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    • 4. 发明申请
    • COAXIAL MICROWAVE APPLICATOR FOR PLASMA PRODUCTION
    • 用于等离子体生产的同轴微波辐射应用器
    • US20150173167A1
    • 2015-06-18
    • US14413559
    • 2013-07-10
    • UNIVERSITE JOSEPH FOURIER - GRENOBLE 1
    • Ana LacosteJacques Pelletier
    • H05H1/46H01J37/34H05H1/18
    • H05H1/46C23C14/3471C23C14/357H01J37/3405H01J2237/327H05H1/18H05H2001/4622H05H2001/463H05H2242/10
    • The disclosure includes a coaxial microwave applicator for plasma production, including a coaxial tube formed by a central core and an outer conductor separated from the central core by an annular space allowing propagation of microwaves. The applicator includes: a cylindrical permanent magnet disposed at the end of the central core; and at least one annular permanent magnet disposed at the end of the outer conductor, all of the magnets disposed at the end of the coaxial tube having the same direction of magnetisation. The magnetisation of the magnets forms a magnetic field suitable for generating, in a zone away from the end of the applicator, an electronic cyclotronic resonance coupling with the electric microwave field of the applicator. The external radius and the magnetisation of the annular magnet are selected such that the magnetic field lines generated by the magnets pass through the coupling zone in a direction substantially parallel to the axis of the applicator.
    • 本公开包括用于等离子体生产的同轴微波施加器,包括由中心芯和外部导体形成的同轴管,所述同轴管由中心芯与通过微波传播的环形空间分开。 涂抹器包括:设置在中心芯的端部处的圆柱形永磁体; 以及设置在外部导体的端部处的至少一个环形永磁体,设置在同轴管的端部处的所有磁体具有相同的磁化方向。 磁体的磁化形成适于在远离施加器端部的区域中产生与施加器的电微波场耦合的电子循环谐振耦合的磁场。 选择外部半径和环形磁体的磁化,使得由磁体产生的磁场线在基本上平行于施加器的轴线的方向上穿过耦合区域。