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    • 1. 发明申请
    • Method and system for native-byte form handling
    • US20050027709A1
    • 2005-02-03
    • US10931248
    • 2004-08-31
    • Eric WhiteJohn Boyd
    • Eric WhiteJohn Boyd
    • G06F17/30
    • G06F17/30893Y10S707/99939Y10S707/99942
    • A method and system are provided for native-byte form handling, one embodiment comprising a method for encoding user-submitted native-byte form data in a client-server computer network. A user, at a client computer, can select a Uniform Resource Locator (“URL”) with his or her web browser for access to a content provider's website. When accessing the content provider's web server, the client computer can transmit client computer specific information to the web server that can be used by the web server to determine the user's locale. The web server can determine the user's (client computer's) locale using, for example, an automatic locale detection algorithm, and forward the user's locale information to a back-end server. The content provider's back-end server can generate a locale-specific form having a pre-populated, uniquely-named field, using, for example, a dynamic page generation program. The locale-specific form can be served to the user's web browser for display to the user. The user can enter, on the locale-specific form, information that he or she wishes to submit to the content provider (e.g., a request for content). The user can transmit the form-entered data, including the pre-populated, uniquely-named field, to the content provider's web server. The web server can process the user form data, and an encoding object can be created, based on the value of the pre-populated field. The user form data can then be transcoded from its original encoding to a new encoding (e.g., the content provider's scripting environment encoding) and forwarded to the content provider's scripting environment.
    • 2. 发明授权
    • Method and system for native-byte form handling
    • 用于本地字节表单处理的方法和系统
    • US07146369B2
    • 2006-12-05
    • US10931248
    • 2004-08-31
    • Eric WhiteJohn Boyd
    • Eric WhiteJohn Boyd
    • G06F17/00G06F15/16
    • G06F17/30893Y10S707/99939Y10S707/99942
    • A method and system are provided for native-byte form handling, one embodiment comprising a method for encoding user-submitted native-byte form data in a client-server computer network. A user, at a client computer, can select a Uniform Resource Locator (“URL”) with his or her web browser for access to a content provider's website. When accessing the content provider's web server, the client computer can transmit client computer specific information to the web server that can be used by the web server to determine the user's locale. The web server can determine the user's (client computer's) locale using, for example, an automatic locale detection algorithm, and forward the user's locale information to a back-end server. The content provider's back-end server can generate a locale-specific form having a pre-populated, uniquely-named field, using, for example, a dynamic page generation program. The locale-specific form can be served to the user's web browser for display to the user. The user can enter, on the locale-specific form, information that he or she wishes to submit to the content provider (e.g., a request for content). The user can transmit the form-entered data, including the pre-populated, uniquely-named field, to the content provider's web server. The web server can process the user form data, and an encoding object can be created, based on the value of the pre-populated field. The user form data can then be transcoded from its original encoding to a new encoding (e.g., the content provider's scripting environment encoding) and forwarded to the content provider's scripting environment.
    • 提供了一种用于本地字节形式处理的方法和系统,一个实施例包括用于在客户端 - 服务器计算机网络中对用户提交的本地字节形式数据进行编码的方法。 在客户端计算机上的用户可以用他或她的网络浏览器选择统一资源定位符(“URL”)以访问内容提供商的网站。 当访问内容提供商的Web服务器时,客户端计算机可以将客户端计算机特定信息发送到可由Web服务器使用以确定用户的区域设置的Web服务器。 Web服务器可以使用例如自动区域设置检测算法来确定用户(客户端计算机)的区域设置,并将用户的区域设置信息转发到后端服务器。 内容提供商的后端服务器可以使用例如动态页面生成程序来生成具有预先填充的,唯一命名的字段的特定于语言环境的表单。 可以向用户的Web浏览器提供特定于语言环境的表单,以便向用户显示。 用户可以在区域特定形式上输入他或她希望提交给内容提供者的信息(例如,对内容的请求)。 用户可以将表单输入的数据(包括预先填充的,唯一命名的字段)传送到内容提供商的Web服务器。 Web服务器可以处理用户表单数据,并且可以基于预填充字段的值来创建编码对象。 然后可以将用户表单数据从其原始编码转码为新编码(例如,内容提供商的脚本编写环境编码),并将其转发到内容提供商的脚本环境。
    • 3. 发明授权
    • Method and system for native-byte form handling
    • 用于本地字节表单处理的方法和系统
    • US06850941B1
    • 2005-02-01
    • US10027383
    • 2001-12-21
    • Eric WhiteJohn Boyd
    • Eric WhiteJohn Boyd
    • G06F17/30
    • G06F17/30893Y10S707/99939Y10S707/99942
    • A method and system are provided for native-byte form handling, one embodiment comprising a method for encoding user-submitted native-byte form data in a client-server computer network. A user, at a client computer, can select a Uniform Resource Locator (“URL”) with his or her web browser for access to a content provider's website. When accessing the content provider's web server, the client computer can transmit client computer specific information to the web server that can be used by the web server to determine the user's locale. The web server can determine the user's (client computer's) locale using, for example, an automatic locale detection algorithm, and forward the user's locale information to a back-end server. The content provider's back-end server can generate a locale-specific form having a pre-populated, uniquely-named field, using, for example, a dynamic page generation program. The locale-specific form can be served to the user's web browser for display to the user. The user can enter, on the locale-specific form, information that he or she wishes to submit to the content provider (e.g., a request for content). The user can transmit the form-entered data, including the pre-populated, uniquely-named field, to the content provider's web server. The web server can process the user form data, and an encoding object can be created, based on the value of the pre-populated field. The user form data can then be transcoded from its original encoding to a new encoding (e.g., the content provider's scripting environment encoding) and forwarded to the content provider's scripting environment.
    • 提供了一种用于本地字节形式处理的方法和系统,一个实施例包括用于在客户端 - 服务器计算机网络中对用户提交的本地字节形式数据进行编码的方法。 在客户端计算机上的用户可以用他或她的网络浏览器选择统一资源定位符(“URL”)以访问内容提供商的网站。 当访问内容提供商的Web服务器时,客户端计算机可以将客户端计算机特定信息发送到可由Web服务器使用以确定用户的区域设置的Web服务器。 Web服务器可以使用例如自动区域设置检测算法来确定用户(客户端计算机)的区域设置,并将用户的区域设置信息转发到后端服务器。 内容提供商的后端服务器可以使用例如动态页面生成程序来生成具有预先填充的,唯一命名的字段的特定于语言环境的表单。 可以向用户的Web浏览器提供特定于语言环境的表单,以便向用户显示。 用户可以在区域特定形式上输入他或她希望提交给内容提供者的信息(例如,对内容的请求)。 用户可以将表单输入的数据(包括预先填充的,唯一命名的字段)传送到内容提供商的Web服务器。 Web服务器可以处理用户表单数据,并且可以基于预填充字段的值来创建编码对象。 然后可以将用户表单数据从其原始编码转码为新编码(例如,内容提供商的脚本编写环境编码),并将其转发到内容提供商的脚本环境。
    • 6. 发明授权
    • Methods and systems for low interfacial oxide contact between barrier and copper metallization
    • 屏障和铜金属化之间的低界面氧化物接触的方法和系统
    • US07749893B2
    • 2010-07-06
    • US11641361
    • 2006-12-18
    • Fritz RedekerJohn BoydYezdi DordiHyungsuk Alexander YoonShijian Li
    • Fritz RedekerJohn BoydYezdi DordiHyungsuk Alexander YoonShijian Li
    • H01L21/4763
    • C25D7/123C23C18/1653C23C28/023C23C28/322C23C28/34C23C28/341H01L21/28562H01L21/76843H01L21/76849H01L21/76856H01L21/76862H01L21/76873H01L21/76874H01L23/53238H01L2221/1089H01L2924/0002H01L2924/00
    • The present invention relates to methods and systems for the metallization of semiconductor devices. One aspect of the present invention is a method of depositing a copper layer onto a barrier layer so as to produce a substantially oxygen free interface therebetween. In one embodiment, the method includes providing a substantially oxide free surface of the barrier layer. The method also includes depositing an amount of atomic layer deposition (ALD) copper on the oxide free surface of the barrier layer effective to prevent oxidation of the barrier layer. The method further includes depositing a gapfill copper layer over the ALD copper. Another aspect of the present invention is a system for depositing a copper layer onto barrier layer so as to produce a substantially oxygen-free interface therebetween. In one embodiment, the integrated system includes at least one barrier deposition module. The system also includes an ALD copper deposition module configured to deposit copper by atomic layer deposition. The system further includes a copper gapfill module and at least one transfer module coupled to the at least one barrier deposition module and to the ALD copper deposition module. The transfer module is configured so that the substrate can be transferred between the modules substantially without exposure to an oxide-forming environment.
    • 本发明涉及用于半导体器件金属化的方法和系统。 本发明的一个方面是将铜层沉积在阻挡层上以在其间产生基本上无氧的界面的方法。 在一个实施例中,该方法包括提供阻挡层的基本上无氧化物的表面。 该方法还包括在阻挡层的无氧化物表面上沉积一定量的原子层沉积(ALD)铜,以有效地防止阻挡层的氧化。 该方法还包括在ALD铜上沉积间隙填充铜层。 本发明的另一方面是一种用于在阻挡层上沉积铜层以在其间产生基本上无氧的界面的系统。 在一个实施例中,集成系统包括至少一个阻挡层沉积模块。 该系统还包括配置为通过原子层沉积沉积铜的ALD铜沉积模块。 该系统还包括铜间隙填充模块和耦合到至少一个阻挡层沉积模块和ALD铜沉积模块的至少一个传输模块。 转移模块被配置为使得基板可以在基本上不暴露于氧化物形成环境的基础之间传递。
    • 10. 发明申请
    • Apparatus and method for confined area planarization
    • 限制区域平面化的装置和方法
    • US20070227656A1
    • 2007-10-04
    • US11395881
    • 2006-03-31
    • John BoydFritz RedekerYezdi DordiMichael RavkinJohn Larios
    • John BoydFritz RedekerYezdi DordiMichael RavkinJohn Larios
    • H01L21/461H01L21/306
    • H01L21/32115C25F7/00
    • A proximity head and associated method of use is provided for performing confined area planarization of a semiconductor wafer. The proximity head includes a chamber defined to maintain an electrolyte solution. A cathode is disposed within the chamber in exposure to the electrolyte solution. A cation exchange membrane is disposed over a lower opening of the chamber. A top surface of the cation exchange membrane is in direct exposure to the electrolyte solution to be maintained within the chamber. A fluid supply channel is defined to expel fluid at a location adjacent to a lower surface of the cation exchange membrane. A vacuum channel is defined to provide suction at a location adjacent to the lower surface of the cation exchange membrane, such that the fluid to be expelled from the fluid supply channel is made to flow over the lower surface of the cation exchange membrane.
    • 提供接近头和相关联的使用方法用于执行半导体晶片的限定区域平坦化。 邻近头包括限定为维持电解质溶液的室。 在室内暴露于电解质溶液中设置阴极。 阳离子交换膜设置在室的下部开口的上方。 阳离子交换膜的顶表面直接暴露于电解质溶液中以保持在室内。 流体供应通道被定义为在邻近阳离子交换膜的下表面的位置排出流体。 定义真空通道以在邻近阳离子交换膜的下表面的位置处提供吸力,使得要从流体供应通道排出的流体流过阳离子交换膜的下表面。