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    • 7. 发明授权
    • Control system for a scanner drive
    • 扫描仪驱动器的控制系统
    • US6037583A
    • 2000-03-14
    • US010079
    • 1998-01-21
    • Gunter MoehlerGuenter SchoeppeSebastian Tille
    • Gunter MoehlerGuenter SchoeppeSebastian Tille
    • G02B21/00H01J3/14
    • G02B21/002
    • A control system for a scanner is disclosed, especially for a laser scanning microscope, with an oscillating motor for driving an oscillating mirror serving for the linearly oscillating deflection of a beam bundle, with a control unit for supplying the oscillating motor with an exciting current which is variable with respect to the control frequency, frequency curve, and amplitude, with a function generator which is connected with the control unit, and with a measurement value transducer for obtaining a sequence of information about the deflection positions of the oscillating mirror.The measurement value transducer is connected with the function generator by way of a logic unit for determining correction values for the exciting current. Accordingly, it is advantageously possible, by evaluating the information supplied by the measurement value transducer about the actual deflection position of the oscillating mirror, to determine correction values with the assistance of the logic unit. These correction values can be used, in turn, to influence the control frequencies emitted by the function generator in such a way that deviations are minimized or completely prevented.
    • 公开了一种用于扫描仪的控制系统,特别是用于激光扫描显微镜,具有用于驱动用于束束的线性振荡偏转的振荡镜的振荡电机,具有用于向振荡电机供应励磁电流的控制单元 相对于控制频率,频率曲线和幅度可变,与控制单元连接的函数发生器,以及用于获得关于振荡反射镜的偏转位置的信息序列的测量值传感器。 测量值传感器通过逻辑单元与功能发生器连接,用于确定激励电流的校正值。 因此,通过评估由测量值传感器提供的关于振荡镜的实际偏转位置的信息,有利于在逻辑单元的协助下确定校正值是有利的。 可以使用这些校正值,从而以使偏差最小化或完全防止的方式影响函数发生器发出的控制频率。
    • 8. 发明授权
    • Process and apparatus for determining surface information using a projected structure with a periodically changing brightness curve
    • 使用具有周期性变化的亮度曲线的投影结构来确定表面信息的处理和装置
    • US06731390B2
    • 2004-05-04
    • US10218556
    • 2002-08-13
    • Guenter Schoeppe
    • Guenter Schoeppe
    • G01B1124
    • G01B11/30
    • A process is disclosed for determining surface information by a projected structure with periodically changing brightness curve which is shifted by 1/n, n=whole number greater than two, of the grating constant, and the projection image is acquired of a CCD camera, and information is determined for every image point, which information represents the brightfield intensity multiplied by the respective grating phase, the sine components and cosine components are extracted from these images and gives: I. Ixy=Iobxy*m*sin x II. Ixy=Iobxy*m*cos x, where m = I obxy * sin 2 ⁢ x + cos 2 ⁢ x I obxy and the modulation factor m is calculated from I. and II. and is used for representation, An arrangement is also disclosed for changing the projection direction of a grating which is projected on a surface via at least one wedge-shaped prism body which is rotatable about the optical axis and a parallel plate which is tiltable relative to the optical axis, wherein the control of the tilting movement of the parallel plate is coupled with the rotational movement of the prism body in such a way that a change in the orientation of the prism body is carried out after at least three tilting steps.
    • 公开了一种用于通过周期性变化的亮度曲线确定表面信息的过程,该亮度曲线被移动了光栅常数的1 / n,n =大于2的整数,并且CCD摄像机获取投影图像, 对于每个图像点确定信息,该信息表示与相应光栅相位相乘的亮场强度,从这些图像中提取正弦分量和余弦分量,并给出:I。 Ixy = Iobxy * m * sin xII。 Ixy = Iobxy * m * cos x,其中调制因子m由I和II计算。 并且用于表示。还公开了一种用于改变通过能够围绕光轴旋转的至少一个楔形棱镜体投影在表面上的光栅的投影方向的布置,以及相对于 光轴,其中平行板的倾斜运动的控制与棱镜体的旋转运动耦合,使得在至少三个倾斜步骤之后进行棱镜体的取向的改变。
    • 10. 发明授权
    • Laser scanning microscope
    • 激光扫描显微镜
    • US06927902B2
    • 2005-08-09
    • US10313978
    • 2002-12-06
    • Guenter Schoeppe
    • Guenter Schoeppe
    • G02B26/10G02B21/00
    • G02B21/002
    • In a laser scanning microscope comprising a deflecting device, which is provided for variable deflection of a laser beam about a deflection angle, and a control unit, which controls the deflecting device via a control signal and measures, at least temporarily, a present deflection angle value, it is envisaged that, at the time of measurement of the present deflection angle value, a testing structure, which comprises at least one structural element whose position is assigned to a predetermined deflection angle value, is arranged downstream of the deflecting device, a detecting device is provided, which emits a detection signal when the laser beam is directed to the structural element, and the control unit assigns the present control signal to the predetermined deflection angle value upon reception of the detection signal.
    • 在包括偏转装置的激光扫描显微镜中,该偏转装置用于围绕偏转角度的可变偏转激光束,以及控制单元,该控制单元经由控制信号控制偏转装置,并至少临时地测量当前的偏转角 值时,设想在测量当前的偏转角度值时,包括至少一个其位置被分配到预定偏转角度值的结构元件的测试结构被布置在偏转装置的下游, 提供检测装置,其在激光束被引导到结构元件时发出检测信号,并且控制单元在接收到检测信号时将该控制信号分配给预定的偏转角值。