
    • 9. 发明申请
    • Disordered Nanowire Solar Cell
    • 无序纳米线太阳能电池
    • US20120164781A1
    • 2012-06-28
    • US13410224
    • 2012-03-01
    • Robert A. StreetWilliam S. Wong
    • Robert A. StreetWilliam S. Wong
    • H01L31/105H01L31/18
    • H01L31/035227H01L31/075Y02E10/548
    • A disordered nanowire solar cell includes doped silicon nanowires disposed in a disordered nanowire mat, a thin (e.g., 50 nm) p-i-n coating layer formed on the surface of the silicon nanowires, and a conformal conductive layer disposed on the upper (e.g., n-doped) layer of the p-i-n coating layer. The disordered nanowire mat is grown from a seed layer using VLS processing at a high temperature (e.g., 450° C.), whereby the crystalline silicon nanowires assume a random interwoven pattern that enhances light scattering. Light scattered by the nanowires is absorbed by p-i-n layer, causing, e.g., electrons to pass along the nanowires to the first electrode layer, and holes to pass through the conformal conductive layer to an optional upper electrode layer. Fabrication of the disordered nanowire solar cell is large-area compatible.
    • 无序的纳米线太阳能电池包括设置在无序纳米线垫中的掺杂硅纳米线,形成在硅纳米线表面上的薄(例如50nm)的针涂层,以及设置在上层(例如, 掺杂)层。 无序纳米线垫在高温(例如450℃)下使用VLS处理从种子层生长,由此晶体硅纳米线呈现增强光散射的随机交织图案。 由纳米线散射的光被p-i-n层吸收,导致例如电子沿着纳米线传递到第一电极层,并且空穴通过共形导电层到可选的上电极层。 无序纳米线太阳能电池的制造是大面积兼容的。