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    • 1. 发明申请
    • CAPACITIVE PRESSURE SENSOR
    • 电容式压力传感器
    • US20160169759A1
    • 2016-06-16
    • US14892355
    • 2014-11-25
    • HORIBA STEC, CO., LTD.
    • Sotaro KISHIDATakehisa HATAITAAkira KUWAHARA
    • G01L9/00
    • G01L9/0072G01L19/0084G01L19/04G01L19/147
    • Provided is a capacitive pressure sensor that prevents the position of an electrode face in the direction parallel to a diaphragm from deviating from the position of the diaphragm, and accurately measures pressure. The capacitive pressure sensor includes: the diaphragm that deforms under pressure; an electrode member having the electrode face opposed to the diaphragm with a gap between the diaphragm and the electrode face; a body having one end to which the diaphragm is joined, and accommodating at least a portion of the electrode member; an insulating positioning member that is provided in the body and positions at least the portion of the electrode member in the body; and a pressing mechanism that holds and presses the insulating positioning member or the electrode member in the direction parallel to the diaphragm.
    • 提供了一种电容式压力传感器,其防止电极面在与隔膜平行的方向上的位置偏离隔膜的位置,并且精确地测量压力。 电容式压力传感器包括:压力变形的隔膜; 电极构件,其具有与所述隔膜相对的所述电极面,所述电极面在所述隔膜和所述电极面之间具有间隙; 具有所述隔膜的一端的主体,并且容纳所述电极构件的至少一部分; 绝缘定位构件,其设置在所述主体中并且至少位于所述主体中的所述电极构件的所述部分; 以及按照与隔膜平行的方向保持绝缘定位构件或电极构件的按压机构。
    • 2. 发明申请
    • CAPACITIVE PRESSURE SENSOR
    • 电容式压力传感器
    • US20160103030A1
    • 2016-04-14
    • US14894094
    • 2014-11-25
    • HORIBA STEC, CO., LTD.
    • Sotaro KISHIDATakehisa HATAITAAkira KUWAHARA
    • G01L9/00
    • G01L9/0072G01L9/0042G01L19/0084G01L19/04G01L19/069
    • Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.
    • 提供一种电容式压力传感器,其不仅防止温度的变化,而且防止空气中的电磁噪声影响压力的测量值。 在所述电容式压力传感器中,电极构件包括:测量电极,固定到绝缘定位构件并具有电极面; 信号提取电极,固定有密封另一端的绝缘密封件; 以及用于电连接测量电极和信号电极的柔性连接构件。 此外,柔性连接构件容纳在形成在测量电极或信号提取电极中的容纳凹部中。